公开(公告)号：US07392685B2

公开(公告)日：2008-07-01

申请号：US11190371

申请日：2005-07-26

Applicant: Stephen F. Becka

Inventor： Stephen F. Becka

IPC: G01P21/00 ,  G01P15/00

CPC classification number: G01P15/0922 ,  G01P15/08 ,  G01P2015/0828

Abstract: An apparatus and method for an accelerometer mechanism having a proof mass that is suspended for out-of-plane motion between first and second damping plates, wherein at least one of the first and second damping plates is movable between first and second positions relative to the proof mass under the control of a position control structure that is coupled to the movable damping plate for positioning the damping plate in the second position relative to the proof mass.

Abstract translation: 一种用于加速度计机构的装置和方法，其具有悬挂用于第一和第二阻尼板之间的平面外运动的检测质量块，其中第一和第二阻尼板中的至少一个可相对于第一和第二阻尼板在第一和第二位置之间移动 在位置控制结构的控制下，其与可移动阻尼板相耦合，用于将阻尼板相对于检验质量块定位在第二位置。

公开(公告)号：US07380454B2

公开(公告)日：2008-06-03

申请号：US11313892

申请日：2005-12-20

Applicant: Paul W. Dwyer ,  Stephen F. Becka

Inventor： Paul W. Dwyer ,  Stephen F. Becka

IPC: G01P15/08

CPC classification number: G01P15/0975

Abstract: Methods and systems for forming accelerometers include forming a load beam supported at one end having an input interdigital transducer (IDT) and an output IDT. The load-beam has a cross section varying in the longitudinal direction effective to cause the load beam to deflect radially in response to an applied load. The cross section varies in width, height, or both.

Abstract translation: 用于形成加速度计的方法和系统包括形成一端支撑的负载梁，其具有输入叉指式换能器（IDT）和输出IDT。 负载梁具有在纵向上变化的横截面，其有效地使得负载梁响应于所施加的负载而径向偏转。 横截面的宽度，高度或两者都有差异。

公开(公告)号：US06912902B2

公开(公告)日：2005-07-05

申请号：US10400591

申请日：2003-03-26

Applicant: David L. Malametz ,  Stephen F. Becka ,  Robert D. Horning

Inventor： David L. Malametz ,  Stephen F. Becka ,  Robert D. Horning

IPC: B81B3/00 ,  G01P15/08 ,  G01P15/125

CPC classification number: B81B3/0072 ,  B81B2201/0235 ,  G01P15/08 ,  G01P15/125 ,  G01P2015/0831

Abstract: A low cost, pendulous, capacitive-sensing Micro Electro-Mechanical Systems (MEMS) accelerometer is provided. The accelerometer includes a pendulous proof mass, one or more securing pads, and one or more flexures coupled with the pendulous proof mass and the one or more securing pads. The flexures flex linearly with respect to motion of the pendulous proof mass. First and second capacitor plates are positioned relative to the pendulous proof mass for detecting motion of the proof mass according to a sensed difference in capacitance. One or more strain isolation beams are connected between the one or more flexures and the pendulous proof mass or the securing pads. The strain isolation beams protect the flexures from mechanical strain.

Abstract translation: 提供了一种低成本，下摆的电容感应微机电系统（MEMS）加速度计。 该加速度计包括防晕质量块，一个或多个固定垫，以及一个或多个弯曲件，其与防倒伏质量块和一个或多个固定垫结合。 弯曲物相对于防倒体块的运动线性地弯曲。 第一和第二电容器板相对于防倒伏质量定位，用于根据感测到的电容差来检测检验质量块的运动。 一个或多个应变隔离梁连接在一个或多个挠曲件和防倒冲质量块或固定垫之间。 应变隔离梁保护挠曲免受机械应变。

公开(公告)号：US06768412B2

公开(公告)日：2004-07-27

申请号：US10223943

申请日：2002-08-20

Applicant: Stephen F. Becka ,  George D. Davis

Inventor： Stephen F. Becka ,  George D. Davis

IPC: H01H3752

CPC classification number: H01H1/0036 ,  H01H1/20 ,  H01H37/46 ,  H01H2001/0084 ,  H01H2037/008

Abstract: A simplified snap-action micromachined thermal switch having a bimodal thermal actuator fabricated from non-ductile materials such as silicon, glass, silicon oxide, tungsten, and other suitable materials using MEMS techniques.

Abstract translation: 具有由非延性材料如硅，玻璃，氧化硅，钨以及使用MEMS技术的其它合适材料制成的双峰型热致动器的简化的快动式微机械热开关。

公开(公告)号：US5097172A

公开(公告)日：1992-03-17

申请号：US556007

申请日：1990-07-20

Applicant: Stephen F. Becka

Inventor： Stephen F. Becka

IPC: G01P1/00 ,  G01P1/02 ,  H01L41/08

CPC classification number: G01P1/023 ,  G01P1/006

Abstract: A mounting system for mounting a transducer to a case, such that the transducer position is fixed and stable, and such that stresses on the transducer due to thermal expansion are minimized. The mounting system comprises a band, lower arms extending in a first axial direction from the band, and upper arms extending in a second, opposite axial direction from the band. The transducer arms are connected to the lower, and the upper arms to the case. In response to differential thermal expansion, the arms S bend in a radial direction.

Abstract translation: 用于将换能器安装到壳体上的安装系统，使得换能器位置是固定和稳定的，并且使得由于热膨胀而对换能器的应力最小化。 安装系统包括带，沿着带的第一轴向方向延伸的下臂，以及在与带相反的第二轴向方向上延伸的上臂。 传感器臂连接到下部，上臂连接到外壳。 响应于差分热膨胀，臂S沿径向弯曲。