Transfer system
    1.
    发明授权
    Transfer system 有权
    转移系统

    公开(公告)号:US08989899B2

    公开(公告)日:2015-03-24

    申请号:US13607806

    申请日:2012-09-10

    IPC分类号: B08B3/04 G03D5/00

    摘要: A transfer system according to an embodiment includes a robot and a determination unit. The robot includes robot hands that hold a workpiece in a thin plate shape and that are located at different heights. The determination unit determines the robot hands that hold the workpiece based on a combination of temperature of the workpiece to be held by each of the robot hands.

    摘要翻译: 根据实施例的传送系统包括机器人和确定单元。 机器人包括将工件保持在薄板形状并位于不同高度的机器人手。 确定单元基于由每个机器人手保持的工件的温度的组合来确定保持工件的机器人手。

    Optical recording medium for writing data using multiple pulses
    2.
    发明授权
    Optical recording medium for writing data using multiple pulses 有权
    用于使用多个脉冲写入数据的光学记录介质

    公开(公告)号:US08437242B2

    公开(公告)日:2013-05-07

    申请号:US13252791

    申请日:2011-10-04

    IPC分类号: G11B11/00

    摘要: An optical recording medium including a plurality of recording layers to record/reproduce information using light with a predetermined wavelength, the information being recorded on one of the recording layers using a mark and a space, wherein a channel clock period T is provided for recording the mark on one of the recording layers. A plurality of pulses, including a last pulse arranged at an end of the pulses, are used to record the mark with length 3T, the mark being recorded with a condition that a width of the last pulse is minimum OT and maximum 1.10T, in which a first subsequent level lower than a peak power level of the last pulse is arranged next to the last pulse, and a second subsequent level lower than the peak power level but higher than the first subsequent level is arranged next to the first subsequent level.

    摘要翻译: 一种光记录介质,包括使用预定波长的光记录/再现信息的多个记录层,所述信息使用标记和空间被记录在一个记录层上,其中提供通道时钟周期T用于记录 在其中一个记录层上标记。 包括布置在脉冲结束处的最后脉冲的多个脉冲用于记录长度为3T的标记,该标记以最后脉冲的宽度为最小OT和最大值为1.10T的条件记录,在 其最后一个电平低于最后脉冲的峰值功率电平的第一后置电平被布置在最后脉冲的旁边,并且比峰值功率电平低但高于第一后续电平的第二后续电平被布置在第一后续电平旁边。

    INFORMATION RECORDING MEDIUM AND DISK APPARATUS USING THE MEDIUM
    3.
    发明申请
    INFORMATION RECORDING MEDIUM AND DISK APPARATUS USING THE MEDIUM 有权
    使用介质的信息记录介质和磁盘设备

    公开(公告)号:US20120026851A1

    公开(公告)日:2012-02-02

    申请号:US13252806

    申请日:2011-10-04

    IPC分类号: G11B7/24 G11B7/0045

    摘要: An optical recording medium including a plurality of recording layers to record/reproduce information using light with a predetermined wavelength, the information being recorded on one of the recording layers using a mark and a space, wherein a channel clock period T is provided for recording the mark on one of the recording layers. A plurality of pulses, including a last pulse arranged at an end of the pulses, are used to record the mark with length 3T, the mark being recorded with a condition that a width of the last pulse is minimum 0T and maximum 1.10T, in which a first subsequent level lower than a peak power level of the last pulse is arranged next to the last pulse, and a second subsequent level lower than the peak power level but higher than the first subsequent level is arranged next to the first subsequent level.

    摘要翻译: 一种光记录介质,包括使用预定波长的光记录/再现信息的多个记录层,所述信息使用标记和空间被记录在一个记录层上,其中提供通道时钟周期T用于记录 在其中一个记录层上标记。 包括布置在脉冲结束处的最后脉冲的多个脉冲用于记录长度为3T的标记,该标记以最后脉冲的宽度最小为0T且最大为1.10T的条件记录 其最后一个电平低于最后脉冲的峰值功率电平的第一后置电平被布置在最后脉冲的旁边,并且比峰值功率电平低但高于第一后续电平的第二后续电平被布置在第一后续电平旁边。

    Techniques for wafer prealignment and sensing edge position
    4.
    发明授权
    Techniques for wafer prealignment and sensing edge position 有权
    晶圆预对准和检测边缘位置的技术

    公开(公告)号:US07154113B2

    公开(公告)日:2006-12-26

    申请号:US11259130

    申请日:2005-10-27

    IPC分类号: G01N21/86

    摘要: A prealignment sensor comprising a frame fixed to a base and having a U-shape when viewed from its side. A light source is attached to a lower part of the flame. A convex lens is attached to a lower part of an inside of the frame by which diffused light of the light source is transformed into parallel light. A lens holder is provided for fixing the convex lens to the frame. An optical receiver is attached to an upper part of an inside of the frame by which the parallel light is received and is transformed into an electrical signal. A signal processing circuit is attached to the frame by which the electric signal is transformed into a desired displacement magnitude. The frame is formed of aluminum subjected to sulfuric-acid hard alumite treatment and then to steam sealing.

