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    Proximity sensor, in particular microphone for reception of sound signals in the human audible sound range, with ultrasonic proximity estimation
    2.
    发明授权
    Proximity sensor, in particular microphone for reception of sound signals in the human audible sound range, with ultrasonic proximity estimation 有权
    接近传感器，特别是用于在人类声音范围内接收声音信号的麦克风，具有超声波接近估计

    公开(公告)号：US08401513B2

    公开(公告)日：2013-03-19

    申请号：US12828482

    申请日：2010-07-01

    Applicant: Geert Langereis ,  Twan van Lippen ,  Peter Dirksen ,  Frank Pasveer

    Inventor： Geert Langereis ,  Twan van Lippen ,  Peter Dirksen ,  Frank Pasveer

    IPC: H04M9/00

    CPC classification number: H04R19/005 ,  G01S15/06 ,  G01S15/876 ,  H03K17/94 ,  H03K2217/94005 ,  H04M1/6016 ,  H04M1/72569 ,  H04R19/04 ,  H04R2400/01

    Abstract: Proximity sensor, particularly for usage in an electronic mobile device, comprising at least one acoustic transducer adapted for receiving acoustic signals at least in parts of the frequency range of human audible sound and emitting and/or receiving ultrasonic signals for proximity estimation. The acoustic transducer preferably is a Micro-Electro-Mechanical-Systems (MEMS) microphone. Further, a method in an electronic device comprising an acoustic transducer is provided comprising the steps of generating at least one electric signal in the frequency range of ultrasonic sound, emitting at least one ultrasonic signal by means of the acoustic transducer; receiving at least one ultrasonic signal by means of the acoustic transducer; deducing from the at least one emitted ultrasonic signal and the at least one received ultrasonic signal at least the delay between emission of the emitted ultrasonic signal and reception of the corresponding ultrasonic signal.

    Abstract translation: 特别是用于电子移动设备的接近传感器，包括至少一个声学传感器，适于在至少部分人类可听见的声音的频率范围内接收声学信号，并发射和/或接收用于邻近估计的超声波信号。 声换能器优选地是微机电系统（MEMS）麦克风。 此外，提供了一种包括声换能器的电子设备中的方法，包括以下步骤：在超声波的频率范围内产生至少一个电信号，借助于声换能器发射至少一个超声波信号; 通过声换能器接收至少一个超声波信号; 从所述至少一个发射的超声波信号和所述至少一个接收到的超声波信号中减去所发射的超声信号的发射与对应的超声波信号的接收之间的延迟。

    Micro-electromechanical system microphone
    4.
    发明授权
    Micro-electromechanical system microphone 有权
    微机电系统麦克风

    公开(公告)号：US09344805B2

    公开(公告)日：2016-05-17

    申请号：US12625157

    申请日：2009-11-24

    Applicant: Franz Felberer ,  Remco Henricus Wilhelmus Pijnenburg ,  Twan van Lippen ,  Iris Bominaar-Silkens

    Inventor： Franz Felberer ,  Remco Henricus Wilhelmus Pijnenburg ,  Twan van Lippen ,  Iris Bominaar-Silkens

    IPC: H04R3/06 ,  H04B15/00 ,  H04R19/00

    CPC classification number: H04R19/005 ,  H04R2410/00

    Abstract: A capacitive micro-electromechanical system (MEMS) microphone includes a semiconductor substrate having an opening that extends through the substrate. The microphone has a membrane that extends across the opening and a back-plate that extends across the opening. The membrane is configured to generate a signal in response to sound. The back-plate is separated from the membrane by an insulator and the back-plate exhibits a spring constant. The microphone further includes a back-chamber that encloses the opening to form a pressure chamber with the membrane, and a tuning structure configured to set a resonance frequency of the back-plate to a value that is substantially the same as a value of a resonance frequency of the membrane.

