公开(公告)号：US20230335427A1

公开(公告)日：2023-10-19

申请号：US18339476

申请日：2023-06-22

申请人： AGC Inc.

发明人： Yuha KOBAYASHI ,  Kenji GOTO

IPC分类号： H01L21/683 ,  C03C3/095 ,  C03C3/089 ,  C03C3/091 ,  C03C3/093 ,  C03C3/083 ,  C03C3/085 ,  C03C3/087 ,  C03C3/078 ,  C03B5/18

CPC分类号： H01L21/6835 ,  C03C3/095 ,  C03C3/089 ,  C03C3/091 ,  C03C3/093 ,  C03C3/083 ,  C03C3/085 ,  C03C3/087 ,  C03C3/078 ,  C03B5/18

摘要： To appropriately manufacture a semiconductor device. A glass substrate is a glass substrate for manufacturing the semiconductor device. In a case in which one surface is directed downward in a vertical direction, and a first position, a second position, and a third position on the one surface on an outer side in a radial direction with respect to a center point of the glass substrate are supported by supporting members, a lowest point as a position where a height in the vertical direction is the lowest on other surface is positioned in a circular central region on an inner side in the radial direction with respect to the first position, the second position, and the third position when viewed from the vertical direction, a center of the central region is a center point of the glass substrate, and a diameter of the central region has a length of ⅓ of a diameter of the glass substrate.

公开(公告)号：US20240030051A1

公开(公告)日：2024-01-25

申请号：US18479872

申请日：2023-10-03

申请人： AGC Inc.

发明人： Yuha KOBAYASHI ,  Yuichi YOSHIDA ,  Keisuke HANASHIMA

IPC分类号： H01L21/67 ,  H01L21/304 ,  H01L21/66 ,  H01L23/15 ,  C03C15/02

CPC分类号： H01L21/67288 ,  H01L21/67253 ,  H01L21/304 ,  H01L22/12 ,  H01L23/15 ,  C03C15/02

摘要： To suppress lowering of dimensional accuracy. A manufacturing method for a glass substrate is a manufacturing method for the glass substrate that supports a semiconductor device, the manufacturing method including: generating a glass base plate; measuring a thickness, a thickness deviation, and a warpage amount of the glass base plate; screening the glass base plate based on the thickness of the glass base plate; generating a plurality of glass blanks by cutting the screened glass base plate; setting a first polishing condition for the glass blank based on the thickness, the thickness deviation, and the warpage amount of the glass base plate; generating a glass plate by polishing a surface of the glass blank based on the first polishing condition; measuring a thickness, a thickness deviation, and a warpage amount of the glass plate; screening the glass plate based on the thickness of the glass plate; setting a second polishing condition for the glass plate based on the thickness, the thickness deviation, and the warpage amount of the glass plate; and polishing a surface of the screened glass plate based on the second polishing condition to generate a rectangular glass substrate in which a length of a side is equal to or larger than 300 mm and a thickness is equal to or larger than 0.5 mm.

公开(公告)号：US20240246854A1

公开(公告)日：2024-07-25

申请号：US18419877

申请日：2024-01-23

申请人： AGC Inc.

发明人： Mamoru ISOBE ,  Yuha KOBAYASHI ,  Izuru SUWA

IPC分类号： C03C23/00

CPC分类号： C03C23/0025

摘要： A glass substrate is a glass substrate in which a dot is formed on a surface. A region in which the dot is formed does not include a crack, and a retardation in the region in which the dot is formed is equal to or smaller than 50 nm.

公开(公告)号：US20230135358A1

公开(公告)日：2023-05-04

申请号：US18049853

申请日：2022-10-26

申请人： AGC Inc.

发明人： Mikio NAGANO ,  Seiji INABA ,  Rikiya KADO ,  Kiyoshi TAMAI ,  Yuha KOBAYASHI

IPC分类号： C03C3/085 ,  C03C3/062 ,  H01L21/56

摘要： Glass contains, in mol percentage on an oxide basis, SiO2: 35% to 60%, B2O3: 0.8% to 8%, Al2O3: 6% to 21%, and MgO: 17% to 44%. Additionally, (MgO/Al2O3)≥1 is satisfied, a measured Madelung constant m calculated by an expression (1A) is equal to or larger than 1.05, and a thermal expansion factor as a ratio of a measured value α of a linear thermal expansion coefficient to a calculated value αcal of a linear thermal expansion coefficient calculated from composition is equal to or smaller than 0.7. Herein, E is a measured value of a Young's modulus of the glass, Vp is an average atomic packing factor of the glass, and Gt is average bond dissociation energy of the glass.

