Patterning slit sheet assembly, organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus, and the organic light-emitting display apparatus
    1.
    发明授权
    Patterning slit sheet assembly, organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus, and the organic light-emitting display apparatus 有权
    图案化狭缝片组件,有机层沉积装置,有机发光显示装置的制造方法和有机发光显示装置

    公开(公告)号:US08707889B2

    公开(公告)日:2014-04-29

    申请号:US13469066

    申请日:2012-05-10

    IPC分类号: B05C1/00

    摘要: A patterning slit sheet assembly for performing a deposition process to form a thin film on a substrate in a desired fine pattern. The patterning slit sheet assembly includes a patterning slit sheet having a plurality of slits, a frame combined with the patterning slit sheet to support the patterning slit sheet, and a support unit including an upper member that is allowed to be moved or fixed to support the patterning slit sheet when a gravitational force is applied to the patterning slit sheet and a lower member disposed more apart from the patterning slit sheet than the upper member, wherein the upper member is fixed on the lower member.

    摘要翻译: 一种图案化缝隙片组件,用于执行沉积工艺以在所需的精细图案中在衬底上形成薄膜。 图形化缝隙片组件包括具有多个狭缝的图案化缝隙片,与图案化缝隙片组合以支撑图案化缝隙片的框架,以及支撑单元,其包括允许移动或固定以支撑图案化缝隙片的上部构件 当向图案化缝隙片施加重力时构图缝隙片和与图案化缝隙片比上部构件更远离的下部构件,其中上部构件固定在下部构件上。

    Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus by using the same
    7.
    发明授权
    Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus by using the same 有权
    有机层沉积装置及使用该有机发光显示装置的有机发光显示装置的制造方法

    公开(公告)号:US09249493B2

    公开(公告)日:2016-02-02

    申请号:US13470077

    申请日:2012-05-11

    摘要: An organic layer deposition apparatus including: a deposition source configured to discharge a deposition material; a deposition source nozzle unit arranged at a side of the deposition source and including a plurality of deposition source nozzles; a patterning slit sheet facing the deposition source nozzle unit and including a plurality of patterning slits, the patterning slit sheet being smaller than the substrate in at least one of a first direction or a second direction perpendicular to the first direction; a blocking member configured to be disposed between the substrate and the deposition source to block at least a portion of the substrate; and a heating member on the blocking member and configured to heat the blocking member, and the substrate is spaced apart from the organic layer deposition apparatus by a predetermined distance, and the substrate or the organic layer deposition apparatus is movable relative to the other.

    摘要翻译: 一种有机层沉积设备,包括:沉积源,其构造成排出沉积材料; 沉积源喷嘴单元,布置在沉积源的一侧并且包括多个沉积源喷嘴; 图案化缝隙片,面向沉积源喷嘴单元并且包括多个图案化缝隙,所述图案化缝隙片在垂直于所述第一方向的第一方向或第二方向中的至少一个中小于所述衬底; 阻挡构件,被配置为设置在所述基板和所述沉积源之间以阻挡所述基板的至少一部分; 和阻挡构件上的加热构件,其构造为加热阻挡构件,并且基板与有机层沉积装置隔开预定距离,并且基板或有机层沉积装置可相对于另一个移动。

    ORGANIC LAYER DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS BY USING THE SAME
    8.
    发明申请
    ORGANIC LAYER DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS BY USING THE SAME 有权
    有机层沉积装置及使用其制造有机发光显示装置的方法

    公开(公告)号:US20120301986A1

    公开(公告)日:2012-11-29

    申请号:US13470077

    申请日:2012-05-11

    IPC分类号: H01L51/52 B05B15/04 B05B1/00

    摘要: An organic layer deposition apparatus including: a deposition source configured to discharge a deposition material; a deposition source nozzle unit arranged at a side of the deposition source and including a plurality of deposition source nozzles; a patterning slit sheet facing the deposition source nozzle unit and including a plurality of patterning slits, the patterning slit sheet being smaller than the substrate in at least one of a first direction or a second direction perpendicular to the first direction; a blocking member configured to be disposed between the substrate and the deposition source to block at least a portion of the substrate; and a heating member on the blocking member and configured to heat the blocking member, and the substrate is spaced apart from the organic layer deposition apparatus by a predetermined distance, and the substrate or the organic layer deposition apparatus is movable relative to the other.

    摘要翻译: 一种有机层沉积设备,包括:沉积源,其构造成排出沉积材料; 沉积源喷嘴单元,布置在沉积源的一侧并且包括多个沉积源喷嘴; 图案化缝隙片,面向沉积源喷嘴单元并且包括多个图案化缝隙,所述图案化缝隙片在垂直于所述第一方向的第一方向或第二方向中的至少一个中小于所述衬底; 阻挡构件,被配置为设置在所述基板和所述沉积源之间以阻挡所述基板的至少一部分; 和阻挡构件上的加热构件,其构造为加热阻挡构件,并且基板与有机层沉积装置隔开预定距离,并且基板或有机层沉积装置可相对于另一个移动。

    Patterning Slit Sheet Assembly, Organic Layer Deposition Apparatus, Method of Manufacturing Organic Light-Emitting Display Apparatus, and the Organic Light-Emitting Display Apparatus
    9.
    发明申请
    Patterning Slit Sheet Assembly, Organic Layer Deposition Apparatus, Method of Manufacturing Organic Light-Emitting Display Apparatus, and the Organic Light-Emitting Display Apparatus 有权
    图案化狭缝片组件,有机层沉积装置,有机发光显示装置的制造方法和有机发光显示装置

    公开(公告)号:US20120298970A1

    公开(公告)日:2012-11-29

    申请号:US13461669

    申请日:2012-05-01

    IPC分类号: H01L51/50 H01L51/40 C23C16/04

    摘要: A patterning slit sheet assembly to perform a deposition process to deposit a thin film on a substrate in a fine pattern. A patterning slit sheet assembly includes a patterning slit sheet including a slit unit, and a non-slit region that is located along edges of the slit unit, the patterning slit sheet being smaller than the substrate in at least one of a first direction or a second direction perpendicular to the first direction; a frame combined with the patterning slit sheet to support the patterning slit sheet; and a shielding unit extending on at least one inner side of the frame and overlapping an area including the edges of the slit unit.

    摘要翻译: 一种构图缝隙片组件,用于执行沉积工艺,以精细图案将薄膜沉积在衬底上。 构图缝隙片组件包括:包括狭缝单元的图案化缝隙片和位于所述狭缝单元的边缘的非狭缝区域,所述图案化缝隙片在所述第一方向或第二方向上的至少一个方向上小于所述衬底, 第二方向垂直于第一方向; 与图案化缝隙片组合的框架以支撑图案化缝隙片; 以及屏蔽单元,其在所述框架的至少一个内侧延伸并与包括所述狭缝单元的边缘的区域重叠。