公开(公告)号：US20080227060A1

公开(公告)日：2008-09-18

申请号：US10585998

申请日：2005-01-19

申请人： Masayoshi Esashi ,  Yoichi Haga ,  Masanori Mizushima ,  Tadao Matsunaga

发明人： Masayoshi Esashi ,  Yoichi Haga ,  Masanori Mizushima ,  Tadao Matsunaga

IPC分类号： G09B21/00

CPC分类号： G09B21/004 ,  G09B21/007

摘要： A driving mechanism using shape memory alloys comprises a first and a second shape memory alloys coils (1, 2), a pin-like drive member (3) connected to each of the shape memory alloys coils (1, 2) extending in the axis direction, a substrate (4) having a wiring pattern (11) and a drive circuit (4a) to supply current to the shape memory alloys coils (1, 2), and a magnetic latch part (9) to hold the drive member (3), and the magnetic latch part (9) has a latch position in the axis direction of the drive member (3), the drive circuit (4a) selectively current-drives the first and the second shape memory alloys coils (1, 2), the driven first or second shape memory alloys coils (1, 2) is heated and compressed to move the drive member (3) in the axis direction, and magnetic bodies (9a, 9b) provided to the drive member (3) is magnetically fixed at the latch position, thereby fixed and held in the axis direction.

摘要翻译： 使用形状记忆合金的驱动机构包括第一和第二形状记忆合金线圈（1,2），连接到沿着轴线延伸的每个形状记忆合金线圈（1,2）的销状驱动构件（3） 具有布线图案（11）的基板（4）和向形状记忆合金线圈（1,2）供给电流的驱动电路（7a），以及用于将驱动部件 （3），并且所述磁性锁定部（9）在所述驱动部件（3）的轴向上具有闩锁位置，所述驱动电路（4a）选择性地驱动所述第一形状记忆合金线圈（1） ，2）中，驱动的第一或第二形状记忆合金线圈（1,2）被加热和压缩以使驱动构件（3）沿轴向方向移动，并且设置到驱动构件的磁体（9a，9b） （3）磁性固定在锁定位置，从而固定并保持在轴向。

公开(公告)号：US20080063344A1

公开(公告)日：2008-03-13

申请号：US11896224

申请日：2007-08-30

申请人： Masayoshi Suzuki ,  Tadao Matsunaga ,  Tomoki Furue ,  Ken Sukegawa

发明人： Masayoshi Suzuki ,  Tadao Matsunaga ,  Tomoki Furue ,  Ken Sukegawa

IPC分类号： G02B6/44

CPC分类号： G01C19/722 ,  G02B6/4457 ,  Y10T29/49885

摘要： An optical fiber coil and a production method therefor reduce the likelihood of optical transmission loss due to stress or temperature changes at low cost. Plural single optical fibers are arranged in parallel and are integrally covered with a covering portion so as to form an optical fiber ribbon, and the optical fiber ribbon is wound into a coiled state.

摘要翻译： 光纤线圈及其制造方法降低了由于应力或温度变化而导致的光传输损耗的可能性低成本。 多个单根光纤平行布置并且被覆盖部分整体地覆盖以形成光纤带，并且光纤带卷绕成卷绕状态。

公开(公告)号：US07936958B2

公开(公告)日：2011-05-03

申请号：US12723745

申请日：2010-03-15

申请人： Masayoshi Suzuki ,  Tadao Matsunaga ,  Tomoki Furue ,  Ken Sukegawa

发明人： Masayoshi Suzuki ,  Tadao Matsunaga ,  Tomoki Furue ,  Ken Sukegawa

IPC分类号： G02B6/44

CPC分类号： G01C19/722 ,  G02B6/4457 ,  Y10T29/49885

摘要： An optical fiber coil and a production method therefor reduce the likelihood of optical transmission loss due to stress or temperature changes at low cost. Plural single optical fibers are arranged in parallel and are integrally covered with a covering portion so as to form an optical fiber ribbon, and the optical fiber ribbon is wound into a coiled state.