    摘要翻译: 一种预对准传感器,其包括固定到基座并且从侧面观察时具有U形的框架。 光源附着在火焰的下部。 凸透镜附接到框架的内部的下部,由此将光源的漫射光变换成平行光。 提供了用于将凸透镜固定到框架的透镜保持器。 光接收器附接到框架内部的上部,通过该接收器接收并行光,并将其转换成电信号。 一个信号处理电路被附加到该电信号被转换成期望位移幅度的帧上。 框架由经过硫酸硬氧化铝处理的铝形成,然后进行蒸汽密封。

    Wafer prealignment apparatus, its method for judging wafer presence, method for sensing wafer edge position, computer-readable record medium with recorded program for executing this position sensing method, apparatus for sensing wafer edge position, and prealignment sensor
    6.
    发明申请
    Wafer prealignment apparatus, its method for judging wafer presence, method for sensing wafer edge position, computer-readable record medium with recorded program for executing this position sensing method, apparatus for sensing wafer edge position, and prealignment sensor 有权
    晶片预对准装置,其判断晶片存在的方法,用于检测晶片边缘位置的方法,具有用于执行该位置检测方法的记录程序的计算机可读记录介质,用于感测晶片边缘位置的装置和预对准传感器

    公开(公告)号:US20060038142A1

    公开(公告)日:2006-02-23

    申请号:US11259130

    申请日:2005-10-27

    IPC分类号: G01N21/86

    摘要: A wafer prealignment apparatus comprising a CCD linear sensor and a wafer prealignment method which facilitate the sensing of wafer presence, improvement in precision of position sensing, and edge sensing adapted to the material of the wafer even of the material is transparent or not. A photodiode (27) is provided in a vicinity of the first pixel from the center shaft of the wafer rotation means of a CCD linear sensor (5) to detect a wafer (1) on the basis of the luminous energy value. The time from the issuance of a measurement command to the sensor (5) to that of an ROG signal for transmitting the detection timing of the sensor (5) is measured to correct the angular error of a measurement position due to the rotation during this measurement. For sensing an edge position of the wafer (1), the scan start point of the sensor (5) is set on the opposite side of the center shaft of the wafer rotation means. When the wafer is transparent a sense signal is binarized to set its change point as the edge position. When the wafer is not transparent, information on a position lastly sensed as an edge is judged to be correct so that a particle may not be misrecognized as the edge.

    摘要翻译: 包括CCD线性传感器和便于感测晶片存在的晶片预对准方法的晶片预对准装置,以及适于材料的材料的边缘传感甚至是透明的也是透明的。 从CCD线性传感器(5)的晶片旋转装置的中心轴在第一像素附近设置光电二极管(27),以基于光能值检测晶片(1)。 测量从测量命令发出到传感器(5)的时间到发送传感器(5)的检测定时的ROG信号的时间,以校正由于该测量期间的旋转而导致的测量位置的角度误差 。 为了感测晶片(1)的边缘位置,传感器(5)的扫描起始点设置在晶片旋转装置的中心轴的相反侧。 当晶片透明时,感测信号被二值化以将其变化点设置为边缘位置。 当晶片不透明时,关于最后被感测为边缘的位置的信息被判断为是正确的,使得颗粒可能不被误识别为边缘。

    INFORMATION RECORDING MEDIUM AND DISK APPARATUS USING THE MEDIUM
    7.
    发明申请
    INFORMATION RECORDING MEDIUM AND DISK APPARATUS USING THE MEDIUM 有权
    使用介质的信息记录介质和磁盘设备

    公开(公告)号:US20100246366A1

    公开(公告)日:2010-09-30

    申请号:US12795385

    申请日:2010-06-07

    IPC分类号: G11B7/00

    摘要: According to one embodiment, an information recording medium has a plurality of recording layers, and records and reproduces information by using a semiconductor layer of 450 nm or less. When reproducing information, letting x be the frequency of repetitive recording of a shortest mark length and shortest space length of the information, the ratio of the value of a highest level to the value of a level at x/190 of a sum signal detected within the frequency range of x/3240 to x/190 is lower than 32 dB, or the ratio of the average value of the amplitudes of signals of repetitive recording of the shortest mark length and shortest space length to the value of the highest level within the frequency range of x/3240 to x/190 is higher than 10 dB.

