MASS FLOW RATE CONTROL APPARATUS, ITS CALIBRATION METHOD AND SEMICONDUCTOR-PRODUCING APPARATUS
    1.
    发明申请
    MASS FLOW RATE CONTROL APPARATUS, ITS CALIBRATION METHOD AND SEMICONDUCTOR-PRODUCING APPARATUS 有权
    质量流量控制装置,其校准方法和半导体生产装置

    公开(公告)号:US20070233412A1

    公开(公告)日:2007-10-04

    申请号:US11688345

    申请日:2007-03-20

    IPC分类号: G06F19/00 G01F25/00 G01F1/12

    摘要: A method for calibrating a mass flow controller comprising a calibrating valve disposed on the most upstream side of a path, a mass flow rate control valve mechanism, a tank provided at the path on the upstream side of the mass flow rate control valve mechanism, a mass-flow-rate-sensing means, a pressure-sensing means, a means for controlling the mass flow rate control valve mechanism, and a mass flow rate calibration control means, the method comprising the steps of (1) permitting a fluid at a set mass flow rate to flow through the path, (2) setting the mass flow rate control valve mechanism at a degree of opening that the mass flow rate of the fluid is equal to the set mass flow rate, (3) closing the calibrating valve, (4) measuring the pressure and mass flow rate of the fluid after a fluid flow from the tank is stabilized, (5) determining a variation ratio of the pressure and mass flow rate to reference pressure and mass flow rate measured by the same procedures in an initial state, is and (6) performing calibration depending on the variation ratio.

    摘要翻译: 一种用于校准质量流量控制器的方法,所述质量流量控制器包括设置在路径的最上游侧的校准阀,质量流量控制阀机构,设置在质量流量控制阀机构的上游侧的路径上的罐, 质量流量检测装置,压力感测装置,用于控制质量流量控制阀机构的装置和质量流量校准控制装置,所述方法包括以下步骤:(1)允许流体在 设定质量流量流过路径,(2)将质量流量控制阀机构设定在开度为流体质量流量等于设定质量流量的程度,(3)关闭校准阀 ,(4)测量流体从罐中流出后的流体的压力和质量流量是否稳定,(5)确定压力和质量流量与参考压力和质量流量的变化率,通过相同的程序测量 在一个init 是和(6)根据变化比进行校准。

    Flow controller and its regulation method
    2.
    发明申请
    Flow controller and its regulation method 有权
    流量控制器及其调节方法

    公开(公告)号:US20060278276A1

    公开(公告)日:2006-12-14

    申请号:US10569783

    申请日:2005-06-20

    IPC分类号: G05D7/06

    摘要: The invention is intended to provide a mass flow control device incorporating a verification tank, in which the mass flow testing operations are conducted by the device itself. A mass flow control device comprises control means 18 for controlling a flow control valve mechanism based on an externally input flow set signal and a flow signal. The mass flow control device is equipped with a mass flow detector means 8 and a flow control valve mechanism 10 both of which are set in a channel 6 through which a fluid flows. The mass flow detector means 8 detects the mass flow of the fluid that flows through the channel and outputs the flow signal. The flow control valve mechanism 10 controls the mass flow by altering the valve aperture by means of valve drive signals. The mass flow control device is also equipped with a verification valve 42, a verification tank 44 and pressure detector means 46 in the channel. The verification valve 42 opens and closes the channel. The verification tank 44 has a certain volume. The pressure detector means 46 detects the pressure of the fluid and outputs pressure detection signals. The mass flow control device is also equipped with verification control means 48 which controls the detection valve and detection tank and pressure detector means to carry out the mass flow testing operations.

    摘要翻译: 本发明旨在提供一种包含验证罐的质量流量控制装置,其中质量流量测试操作由装置本身进行。 质量流量控制装置包括用于基于外部输入的流量设定信号和流量信号来控制流量控制阀机构的控制装置18。 质量流量控制装置配备有质量流量检测装置8和流量控制阀机构10,两者均设置在流体流过的通道6中。 质量流量检测器装置8检测流过通道的流体的质量流量并输出流量信号。 流量控制阀机构10通过阀驱动信号改变阀孔来控制质量流量。 质量流量控制装置还配备有通道中的验证阀42,验证罐44和压力检测器装置46。 验证阀42打开和关闭通道。 验证箱44具有一定的体积。 压力检测装置46检测流体的压力并输出压力检测信号。 质量流量控制装置还配备有验证控制装置48,其控制检测阀和检测罐以及压力检测器装置进行质量流量测试操作。