摘要翻译： 光纤线圈及其制造方法降低了由于应力或温度变化而导致的光传输损耗的可能性低成本。 多个单根光纤平行布置并且被覆盖部分整体地覆盖以形成光纤带，并且光纤带卷绕成卷绕状态。

公开(公告)号：US20070083084A1

公开(公告)日：2007-04-12

申请号：US10582355

申请日：2004-12-10

申请人： Masayoshi Esashi ,  Yoichi Haga ,  Masanori Mizushima ,  Tadao Matsunaga

发明人： Masayoshi Esashi ,  Yoichi Haga ,  Masanori Mizushima ,  Tadao Matsunaga

IPC分类号： A61B1/00

CPC分类号： A61B1/0058 ,  A61B1/0051 ,  G02B23/2476

摘要： An active tube and its system are offered which can be directed by bending its tip, controlling the degree of bend, thereby easily capable of insertion into difficult positions, and which can be driven at low temperature at which it can be used for inspection and medical treatment. A bending mechanism (21) is constructed by wiring an SMA coil (21e) along an outer side of a working channel tube (21a). The bending mechanism (21) is inserted into an outer skin tube (25) with a plurality of built-in weights (22). A front tip (23) is attached to the front end side of the bending mechanism (21) as a tip (2) of an active tube (1). A main tube (4) is connected through the working channel tube (21a) at the tip (2). A wire (21g) is connected to the SMA coil (21e). Said wire (21g) is inserted to the behind end side (41) of the main tube (4) in a wiring channel (4B9 of the main tube, thereby makes it possible to drive the bending mechanism (21) from outside.

摘要翻译： 提供一种主动管及其系统，其可以通过弯曲其尖端来引导，控制弯曲度，从而容易地插入困难位置，并且可以在可用于检查和医疗的低温下驱动 治疗。 弯曲机构（21）通过沿着工作通道管（21a）的外侧布线SMA线圈（21e）而构成。 弯曲机构（21）被插入具有多个内置重物（22）的外皮管（25）中。 前端（23）作为活动管（1）的前端（2）安装在弯曲机构（21）的前端侧。 主管（4）通过工作通道管（21a）在尖端（2）处连接。 电线（21g）连接到SMA线圈（21e）。 所述线（21g）在布线通道（主管的4B 9）中插入主管（4）的后端侧（41），从而可以从外部驱动弯曲机构（21） 。

公开(公告)号：US5851641A

公开(公告)日：1998-12-22

申请号：US848625

申请日：1997-04-29

申请人： Tadao Matsunaga ,  Takaya Matsushita ,  Kei Hattori

发明人： Tadao Matsunaga ,  Takaya Matsushita ,  Kei Hattori

IPC分类号： B23Q3/15 ,  H01L21/683 ,  B32B9/00

CPC分类号： H01L21/6833 ,  Y10T279/23 ,  Y10T428/24917 ,  Y10T428/31504

摘要： The present invention is to provide an electrostatic chucking device having improved heat conductivity and at the same time increased adsorption area and improved adsorptity as well as having no uneveness on the wafer-provided face. The electrostatic chucking device of the present invention comprises a metal base, an adhesive layer, an electrode layer comprising a metal-deposited or metal-plated layer, and an electrically insulating layer possessing a face for providing a substance to be adhered by suction, laminated thereon in this order. The electrostatic chucking device is produced by a process comprising a stage for forming a metal-deposited or metal-plated layer on one face of a heat resistant film, a stage for providing a photoresist layer on the surface of the electrode layer, carrying out pattern exposure, development, and an etching processing, a stage for forming a semi-cured adhesive layer on the surface of the etched electrode layer, a stage for punching the formed laminated sheet according to the shape of a metal base, and stage for laminating the metal base and the laminate sheet via the above-mentioned adhesive and curing the laminated product.