    Abstract translation: 电容式微机电系统（MEMS）麦克风包括具有延伸穿过基板的开口的半导体基板。 麦克风具有延伸穿过开口的膜和延伸穿过开口的背板。 膜被配置为响应于声音产生信号。 背板通过绝缘体与膜隔开，背板呈现弹簧常数。 麦克风还包括后室，其包围开口以与膜形成压力室，调谐结构被配置为将背板的共振频率设定为与谐振值基本相同的值 膜的频率。

    RF MEMS SWITCH WITH A GRATING AS MIDDLE ELECTRODE
    6.
    发明申请
    RF MEMS SWITCH WITH A GRATING AS MIDDLE ELECTRODE 有权
    RF MEMS开关作为中间电极

    公开(公告)号：US20120048709A1

    公开(公告)日：2012-03-01

    申请号：US13319034

    申请日：2010-05-07

    Applicant: Peter Gerard Steeneken ,  Hilco Suy ,  Rodolf Herfst ,  Twan Van Lippen

    Inventor： Peter Gerard Steeneken ,  Hilco Suy ,  Rodolf Herfst ,  Twan Van Lippen

    IPC: H01H59/00

    CPC classification number: H01H59/0009 ,  H01H2059/0018

    Abstract: The present invention provides a capacitive MEMS device comprising a first electrode lying in a plane, and a second electrode suspended above the first electrode and movable with respect to the first electrode. The first electrode functions as an actuation electrode. A gap is present between the first electrode and the second electrode. A third electrode is placed intermediate the first and second electrode with the gap between the third electrode and the second electrode. The third electrode has one or a plurality of holes therein, preferably in an orderly or irregular array. An aspect of the present invention integration of a conductive, e.g. metallic grating as a middle (or third) electrode. An advantage of the present invention is that it can reduce at least one problem of the prior art. This advantage allows an independent control over the pull-in and release voltage of a switch.

    Abstract translation: 本发明提供了一种电容MEMS器件，其包括位于平面中的第一电极和悬挂在第一电极上方并可相对于第一电极移动的第二电极。 第一电极用作致动电极。 在第一电极和第二电极之间存在间隙。 第三电极被放置在第一和第二电极之间，第三电极和第二电极之间具有间隙。 第三电极在其中具有一个或多个孔，优选为有序或不规则的阵列。 本发明的一个方面是导电的，例如， 金属光栅作为中间（或第三）电极。 本发明的优点在于它可以减少至少一个现有技术的问题。 这个优点允许独立控制开关的拉入和释放电压。

    RF MEMS switch with a grating as middle electrode
    7.
    发明授权
    RF MEMS switch with a grating as middle electrode 有权
    RF MEMS开关，光栅作为中间电极

    公开(公告)号：US09070524B2

    公开(公告)日：2015-06-30

    申请号：US13319034

    申请日：2010-05-07

    Applicant: Peter Gerard Steeneken ,  Hilco Suy ,  Rodolf Herfst ,  Twan Van Lippen

    Inventor： Peter Gerard Steeneken ,  Hilco Suy ,  Rodolf Herfst ,  Twan Van Lippen

    IPC: H01G5/16 ,  H03K17/975 ,  H01H59/00

    CPC classification number: H01H59/0009 ,  H01H2059/0018

    Abstract: The present invention provides a capacitive MEMS device comprising a first electrode lying in a plane, and a second electrode suspended above the first electrode and movable with respect to the first electrode. The first electrode functions as an actuation electrode. A gap is present between the first electrode and the second electrode. A third electrode is placed intermediate the first and second electrode with the gap between the third electrode and the second electrode. The third electrode has one or a plurality of holes therein, preferably in an orderly or irregular array. An aspect of the present invention integration of a conductive, e.g. metallic grating as a middle (or third) electrode. An advantage of the present invention is that it can reduce at least one problem of the prior art. This advantage allows an independent control over the pull-in and release voltage of a switch.

