公开(公告)号：US20200238303A1

公开(公告)日：2020-07-30

申请号：US16846000

申请日：2020-04-10

Applicant: APPLIED MATERIALS, INC.

Inventor： Dmitry LUBOMIRSKY ,  Vladimir KNYAZIK ,  Hamid NOORBAKHSH ,  Jason DELLA ROSA ,  Zheng John YE ,  Jennifer Y. SUN ,  Sumanth BANDA

IPC: B05B1/00 ,  H01J37/32 ,  B05B1/18 ,  C23C16/455

Abstract: Embodiments of showerheads having a detachable gas distribution plate are provided herein. In some embodiments, a showerhead for use in a substrate processing chamber includes a body having a first side and an opposing second side; a gas distribution plate disposed proximate the second side of the body; and a clamp disposed about a peripheral edge of the gas distribution plate to removably couple the gas distribution plate to the body, wherein the body is electrically coupled to the gas distribution plate through the clamp.

公开(公告)号：US20180142354A1

公开(公告)日：2018-05-24

申请号：US15875726

申请日：2018-01-19

Applicant: Applied Materials, Inc.

Inventor： Sergio Fukuda SHOJI ,  Hamid NOORBAKHSH ,  Jong Mun KIM ,  Jason DELLA ROSA ,  Ajit BALAKRISHNA

IPC: C23C16/455 ,  C23C16/44 ,  H01J37/32 ,  F15D1/02

CPC classification number: C23C16/45591 ,  C23C16/4412 ,  F15D1/025 ,  H01J37/32633 ,  H01J37/32834

Abstract: Embodiments of the present invention provide apparatus and methods for reducing non-uniformity and/or skews during substrate processing. One embodiment of the present invention provides a flow equalizer assembly for disposing between a vacuum port and a processing volume in a processing chamber. The flow equalizing assembly includes a first plate having at least one first opening, and a second plate having two or more second openings. The first and second plates define a flow redistributing volume therebetween, and the at least one first opening and the two or more second openings are staggered.