Method of fabricating a field emission device
    1.
    发明授权
    Method of fabricating a field emission device 失效
    制造场致发射器件的方法

    公开(公告)号:US5791959A

    公开(公告)日:1998-08-11

    申请号:US711828

    申请日:1996-09-10

    IPC分类号: H01J1/304 H01J9/02

    摘要: To fabricate a field emission device a micromechanically manufactured array (1) of widely-spaced tips (2) and a micromechanically manufactured perforated extracting electrode (3) are provided. The outer sides of the perforated extracting electrode are bonded to the array in a way that the perforated extracting electrode is facing the array. With the array of widely-spaced tips and the perforated extracting electrode being fabricated separately and bonded together subsequently, both the number of process steps required for each of the two parts and the manufacturing process costs are reduced.

    摘要翻译: 为了制造场发射装置,提供了一种微机械制造的广泛间隔的尖端(2)的阵列(1)和一个微机械制造的穿孔提取电极(3)。 穿孔提取电极的外侧以穿孔提取电极面向阵列的方式结合到阵列。 利用广泛间隔的尖端阵列和穿孔提取电极单独制造并且随后结合在一起,减少了两个部件中的每一个所需的工艺步骤数量和制造工艺成本。

    Bulk removal, transport and storage fixture for small batch-fabricated
devices
    2.
    发明授权
    Bulk removal, transport and storage fixture for small batch-fabricated devices 失效
    批量拆装,运输和储存小批量装置的夹具

    公开(公告)号:US5707537A

    公开(公告)日:1998-01-13

    申请号:US477058

    申请日:1995-06-07

    CPC分类号: H01L21/6835

    摘要: The supporting plate and the bulk removal, transport and storage fixture for small batch-fabricated devices (1) have openings (2) penetrating from the top side (3) to the bottom side (4) of the plate and raised retaining means (5) on the bottom side (4). The raised retaining means (5) are provided in sufficient number and are arranged according to the shape of the devices (1) for retaining the devices. Flange means (7) which are designed for providing vacuum or agents to the devices (1) on the supporting plate are connected to the supporting plate thus forming a fixture. By changing the arrangement of the raised retaining means (5) and/or the openings (2) the supporting plate and the fixture may easily be adapted to different sizes and kinds of devices.

    摘要翻译: 用于小批量装置(1)的支撑板和散装移除,运输和储存装置具有从板的顶侧(3)穿过底部侧(4)的开口(2),并且将保持装置(5 )在底面(4)上。 提升保持装置(5)设置足够数量,并根据用于保持装置的装置(1)的形状布置。 设计用于向支撑板上的装置(1)提供真空或试剂的法兰装置(7)连接到支撑板,从而形成夹具。 通过改变凸起保持装置(5)和/或开口(2)的布置,支撑板和夹具可以容易地适应于不同尺寸和种类的装置。

    Field emission device and method for fabricating it
    3.
    发明授权
    Field emission device and method for fabricating it 失效
    现场发射装置及其制造方法

    公开(公告)号:US5717278A

    公开(公告)日:1998-02-10

    申请号:US445241

    申请日:1995-05-19

    摘要: The invention relates to the structure of a field emitter device, to the method of fabricating a field emitter device and to the use of the field emitter device in the technical field of flat panel displays. The field emission device comprises an array (1) of widely-spaced tips (2) for emitting electrons and a perforated extracting electrode (3) facing the array of tips. An individual series resistor is formed by each of said tips itself. The widely-spaced tips are not surrounded by a layer of electrically insulating material. The tips are not surrounded by an insulating layer and the tip end is not surrounded by a gate or extraction electrode. This avoids failures like shorts between the cathode electrode and the gate or extraction electrode which could occur due to inaccurate coating or etching processes, and enhances the reliability and the life-time of the array of tips. To fabricate the field emission device, a micromechanically manufactured array (1) of widely-spaced tips (2) and a micromechanically manufactured perforated extracting electrode (3) are provided. The outer sides of the perforated extracting electrode are bonded to the array in a way that the perforated extracting electrode is facing the array. With the array of widely-spaced tips and the perforated extracting electrode being fabricated separately and bonded together subsequently, both the number of process steps required for each of the two parts and the manufacturing process costs are reduced.

    摘要翻译: 本发明涉及场致发射器件的结构,制造场发射极器件的方法以及在平板显示器的技术领域中使用场发射极器件。 场发射装置包括用于发射电子的广泛间隔的尖端(2)的阵列(1)和面向阵列阵列的穿孔提取电极(3)。 单个串联电阻器由每个所述尖端本身形成。 宽间隔的尖端不被一层电绝缘材料包围。 尖端不被绝缘层包围,并且尖端不被栅极或引出电极包围。 这避免了由于不准确的涂层或蚀刻工艺而可能发生的阴极电极和栅极或引出电极之间的短路故障,并且增强了尖端阵列的可靠性和寿命。 为了制造场发射器件,提供了一种微机械制造的宽间距尖端(2)的阵列(1)和微机械制造的穿孔提取电极(3)。 穿孔提取电极的外侧以穿孔提取电极面向阵列的方式结合到阵列。 利用广泛间隔的尖端阵列和穿孔提取电极单独制造并且随后结合在一起,减少了两个部件中的每一个所需的工艺步骤数量和制造工艺成本。