    Abstract translation: 本发明提供了一种电容MEMS器件，其包括位于平面中的第一电极和悬挂在第一电极上方并可相对于第一电极移动的第二电极。 第一电极用作致动电极。 在第一电极和第二电极之间存在间隙。 第三电极被放置在第一和第二电极之间，第三电极和第二电极之间具有间隙。 第三电极在其中具有一个或多个孔，优选为有序或不规则的阵列。 本发明的一个方面是导电的，例如， 金属光栅作为中间（或第三）电极。 本发明的优点在于它可以减少至少一个现有技术的问题。 这个优点允许独立控制开关的拉入和释放电压。

    Microphone and accelerometer
    8.
    发明授权
    Microphone and accelerometer 有权
    麦克风和加速度计

    公开(公告)号：US08855337B2

    公开(公告)日：2014-10-07

    申请号：US13255048

    申请日：2010-02-03

    Applicant: Twan van Lippen ,  Geert Langereis ,  Martijn Goossens

    Inventor： Twan van Lippen ,  Geert Langereis ,  Martijn Goossens

    IPC: H04R19/00 ,  H01L21/02 ,  H04R1/24 ,  B81C1/00

    CPC classification number: H04R19/005 ,  B81B2201/0235 ,  B81B2201/0257 ,  B81C1/00182 ,  H04R1/245 ,  H04R3/005 ,  H04R2499/11

    Abstract: The invention relates to a method for manufacturing a micromachined microphone and an accelerometer from a wafer 1 having a first layer 2, the method comprising the steps of dividing the first layer 2 into a microphone layer 5 and into an accelerometer layer 6, covering a front side of the microphone layer 5 and a front side of the accelerometer layer 6 with a continuous second layer 7, covering the second layer 7 with a third layer 8, forming a plurality of trenches 9 in the third layer 8, removing a part 10 of the wafer 1 below a back side of the microphone layer 5, forming at least two wafer trenches 11 in the wafer 1 below a back side of the accelerometer layer 6, and removing a part 12, 13 of the second layer 7 through the plurality of trenches 9 formed in the third layer 8. The micromachined microphone and the accelerometer according to the invention is advantageous over prior art as it allows for body noise cancellation in order to minimize structure borne sound.

    Abstract translation: 本发明涉及一种用于从具有第一层2的晶片1制造微机械麦克风和加速度计的方法，该方法包括以下步骤：将第一层2分成麦克风层5并加入到加速度计层6中，覆盖前部 麦克风层5的一侧和具有连续的第二层7的加速度计层6的前侧，用第三层8覆盖第二层7，在第三层8中形成多个沟槽9，去除第 晶片1在麦克风层5的背面下方，在加速度计层6的后侧的晶片1内形成至少两个晶片沟槽11，并通过多个第二层7去除第二层7的部分12,13。 形成在第三层8中的沟槽9.根据本发明的微加工麦克风和加速度计比现有技术更有优势，因为它允许体噪声消除以便最小化结构声音。

    Backplate for Microphone
    9.
    发明申请
    Backplate for Microphone 审中-公开
    麦克风背板

    公开(公告)号：US20120099753A1

    公开(公告)日：2012-04-26

    申请号：US13263325

    申请日：2010-04-06

    Applicant: Casper van der Avoort ,  Andreas Bernardus Maria Jansman ,  Geert Langereis ,  Twan van Lippen ,  Hilco Suy

    Inventor： Casper van der Avoort ,  Andreas Bernardus Maria Jansman ,  Geert Langereis ,  Twan van Lippen ,  Hilco Suy

    IPC: H04R9/08 ,  H04R31/00 ,  B81C1/00

    CPC classification number: H04R19/005 ,  H04R31/00 ,  H04R2499/11 ,  Y10T29/49005 ,  Y10T29/49575

    Abstract: A microphone has a membrane (20) mounted to vibrate in response to pressure fluctuations, a backplate (30) facing the membrane and being more rigid than the membrane, and circuitry (95) for sensing the vibrations relative to the backplate, the backplate being prestressed and having a geometry such that a response of the backplate to structure borne vibration matches a corresponding response of the membrane. This can help reduce or minimize relative movement between these surfaces caused by structure borne vibration and hence improve the signal-to-noise ratio of the microphone. The geometry can be a hub and spoke arrangement.

    Abstract translation: 麦克风具有安装成响应于压力波动振动的膜（20），面向膜并且比膜更刚性的背板（30）以及用于感测相对于背板的振动的电路（95），背板是 预应力并且具有几何形状，使得背板对结构传导振动的响应与膜的相应响应匹配。 这可以帮助减少或最小化由结构振动引起的这些表面之间的相对运动，从而提高麦克风的信噪比。 几何可以是轮毂和轮辐装置。

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