摘要翻译： 本发明提供一种静电吸附装置，其具有改善的导热性，并且同时增加了吸附面积和改进的吸附性，并且在晶片提供面上没有不均匀性。 本发明的静电吸附装置包括金属基底，粘合剂层，包含金属沉积或金属镀层的电极层和具有用于通过抽吸提供待粘附物质的面的电绝缘层，层压 按此顺序。 静电吸附装置通过包括在耐热膜的一个面上形成金属沉积或金属镀层的工序的工序，在电极层的表面上设置光致抗蚀剂层的工序， 曝光，显影和蚀刻处理，在蚀刻电极层的表面上形成半固化粘合剂层的阶段，根据金属基底的形状冲压所形成的层叠片的阶段和用于层压 金属基底和层压片通过上述粘合剂固化并固化层压产品。

公开(公告)号：US5748567A

公开(公告)日：1998-05-05

申请号：US721579

申请日：1996-09-25

申请人： Masatomo Mori ,  Masahiro Nezu ,  Tadao Matsunaga ,  Rokurou Naya ,  Shougo Suzuki ,  Akihiro Azuma

发明人： Masatomo Mori ,  Masahiro Nezu ,  Tadao Matsunaga ,  Rokurou Naya ,  Shougo Suzuki ,  Akihiro Azuma

IPC分类号： G01P15/02 ,  B81B3/00 ,  G01P15/12 ,  H01L29/84 ,  H04R19/00 ,  H04R17/00

CPC分类号： H04R19/005

摘要： An acceleration sensor is based on a semiconductor technique which is suitable for mass production. The resulting acceleration sensor is small in size and high in precision. The acceleration sensor includes a stationary section, an acting section to which a force is applied in response to acceleration, a flexible section through which the stationary section is coupled to the acting section, a plurality of distortion sensing elements coupled to the flexible section, a first weight having a bottomed hole which is gradually smaller in width towards the bottom of the hole, the first weight being coupled to the acting section and a second weight, greater in specific gravity than the first weight, coupled to the bottom of the hole of the first weight.

摘要翻译： 一种加速度传感器是基于适合批量生产的半导体技术。 所得到的加速度传感器尺寸小，精度高。 加速度传感器包括固定部分，响应于加速度施加力的作用部分，固定部分连接到作用部分的柔性部分，耦合到柔性部分的多个失真感测元件， 第一重物具有朝向孔的底部逐渐变小的有底孔，第一重物联接到作用部分，并且第二重物比第一重物更大，该第二重物与第一重物重合，该第二重物联接到孔的底部 第一个重量。

公开(公告)号：US5645921A

公开(公告)日：1997-07-08

申请号：US561731

申请日：1995-11-22

申请人： Tadao Matsunaga ,  Takaya Matsushita ,  Kei Hattori

发明人： Tadao Matsunaga ,  Takaya Matsushita ,  Kei Hattori

IPC分类号： B23Q3/15 ,  H01L21/683 ,  B32B9/00

CPC分类号： H01L21/6833 ,  Y10T279/23 ,  Y10T428/24917 ,  Y10T428/31504

摘要： The present invention is to provide an electrostatic chucking device having improved heat conductivity and at the same time increased adsorption area and improved adsorptity as well as having no uneveness on the wafer-provided face. The electrostatic chucking device of the present invention comprises a metal base, an adhesive layer, an electrode layer comprising a metal-deposited or metal-plated layer, and an electrically insulating layer possessing a face for providing a substance to be adhered by suction, laminated thereon in this order. The electrostatic chucking device is produced by a process comprising a stage for forming a metal-deposited or metal-plated layer on one face of a heat resistant film, a stage for providing a photoresist layer on the surface of the electrode layer, carrying out pattern exposure, development, and an etching processing, a stage for forming a semi-cured adhesive layer on the surface of the etched electrode layer, a stage for punching the formed laminated sheet according to the shape of a metal base, and stage for laminating the metal base and the laminate sheet via the above-mentioned adhesive and curing the laminated product.

摘要翻译： 本发明提供一种静电吸附装置，其具有改善的导热性，并且同时增加了吸附面积和改进的吸附性，并且在晶片提供面上没有不均匀性。 本发明的静电吸附装置包括金属基底，粘合剂层，包含金属沉积或金属镀层的电极层和具有用于通过抽吸提供要粘附的物质的面的电绝缘层，层压 按此顺序。 静电吸附装置通过包括在耐热膜的一个面上形成金属沉积或金属镀层的工序的工序，在电极层的表面上设置光致抗蚀剂层的工序， 曝光，显影和蚀刻处理，在蚀刻电极层的表面上形成半固化粘合剂层的阶段，根据金属基底的形状冲压所形成的层叠片的阶段和用于层压 金属基底和层压片通过上述粘合剂固化并固化层压产品。