    Mass flow rate control apparatus, its calibration method and semiconductor-producing apparatus
    3.
    发明授权
    Mass flow rate control apparatus, its calibration method and semiconductor-producing apparatus 有权
    质量流量控制装置,其校准方法和半导体制造装置

    公开(公告)号:US07979165B2

    公开(公告)日:2011-07-12

    申请号:US11688345

    申请日:2007-03-20

    IPC分类号: G05D7/06 G01F1/66

    摘要: A method for calibrating a mass flow controller comprising a calibrating valve disposed on the most upstream side of a path, a mass flow rate control valve mechanism, a tank provided at the path on the upstream side of the mass flow rate control valve mechanism, a mass-flow-rate-sensing means, a pressure-sensing means, a means for controlling the mass flow rate control valve mechanism, and a mass flow rate calibration control means, the method comprising the steps of (1) permitting a fluid at a set mass flow rate to flow through the path, (2) setting the mass flow rate control valve mechanism at a degree of opening that the mass flow rate of the fluid is equal to the set mass flow rate, (3) closing the calibrating valve, (4) measuring the pressure and mass flow rate of the fluid after a fluid flow from the tank is stabilized, (5) determining a variation ratio of the pressure and mass flow rate to reference pressure and mass flow rate measured by the same procedures in an initial state, and (6) performing calibration depending on the variation ratio.

    摘要翻译: 一种用于校准质量流量控制器的方法,所述质量流量控制器包括设置在路径的最上游侧的校准阀,质量流量控制阀机构,设置在质量流量控制阀机构的上游侧的路径上的罐, 质量流量检测装置,压力感测装置,用于控制质量流量控制阀机构的装置和质量流量校准控制装置,所述方法包括以下步骤:(1)允许流体在 设定质量流量流过路径,(2)将质量流量控制阀机构设定在开度为流体质量流量等于设定质量流量的程度,(3)关闭校准阀 ,(4)测量流体从罐中流出后的流体的压力和质量流量是否稳定,(5)确定压力和质量流量与参考压力和质量流量的变化率,通过相同的程序测量 在初始状态下, 和(6)根据变化率执行校准。

    Flow controller and its regulation method
    4.
    发明授权
    Flow controller and its regulation method 有权
    流量控制器及其调节方法

    公开(公告)号:US07918238B2

    公开(公告)日:2011-04-05

    申请号:US10569783

    申请日:2005-06-20

    IPC分类号: F16K31/02

    摘要: A mass flow controller arranged to perform mass flow test operation in the controller itself by incorporating a test tank. The mass flow controller is provided, in a channel (6) for feeding fluid, with a means (8) for detecting the mass flow rate of fluid flowing through the channel and outputting a flow rate signal, and a mechanism (10) for controlling the mass flow rate by varying the valve opening by a valve drive signal.

    摘要翻译: 质量流量控制器,其布置成通过结合测试罐来在控制器本身中进行质量流量测试操作。 在用于供给流体的通道(6)中设置有用于检测流过通道的流体的质量流量并输出流量信号的装置(8)的质量流量控制器,以及用于控制流体的机构(10) 通过阀驱动信号改变阀开度的质量流量。

    METHOD FOR RECYCLING WASTEWATER
    5.
    发明申请
    METHOD FOR RECYCLING WASTEWATER 有权
    回收废水的方法

    公开(公告)号:US20090127196A1

    公开(公告)日:2009-05-21

    申请号:US12343759

    申请日:2008-12-24

    IPC分类号: C02F1/78 C02F103/00

    摘要: A method of wastewater reutilization by which reusable water can be stably obtained from a wastewater. Ozone is added to a wastewater, such as water resulting from sewage treatment, in such a small amount as to result in a residual ozone concentration as measured before membrane filtration of 0.01-1.0 mg/L. Ozone is thus brought into contact with fine solids contained in the wastewater to alter the surface properties of the fine solids so that the solids are easily to coagulate. Thereafter, a coagulant, e.g., PACl, is added from a coagulant addition device(3). The fine solids are coagulated in a coagulation tank(5) or a line mixer and the resultant water is subjected to membrane filtration with an ozone-resistant separation membrane(6) such as ceramic membrane. Thus, reusable water is obtained which has a residual ozone concentration, as measured after filtration through the membrane, less than 0.5 mg/L.