    摘要翻译: 根据一个实施例,信息记录介质具有多个记录层,并且通过使用450nm或更小的半导体层来记录和再现信息。 当再现信息时,将x作为信息的最短标记长度和最短空格长度的重复记录的频率,在最高级别的值与在x / 190处检测到的和信号的电平值的比值 x / 3240至x / 190的频率范围低于32dB,或者最短标记长度和最短空间长度的重复记录信号的幅度的平均值与该最小标记长度和最短空格长度之间的最高级别的值的平均值的比值 x / 3240〜x / 190的频率范围高于10dB。

    Optical disc apparatus and still operation method capable of performing still operation without deteriorating optical disc
    8.
    发明申请
    Optical disc apparatus and still operation method capable of performing still operation without deteriorating optical disc 审中-公开
    光盘装置和静止操作方法能够在不损坏光盘的情况下执行静止操作

    公开(公告)号:US20050002290A1

    公开(公告)日:2005-01-06

    申请号:US10856233

    申请日:2004-05-28

    CPC分类号: G11B7/085 G11B19/06

    摘要: An optical disc apparatus capable of performing a still operation includes a circulation-number counter (4) counting a circulation number of the optical disc (1) and a control unit (6) obtaining the accumulated circulation number (4) of the optical disc (1) after start of the still operation from the circulation-number counter (4) and, when the accumulated circulation number attains a predetermined circulation number n (n>1) as said predetermined value, controlling the pickup (3) so as to perform a track-jump for being placed back by n tracks toward the start position of reading the optical disc (1).

    摘要翻译: 能够执行静止操作的光盘装置包括对光盘(1)的循环数进行计数的循环数计数器(4)和获得光盘的累积循环数(4)的控制单元(6) 1)从循环编号计数器(4)开始静止操作之后,当累积循环数达到预定循环数n(n> 1)作为所述预定值时,控制拾取器(3)以执行 轨道跳转被放置在朝向读取光盘(1)的开始位置的n个轨道。

    Optical recording medium for writing data using multiple pulses
    9.
    发明授权
    Optical recording medium for writing data using multiple pulses 有权
    用于使用多个脉冲写入数据的光学记录介质

    公开(公告)号:US08059523B2

    公开(公告)日:2011-11-15

    申请号:US12795385

    申请日:2010-06-07

    IPC分类号: G11B7/24

    摘要: An optical recording medium including a plurality of recording layers to record/reproduce information using light with a predetermined wavelength, the information being recorded on one of the recording layers using a mark and a space, wherein a channel clock period T is provided for recording the mark on one of the recording layers. A plurality of pulses, including a last pulse arranged at an end of the pulses, are used to record the mark with length 3T, the mark being recorded with a condition that a width of the last pulse is minimum 0T and maximum 1.10T, in which a first subsequent level lower than a peak power level of the last pulse is arranged next to the last pulse, and a second subsequent level lower than the peak power level but higher than the first subsequent level is arranged next to the first subsequent level.

    摘要翻译: 一种光记录介质,包括使用预定波长的光记录/再现信息的多个记录层,所述信息使用标记和空间被记录在一个记录层上,其中提供通道时钟周期T用于记录 在其中一个记录层上标记。 包括布置在脉冲结束处的最后脉冲的多个脉冲用于记录长度为3T的标记,该标记以最后脉冲的宽度最小为0T且最大为1.10T的条件记录 其最后一个电平低于最后脉冲的峰值功率电平的第一后置电平被布置在最后脉冲的旁边,并且比峰值功率电平低但高于第一后续电平的第二后续电平被布置在第一后续电平旁边。

    Techniques for wafer prealignment and sensing edge positions
    10.
    发明授权
    Techniques for wafer prealignment and sensing edge positions 有权
    晶圆预对准和检测边缘位置的技术

    公开(公告)号:US07109511B2

    公开(公告)日:2006-09-19

    申请号:US10415733

    申请日:2001-11-01

    IPC分类号: G01N21/86

    摘要: A wafer prealignment apparatus comprising a CCD linear sensor and a wafer prealignment method which facilitate the sensing of wafer presence, improvement in precision of position sensing, and edge sensing adapted to the material of the wafer even of the material is transparent or not. A photodiode (27) is provided in a vicinity of the first pixel from the center shaft of the wafer rotation means of a CCD linear sensor (5) to detect a wafer (1) on the basis of the luminous energy value. The time from the issuance of a measurement command to the sensor (5) to that of an ROG signal for transmitting the detection timing of the sensor (5) is measured to correct the angular error of a measurement position due to the rotation during this measurement. For sensing an edge position of the wafer (1), the scan start point of the sensor (5) is set on the opposite side of the center shaft of the wafer rotation means. When the wafer is transparent a sense signal is binarized to set its change point as the edge position. When the wafer is not transparent, information on a position lastly sensed as an edge is judged to be correct so that a particle may not be misrecognized as the edge.

    摘要翻译: 包括CCD线性传感器和便于感测晶片存在的晶片预对准方法的晶片预对准装置,以及适于材料的材料的边缘传感甚至是透明的也是透明的。 从CCD线性传感器(5)的晶片旋转装置的中心轴在第一像素附近设置光电二极管(27),以基于光能值检测晶片(1)。 测量从测量命令发出到传感器(5)的时间到发送传感器(5)的检测定时的ROG信号的时间,以校正由于该测量期间的旋转而导致的测量位置的角度误差 。 为了感测晶片(1)的边缘位置,传感器(5)的扫描起始点设置在晶片旋转装置的中心轴的相反侧。 当晶片透明时,感测信号被二值化以将其变化点设置为边缘位置。 当晶片不透明时,关于最后被感测为边缘的位置的信息被判断为是正确的,使得颗粒可能不被误识别为边缘。