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    Micro resonator array sensor for detecting wafer processing parameters
    3.
    发明授权
    Micro resonator array sensor for detecting wafer processing parameters 有权

    公开(公告)号：US11346875B2

    公开(公告)日：2022-05-31

    申请号：US16283364

    申请日：2019-02-22

    Applicant: APPLIED MATERIALS, INC.

    Inventor： Chuang-Chia Lin ,  Upendra Ummethala

    IPC: G01R29/08 ,  H01L21/66 ,  H01Q1/38

    Abstract: Embodiments include systems and methods for determining a processing parameter of a processing operation. Embodiments include a diagnostic substrate for determining processing parameters of a processing operation. In an embodiment, the diagnostic substrate comprises a substrate, a circuit layer over the substrate, and a capping layer over the circuit layer. In an embodiment, a micro resonator sensor is in the circuit layer and the capping layer. In an embodiment, the micro resonator sensor comprises, a resonating body and one or more electrodes for inducing resonance in the resonating body.

    SURFACE ACOUSTIC WAVE SENSOR ASSEMBLY
    4.
    发明申请
    SURFACE ACOUSTIC WAVE SENSOR ASSEMBLY 有权

    公开(公告)号：US20220116013A1

    公开(公告)日：2022-04-14

    申请号：US17068725

    申请日：2020-10-12

    Applicant: Applied Materials, Inc.

    Inventor： Chuang-Chia Lin

    IPC: H03H9/02 ,  H01L41/113

    Abstract: A sensor device that includes an integrated sensor assembly having a surface acoustic wave (SAW) sensor disposed on a piezoelectric substrate. The SAW sensor is adapted to measure an environmental condition of an environment in response to an RF signal. The SAW sensor includes an interdigitated transducer (IDT) formed on a substrate having at least a layer of a piezoelectric material. The SAW sensor includes either one or more SAW reflectors of a second IDT formed on the piezoelectric material. The SAW sensor further includes an RF antenna formed on the piezoelectric material. The SAW sensor and the RF antenna are integrated with one another on the piezoelectric material.

    IN-CHAMBER LOW-PROFILE SENSOR ASSEMBLY
    6.
    发明申请
    IN-CHAMBER LOW-PROFILE SENSOR ASSEMBLY 有权

    公开(公告)号：US20220172968A1

    公开(公告)日：2022-06-02

    申请号：US17109019

    申请日：2020-12-01

    Applicant: Applied Materials, Inc.

    Inventor： Chuang-Chia Lin ,  Wenwei Qiao

    IPC: H01L21/67 ,  H01J37/32 ,  C23C16/52 ,  G01L15/00 ,  G01F15/06 ,  G01F15/14 ,  G01L19/14 ,  G01N25/18 ,  G01L19/08

    Abstract: A sensor assembly that includes a substrate and a set of sensors. The set of sensor includes pressure sensor and/or flow sensors located across a surface of the substrate. Each respective sensor of the plurality of sensor is adapted to measure a respective pressure or a respective flow of an environment proximate the respective sensor. Each respective sensor of the plurality of sensor may further be adapted to output a respective signal associated with the measured respective pressure or the measured respective flow. The respective signals associated with the measured respective pressure or the measured respective flows measured by the plurality of sensor together provide a pressure distribution across the surface of the substrate and/or a flow distribution across the surface of the substrate.

    Micro resonator array system
    7.
    发明授权
    Micro resonator array system 有权

    公开(公告)号：US11009538B2

    公开(公告)日：2021-05-18

    申请号：US16283371

    申请日：2019-02-22

    Applicant: APPLIED MATERIALS, INC.

    Inventor： Chuang-Chia Lin ,  Upendra Ummethala ,  Andrew Choe

    IPC: G01R29/08 ,  H01L21/66 ,  H01Q1/38

    Abstract: Embodiments include systems and methods for determining a processing parameter of a processing operation utilizing micro resonator sensors. Some embodiments include a diagnostic substrate comprising a substrate, a circuit layer over the substrate, a cavity in the circuit layer, a capping layer over the circuit layer, a resonating body in or over the cavity, one or more electrodes in the cavity, and circuitry for driving and sensing the resonant frequency of the resonating body. In an embodiment, the circuitry comprises a biasing circuitry block configured to provide a bias voltage to the one or more electrodes, a frequency generator circuitry block configured to provide a signal with a varying frequency to the one or more electrodes, and a sensing circuitry block configured to detect a value correlated to oscillation of the resonating body.

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