公开(公告)号：US20210032155A1

公开(公告)日：2021-02-04

申请号：US16941631

申请日：2020-07-29

申请人： AGC Inc.

发明人： Seiji INABA ,  Yasunari SAITO ,  Kiyoshi TAMAI ,  Kazutaka ONO ,  Yuha KOBAYASHI

IPC分类号： C03C3/087 ,  C03C3/085 ,  C03C3/097 ,  C03C3/095 ,  C03C3/091 ,  H01L23/15

摘要： A supporting glass substrate has a ratio of a Young's modulus (GPa) to a density (g/cm3) that is 37.0 (GPa·cm3/g) or more and the ratio has a value larger than a ratio calculation value, the ratio calculation value being a ratio of a Young's modulus (GPa) calculated from a composition to a density (g/cm3). The ratio calculation value is represented by the following expression: α=2·Σ{(Vi·Gi)/Mi·Xi}, where, in the expression, Vi is a filling parameter of a metal oxide contained in the supporting glass substrate, Gi is a dissociation energy of a metal oxide contained in the supporting glass substrate. Mi is a molecular weight of a metal oxide contained in the supporting glass substrate, and Xi is a molar ratio of a metal oxide contained in the supporting glass substrate.

公开(公告)号：US20240343641A1

公开(公告)日：2024-10-17

申请号：US18631531

申请日：2024-04-10

申请人： AGC Inc.

发明人： Kaede KATSUNO ,  Yuha KOBAYASHI ,  Kohei HORIUCHI

IPC分类号： C03C23/00

CPC分类号： C03C23/0025

摘要： To provide a glass substrate having a surface on which a mark constituted of a plurality of dots is disposed. The dot includes an indentation part as a portion depressed from the surface, and a projecting part projecting from the indentation part in a thickness direction of the glass substrate. The projecting part extends at a position overlapping a contour of the dot or on an inner side than the contour.

公开(公告)号：US20230046712A1

公开(公告)日：2023-02-16

申请号：US17813372

申请日：2022-07-19

申请人： AGC Inc.

发明人： Yuha KOBAYASHI ,  Shigeto KUMANO ,  Kaede KATSUNO ,  Keisuke HANASHIMA ,  Kohei HORIUCHI

IPC分类号： C03C23/00

摘要： A glass substrate 10 has a mark provided on a surface 10A of the glass substrate 10, the mark including plural dots 104, a depth H of each of the dots 104 is 0.5 μm or larger and 7.0 μm or smaller, and an inclination angle of a side surface 104B of each of the dots 104 is 5° or larger and 56° or smaller.

公开(公告)号：US20220144685A1

公开(公告)日：2022-05-12

申请号：US17585787

申请日：2022-01-27

申请人： AGC Inc.

发明人： Mikio NAGANO ,  Seiji INABA ,  Yasunari SAITO ,  Kiyoshi TAMAI ,  Kazutaka ONO ,  Yuha KOBAYASHI

IPC分类号： C03C3/097 ,  C03C3/095 ,  C03C3/091 ,  C03C3/085 ,  C03C3/087 ,  H01L21/683

摘要： Suppressing deflection and reducing weight are to be achieved. A supporting glass substrate has a ratio of a Young's modulus (GPa) to a density (g/cm3) that is 37.0 (GPa·cm3/g) or more and the ratio has a value larger than a ratio calculation value, the ratio calculation value being a ratio of a Young's modulus (GPa) calculated from a composition to a density (g/cm3). The ratio calculation value is represented by the following expression: α=2·Σ{(Vi·Gi)/Mi·Xi}, where, in the expression, Vi is a filling parameter of a metal oxide contained in the supporting glass substrate, Gi is a dissociation energy of a metal oxide contained in the supporting glass substrate, Mi is a molecular weight of a metal oxide contained in the supporting glass substrate, and Xi is a molar ratio of a metal oxide contained in the supporting glass substrate.