    摘要翻译: 废水再利用的方法,可以从废水中稳定地获得可重复使用的水。 将臭氧添加到诸如由污水处理产生的水之类的废水中,其用量少,导致膜过滤之前测量的残留臭氧浓度为0.01-1.0mg / L。 因此,臭氧与废水中包含的细固体接触以改变细固体的表面性质,使得固体容易凝结。 此后,从凝结剂添加装置(3)中加入凝结剂,例如PAC1。 细固体在凝结槽(5)或管线混合器中凝结,所得水用陶瓷膜等耐臭氧分离膜(6)进行膜过滤。 因此,获得了通过膜过滤后测量的具有小于0.5mg / L的残留臭氧浓度的可重复使用的水。

    SHUTOFF VALVE APPARATUS AND MASS FLOW CONTROL DEVICE WITH BUILT-IN VALVE
    6.
    发明申请
    SHUTOFF VALVE APPARATUS AND MASS FLOW CONTROL DEVICE WITH BUILT-IN VALVE 有权
    具有内置阀的开关阀装置和大流量控制装置

    公开(公告)号:US20070240769A1

    公开(公告)日:2007-10-18

    申请号:US11736178

    申请日:2007-04-17

    IPC分类号: G05D7/06

    摘要: Shutoff valve apparatus comprising: a valve block 80 having a valve chest on which gas collects temporarily, an inlet flow path 34 which makes gas flow into a valve chest, an outlet flow path 40 into which gas is made to flow out of a valve chest, a valve seat 44 located in the inlet port of an inlet flow path, or the outlet port, a diaphragm valve element 38 located in the opposed position of the valve seat and closes the valve port by contacting with the valve seat, pressing means 82 for pressing diaphragm valve element, an actuator plate 84 disposed at the opposite side of the valve chest so that the diaphragm valve element may be opposed, an operation chamber 86 divided with the actuator plate, and an operation gas supply exhaust mechanism in which operation gas is made to supply or exhaust into the operation chamber.

    摘要翻译: 截止阀装置,包括:具有临时收集气体的阀门的阀门块80,使气体流入阀门的入口流动路径34,使气体从阀室流出的出口流路40 ,位于入口流路的入口端口的阀座44或出口,位于阀座相对位置的隔膜阀元件38,通过与阀座接触而关闭阀口,按压装置82 用于按压隔膜阀元件,设置在阀室相对侧的致动器板84,使得隔膜阀元件可以相对,分隔有致动器板的操作室86和操作气体供给排气机构,其中操作气体 被制成供给或排出到操作室。

    Paper feeding device for recording apparatus
    7.
    发明授权
    Paper feeding device for recording apparatus 失效
    记录设备供纸装置

    公开(公告)号:US4461466A

    公开(公告)日:1984-07-24

    申请号:US350427

    申请日:1982-02-22

    CPC分类号: B65H3/5223 B65H1/18

    摘要: A paper feeding device used for feeding stacked paper to an electrophotographic copying machine is provided with a lift for a stack of papers, which move the top sheet against a swingably supported feeding roller as the size of the stack decreases under use. Forwardly of the feeding roller in the direction of travel of the paper is a plate in frictional contact with the roller, the paper being thus fed forwardly to the copying machine through the nip between the roller and plate. This arrangement avoids the problem of a multifeed of the sheets. The feeding-out operation may be further improved by the provision of separating claws engaging the leading corners of the paper as it passes from the feeding roller. Raising of the lift is controlled by a detecting device actuated by position of the swingable support for the feeding roller.

    摘要翻译: 用于将堆叠的纸送入电子照相复印机的供纸装置设置有用于堆叠纸张的提升器,当纸张的尺寸在使用中减小时,顶板抵靠可摆动支撑的进给辊移动。 进给辊沿着纸张行进方向的向前是与辊摩擦接触的板,因此纸通过辊和板之间的辊隙向前馈送到复印机。 这种布置避免了纸张的多重进纸的问题。 当纸从进给辊通过时,通过设置接合纸的前角的分离爪,可以进一步提高送出操作。 通过由供给辊的可摆动支撑件的位置驱动的检测装置控制升降机的升高。

    Mass flow rate-controlling apparatus
    8.
    发明授权
    Mass flow rate-controlling apparatus 有权
    质量流量控制装置

    公开(公告)号:US08112182B2

    公开(公告)日:2012-02-07

    申请号:US10572046

    申请日:2005-02-03

    IPC分类号: G05D11/00

    摘要: A mass flow rate-controlling apparatus including a mass flow rate-detecting mechanism 8 a flow rate-controlling valve mechanism 10 and a mechanism 44 for controlling the flow rate-controlling valve mechanism based on a flow rate-setting signal S0 input from outside and a flow rate signal S1, the flow path being provided with a pressure-detecting mechanism 42 for detecting the pressure of the fluid to output the detected pressure signal, so that the controlling mechanism selectively switches a first control mode for controlling the mass flow rate based on the flow rate signal and the flow rate-setting signal without using the detected pressure signal, and a second control mode for controlling the mass flow rate based on the detected pressure signal, the flow rate signal and the flow rate-setting signal, based on a pressure variation obtained from the detected pressure signal.

