Invention Grant
- Patent Title: Patterning slit sheet assembly, organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus, and the organic light-emitting display apparatus
- Patent Title (中): 图案化狭缝片组件，有机层沉积装置，有机发光显示装置的制造方法和有机发光显示装置
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Application No.: US13461669Application Date: 2012-05-01
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Publication No.: US08906731B2Publication Date: 2014-12-09
- Inventor: Myung-Ki Lee , Sung-Bong Lee , Myong-Hwan Choi , Mu-Hyun Kim
- Applicant: Myung-Ki Lee , Sung-Bong Lee , Myong-Hwan Choi , Mu-Hyun Kim
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Christie, Parker & Hale, LLP
- Priority: KR10-2011-0050842 20110527
- Main IPC: H01L21/00
- IPC: H01L21/00 ; C23C14/12 ; H01L51/00 ; C23C14/04 ; H01L51/56
Abstract:
A patterning slit sheet assembly to perform a deposition process to deposit a thin film on a substrate in a fine pattern. A patterning slit sheet assembly includes a patterning slit sheet including a slit unit, and a non-slit region that is located along edges of the slit unit, the patterning slit sheet being smaller than the substrate in at least one of a first direction or a second direction perpendicular to the first direction; a frame combined with the patterning slit sheet to support the patterning slit sheet; and a shielding unit extending on at least one inner side of the frame and overlapping an area including the edges of the slit unit.
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