METHOD OF FORMING A BOND PAD DESIGN FOR IMPROVED ROUTING AND REDUCED PACKAGE STRESS
    1.
    发明申请
    METHOD OF FORMING A BOND PAD DESIGN FOR IMPROVED ROUTING AND REDUCED PACKAGE STRESS 审中-公开
    形成用于改进路由和减少的包装应力的粘合剂设计的方法

    公开(公告)号:US20120329263A1

    公开(公告)日:2012-12-27

    申请号:US13293804

    申请日:2011-11-10

    Abstract: A method for the fabrication of a semiconductor chip, comprises forming one or more semiconductor devices on a substrate; forming a passivation layer on the substrate; forming a plurality of bond pads on the passivation layer; and forming a plurality of under-bump metallurgy (UBM) layers on respective ones of the plurality of bond pads, wherein at least one of the bond pads has an elongated shape having an elongated portion and a contracted portion, the elongated portion oriented substantially along a stress direction radiating from a center of the chip to the periphery thereof.

    Abstract translation: 一种用于制造半导体芯片的方法,包括在衬底上形成一个或多个半导体器件; 在衬底上形成钝化层; 在所述钝化层上形成多个接合焊盘; 以及在所述多个接合焊盘的相应的多个接合焊盘上形成多个凸起下的金属(UBM)层,其中所述接合焊盘中的至少一个具有细长形状,其具有细长部分和收缩部分,所述细长部分基本上沿着 从芯片的中心向其周边辐射的应力方向。

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