公开(公告)号：US20100170076A1

公开(公告)日：2010-07-08

申请号：US12723745

申请日：2010-03-15

申请人： Masayoshi SUZUKI ,  Tadao Matsunaga ,  Tomoki Furue ,  Ken Sukegawa

发明人： Masayoshi SUZUKI ,  Tadao Matsunaga ,  Tomoki Furue ,  Ken Sukegawa

IPC分类号： B23P25/00

CPC分类号： G01C19/722 ,  G02B6/4457 ,  Y10T29/49885

摘要： An optical fiber coil and a production method therefor reduce the likelihood of optical transmission loss due to stress or temperature changes at low cost. Plural single optical fibers are arranged in parallel and are integrally covered with a covering portion so as to form an optical fiber ribbon, and the optical fiber ribbon is wound into a coiled state.

摘要翻译： 光纤线圈及其制造方法降低了由于应力或温度变化而导致的光传输损耗的可能性低成本。 多个单根光纤平行布置并且被覆盖部分整体地覆盖以形成光纤带，并且光纤带卷绕成卷绕状态。

公开(公告)号：US5987988A

公开(公告)日：1999-11-23

申请号：US905724

申请日：1997-08-04

申请人： Takashi Kunimi ,  Masahiro Nezu ,  Masatomo Mori ,  Tadao Matsunaga

发明人： Takashi Kunimi ,  Masahiro Nezu ,  Masatomo Mori ,  Tadao Matsunaga

IPC分类号： G01P15/00 ,  G01P15/135 ,  H01H1/00 ,  H01H35/14 ,  H01L29/84

CPC分类号： H01H35/14 ,  G01P15/135 ,  G01P15/18 ,  H01H1/0036

摘要： An acceleration sensor includes a first substrate, a second substrate and a third substrate. The second substrate has a through-hole, a first contact formed on an inner surface of the through-hole, and a first bonding pad connected to the first contact. An electrically conductive ball is accommodated in the through-hole. The third substrate has a recess, a second contact formed in the recess contacting the bottom of the electrically conductive ball, and a second bonding pad connected to the second contact.

摘要翻译： 加速度传感器包括第一基板，第二基板和第三基板。 第二基板具有通孔，形成在通孔的内表面上的第一触点和连接到第一触点的第一焊盘。 导电球容纳在通孔中。 第三基板具有凹部，形成在与导电球的底部接触的凹部中的第二触点和连接到第二触点的第二焊盘。

公开(公告)号：US5962789A

公开(公告)日：1999-10-05

申请号：US950137

申请日：1997-10-14

申请人： Tadao Matsunaga ,  Takashi Kunimi ,  Masahiro Nezu ,  Masatomo Mori

发明人： Tadao Matsunaga ,  Takashi Kunimi ,  Masahiro Nezu ,  Masatomo Mori

IPC分类号： G01P15/125 ,  G01P15/08 ,  G01P15/135 ,  H01L29/84

CPC分类号： G01P15/0802 ,  G01P15/135

摘要： A semiconductor acceleration sensor comprising a rectangular semiconductor substrate on the moving electrode side and a rectangular semiconductor substrate on the fixed electrode side laminated on each other, the moving electrode side substrate being formed with a heavy weight and a thin cantilever, a moving electrode being provided on the heavy weight, a first electrostatic attraction electrode being provided on the cantilever, the fixed electrode side substrate being formed with a fixed electrode at a position opposed to the moving electrode and a second electrostatic attraction electrode at a position opposed to the electrostatic attraction electrode. The first and second electrostatic attraction electrodes are placed facing each other. A predetermined spacing is provided between the electrostatic attraction electrodes and a predetermined voltage is applied therebetween.

摘要翻译： 一种半导体加速度传感器，其包括在移动电极侧的矩形半导体衬底和固定电极侧的矩形半导体衬底，所述移动电极侧衬底形成为重量轻的悬臂，设置有移动电极 在重物上，设置在悬臂上的第一静电吸引电极，固定电极侧基板在与移动电极相对的位置处形成有固定电极，在与静电吸引电极相对的位置形成第二静电吸引电极 。 第一和第二静电吸引电极彼此面对放置。 在静电吸引电极之间设置预定的间隔，并且在其间施加预定的电压。