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    REPAIRING APPARATUS OF DISPLAY DEVICE AND METHOD THEREOF
    3.
    发明申请
    REPAIRING APPARATUS OF DISPLAY DEVICE AND METHOD THEREOF 审中-公开
    显示装置的修理装置及其方法

    公开(公告)号：US20140068925A1

    公开(公告)日：2014-03-13

    申请号：US13912401

    申请日：2013-06-07

    申请人： Young-Gil PARK ,  Zail LHEE

    发明人： Young-Gil PARK ,  Zail LHEE

    IPC分类号： H05K13/00

    CPC分类号： H05K13/00 ,  G02F1/1309 ,  G02F1/136259 ,  G09G3/006 ,  G09G2330/08 ,  H01L2251/568 ,  Y10T29/49004 ,  Y10T29/51

    摘要： A repairing apparatus of a display device that includes: a stage where a display device is mounted; a lighting device applying a lighting signal to the display device; and a detector disposed at a distance from the display device and detecting a photon or heat generated from a defect part in a pixel of the display device. The optical microscopic, the detector, and the laser repairing device are provided in the light blocking box so that a defect part that cannot be detected by the optical microscopic can be detected using the detector, and the pixel can be repaired to a normal pixel using the laser repairing device, and accordingly the yield can be improved.

    摘要翻译： 一种显示装置的修理装置，其特征在于，包括：显示装置的安装台; 将照明信号施加到所述显示装置的照明装置; 以及检测器，与所述显示装置隔开一定距离，并且检测从所述显示装置的像素中的缺陷部分产生的光子或热量。 光学显微镜，检测器和激光修复装置设置在遮光盒中，使得可以使用检测器检测不能被光学显微镜检测到的缺陷部分，并且可以使用以下方式将像素修复到正常像素 激光修复装置，因此可以提高产量。

    INSPECTION SYSTEM USING SCANNING ELECTRON MICROSCOPE
    4.
    发明申请
    INSPECTION SYSTEM USING SCANNING ELECTRON MICROSCOPE 有权
    使用扫描电子显微镜检查系统

    公开(公告)号：US20130320211A1

    公开(公告)日：2013-12-05

    申请号：US13905623

    申请日：2013-05-30

    申请人： Young-Gil Park ,  Won-Bong Baek ,  Ki-Won Oh

    发明人： Young-Gil Park ,  Won-Bong Baek ,  Ki-Won Oh

    IPC分类号： H01J37/26

    CPC分类号： H01J37/26 ,  H01J37/185 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/24592 ,  H01J2237/2605

    摘要： An inspection system using a scanning electron microscope includes a scanning electron microscope chamber inspecting an object to be inspected by using an electron beam and maintaining a vacuum condition, a stage positioned below the scanning electron microscope chamber to be separated therefrom and mounted with the object to be inspected, and a transverse guide transferring the scanning electron microscope chamber on the stage. Atmospheric conditions are maintained between the scanning electron microscope chamber and the object to be inspected. Accordingly, object to be inspected a large size of an object to be inspected may be inspected without damage to the object to be inspected such that a cost reduction and a yield improvement may be realized.

    摘要翻译： 使用扫描电子显微镜的检查系统包括扫描电子显微镜室，通过使用电子束检查待检查物体并保持真空状态，将位于扫描电子显微镜室下方的台与其分离并安装在该物体上 被检查，横向引导件将扫描电子显微镜室转移到平台上。 在扫描电子显微镜室和被检查物体之间保持大气条件。 因此，可以检查被检查物体的大小，而不会损害被检查物体，从而可以实现成本降低和产量提高。