    摘要翻译: 一种质量流量控制装置,包括质量流量检测机构8,流量控制阀机构10和用于基于从外部输入的流量设定信号S0来控制流量控制阀机构的机构44,以及 流量信号S1,流路设置有用于检测流体的压力以输出检测到的压力信号的压力检测机构42,使得控制机构选择性地切换用于控制质量流量的第一控制模式 在不使用检测到的压力信号的情况下对流量信号和流量设定信号进行控制;以及第二控制模式,用于基于检测到的压力信号,流量信号和流量设定信号来控制质量流量 基于从检测到的压力信号获得的压力变化。

    SIDE STREAM TYPE MEMBRANE BIOREACTOR PROCESS
    9.
    发明申请
    SIDE STREAM TYPE MEMBRANE BIOREACTOR PROCESS 有权
    侧流式膜生物反应器工艺

    公开(公告)号:US20100264081A1

    公开(公告)日:2010-10-21

    申请号:US12817492

    申请日:2010-06-17

    IPC分类号: C02F3/30

    摘要: The invention provides a side stream type membrane bioreactor process which does not cause an excessive fall in the MLSS concentration in a bioreactor, does not require any additional effluent treatment facility for discharging backwash effluent, and can further ensure the stability of the membrane filtration performance of a separation membrane. According to the invention, in a side stream type membrane bioreactor process, a backwash effluent containing foulants that are generated by backwashing a separation membrane is collected in a backwash effluent tank, and subjected to ozone treatment, and the resultant is returned to a bioreactor. By this ozone treatment, the foulants close to the membrane pore size of the separation membrane are made fine or are made into a state be easily taken into activated sludge flocs. Therefore, even when the treated effluent is returned to the bioreactor, the membrane filtration performance of the separation membrane is not deteriorated.

    摘要翻译: 本发明提供了一种侧流式膜生物反应器方法,其不会在生物反应器中引起MLSS浓度的过度下降,不需要任何额外的废水处理设备来排放反洗出水,并且可以进一步确保膜过滤性能的稳定性 分离膜。 根据本发明,在侧流型膜生物反应器方法中,将通过反冲洗分离膜产生的含有污染物的反洗流出物收集在反洗流出槽中,并进行臭氧处理,并将所得物返回到生物反应器。 通过这种臭氧处理,接近分离膜的膜孔径的污垢物变细或被制成容易被摄入活性污泥絮凝物的状态。 因此,即使处理过的废液返回到生物反应器,也不会使分离膜的膜过滤性降低。

    Method for treating organic sludge
    10.
    发明授权
    Method for treating organic sludge 失效
    有机污泥处理方法

    公开(公告)号:US5360546A

    公开(公告)日:1994-11-01

    申请号:US40609

    申请日:1993-03-31

    摘要: A method for treating an organic sludge is provided which can sufficiently and efficiently solubilize an organic sludge to afford a high load of anaerobic digestion treatment with an improved digestion ratio and methane gas recovery amount thereby to widely decrease the amount of the organic sludge discharged from the method. The method includes a hot alkaline treatment for causing the organic sludge to become alkaline while maintaining the temperature of the sludge to ambient -100.degree. C. to solubilize organic matters in the sludge, and an anaerobic digestion treatment of anaerobically digesting the organic sludge after the hot alkaline treatment at a temperature of 20.degree.-60.degree. C. at a pH of 7.3-9.2.

    摘要翻译: 提供了一种处理有机污泥的方法,可以充分有效地溶解有机污泥,以提高消化率和甲烷气体回收量来提供高负荷的厌氧消化处理,从而大大减少从 方法。 该方法包括使碱性有机污泥保持碱性,同时将污泥温度保持在-100℃左右的热碱处理,使污泥中的有机物质溶解,并对厌氧消化处理后的有机污泥进行厌氧消化处理 在20〜60℃的温度下,在7.3-9.2的pH下进行热碱处理。