公开(公告)号：US06966934B1

公开(公告)日：2005-11-22

申请号：US09672775

申请日：2000-09-29

申请人： Toshikazu Sato ,  Toshiaki Inohara ,  Hiroshi Murase ,  Hiromi Naotsuka ,  Takahiro Imai

发明人： Toshikazu Sato ,  Toshiaki Inohara ,  Hiroshi Murase ,  Hiromi Naotsuka ,  Takahiro Imai

IPC分类号： H01H33/56 ,  F25J3/06 ,  F25J3/08 ,  B01D39/00 ,  A62B7/08

CPC分类号： B01D53/002 ,  B01D53/04 ,  B01D53/68 ,  B01D2253/108 ,  B01D2253/308 ,  B01D2257/204 ,  B01D2257/55 ,  Y02C20/30

摘要： A gas reclaiming equipment capable of separating SF6 gas from a mixed gas efficiently and shortening reclaiming work under reduced pressure. A gas separation equipment is provided between a gas insulated equipment and a gas liquefaction system. The gas separation equipment separates nitrogen gas from the mixed gas, and concentrates SF6 gas. Only SF6 gas is sent into the gas liquefaction system. The gas separation equipment uses pressure swing adsorption using an adsorbent with selective adsorption. Moreover, a buffer tank for storing mixed gas is provided between the gas separation equipment and the gas insulated equipment. The buffer tank and the gas liquefaction system are connected by a reflux-line. The reflux-line refluxes the gas in a gas phase in the gas liquefaction system to the buffer tank. Furthermore, the gas separation equipment is connected to a storage tank. The storage tank accumulates the nitrogen gas separated with the gas separation equipment. The adsorbent to adsorb SF6 gas is enclosed in the storage tank for exhaust gas. To absorb decomposed gas, the filter has an adsorbent of the chemisorption type. The adsorbent has of a metal hydrate.

摘要翻译： 能够有效地从混合气体中分离SF 6气体的气体回收设备，并且在减压下缩短回收作业。 在气体绝缘设备和气体液化系统之间设置气体分离设备。 气体分离设备将氮气与混合气体分离，并浓缩SF6气体。 只有SF 6气体被送入气体液化系统。 气体分离设备使用具有选择性吸附的吸附剂进行变压吸附。 此外，在气体分离设备和气体绝缘设备之间设置有用于存储混合气体的缓冲罐。 缓冲罐和气体液化系统通过回流管连接。 回流线将气体液化系统中的气相中的气体回流到缓冲罐。 此外，气体分离设备连接到储罐。 储罐积聚与气体分离设备分离的氮气。 用于吸附SF 6气体的吸附剂封闭在用于废气的储罐中。 为了吸收分解气体，过滤器具有化学吸附型吸附剂。 吸附剂具有金属水合物。