公开(公告)号：US20240140798A1

公开(公告)日：2024-05-02

申请号：US18550924

申请日：2022-03-18

申请人： AMOTECH CO., LTD.

发明人： Kyu Hwan PARK ,  Hun CHEONG

IPC分类号： C01B21/068

CPC分类号： C01B21/0682 ,  C01B21/0687 ,  C01P2004/62 ,  C01P2006/32 ,  C01P2006/40

摘要： Provided is a method for preparing silicon nitride powder for manufacturing a substrate. The method for preparing silicon nitride powder for manufacturing a substrate, according to an embodiment of the present invention, comprises the steps of: preparing mixed raw material powder comprising metallic silicon powder and crystalline phase control powder; preparing the mixed raw material powder into granules having a predetermined particle size; nitrifying the granules at a predetermined temperature ranging from 1,200-1,500° C. while nitrogen gas is applied to the granules at a predetermined pressure; and pulverizing the nitrified granules. According to the method, it is easy to realize powder having an α crystal phase at a desired level, and when this is realized as a substrate, a substrate having compact density can be manufactured.

公开(公告)号：US20240116822A1

公开(公告)日：2024-04-11

申请号：US18289372

申请日：2022-05-03

申请人： AMOTECH CO., LTD.

发明人： Kyu Hwan PARK ,  Hun CHEONG

IPC分类号： C04B35/591 ,  C04B35/622 ,  C04B35/634

CPC分类号： C04B35/591 ,  C04B35/62204 ,  C04B35/6342 ,  C04B2235/3206 ,  C04B2235/3225 ,  C04B2235/3873 ,  C04B2235/428 ,  C04B2235/5436 ,  C04B2235/5445 ,  C04B2235/6025 ,  C04B2235/6562 ,  C04B2235/6567 ,  C04B2235/6586 ,  C04B2235/9607

摘要： A method for manufacturing a silicon nitride substrate is provided. The method comprises the steps of: preparing a ceramic composition containing a metal silicon powder and a crystalline phase control powder containing a rare earth element-containing compound and a magnesium-containing compound; manufacturing a sheet-shaped molded body of a slurry prepared by mixing a solvent and an organic binder with the ceramic composition; and performing heat treatment including a nitrification section where heat treatment is performed at a first temperature in the range of 1300-1500° C. together with the application of nitrogen gas to the molded body at a predetermined pressure and a sintering section where heat treatment is performed at a second temperature in the range of 1700-1900° C.