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公开(公告)号：US12069432B2
公开(公告)日：2024-08-20
申请号：US17775699
申请日：2020-11-11
申请人： SENSIBEL AS
发明人： Håkon Sagberg , Jakob Vennerød
CPC分类号： H04R23/008 , G01B11/14 , G01D5/266
摘要： An optical microphone assembly including a substrate, an interferometric arrangement, a light source, and at least one photo detector. The interferometric arrangement includes a membrane and at least one diffractive optical element spaced from the membrane. The diffractive optical element(s) include a plurality of lines formed in or disposed on a surface of the substrate and arranged in a first pattern. The substrate includes one or more holes extending fully therethrough, the hole(s) arranged in a second pattern that is different from the first pattern. The light source is arranged to provide light to the interferometric arrangement such that first and second portions of the light propagate along respective, different first and second optical paths via the interferometric arrangement. An optical path difference between the first and second optical paths depends on a distance between the membrane and the diffractive optical element(s). The hole(s) are positioned such that at least one of the first and second optical paths at least partly overlaps with the hole(s). The photo detector(s) are arranged to detect at least part of an interference pattern generated by said first and second portions of light dependent on the optical path difference.
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公开(公告)号：US20230164470A1
公开(公告)日：2023-05-25
申请号：US17997192
申请日：2021-04-27
申请人： SENSIBEL AS
CPC分类号： H04R1/08 , G01B9/02049 , G02F1/0154 , G02F1/292 , H04R1/04
摘要： An optical microphone module for installation in a microphone assembly is described. The module is manufactured by assembling a semiconductor chip, a spacer and an interferometric component in a stack with the spacer disposed between the semiconductor chip and the interferometric component. The interferometric component comprises a membrane and a substrate comprising an optical element spaced from the membrane. The semiconductor chip comprises an optoelectronic circuit including at least one photo detector and has a light source mounted thereon or integrated therein. The light source is disposed to provide light to the interferometric arrangement such that two light portions propagate via respective optical paths to create an interference pattern at the photo detector which is dependent on a position of the membrane. The stack comprises an internal cavity and at least one aperture providing a passage for air between the internal cavity and an exterior of the stack, such that the internal cavity is in fluid communication with the exterior of the stack. A first side of the membrane is in fluid communication with the exterior of the stack and a second side of the membrane is in fluid communication with the internal cavity.
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公开(公告)号：US20220167096A1
公开(公告)日：2022-05-26
申请号：US17441947
申请日：2020-03-20
申请人： SensiBel AS
发明人： Matthieu LaColle , Håkon Sagberg , Jakob Vennerød
摘要： An optical microphone assembly including a micro-electromechanical system (MEMS) component, a semiconductor chip, and an outer housing including at least part of a non-MEMS supporting structure and defining an aperture. The MEMS component includes an interferometric arrangement which includes a membrane and at least one optical element spaced from the membrane. The semiconductor chip includes at least one photo detector and a light source. The MEMS component is mounted on the non-MEMS supporting structure and sealed to the outer housing such that the MEMS component closes the aperture. The semiconductor chip is mounted separately from the MEMS component on the non-MEMS supporting structure in a spaced relationship with the MEMS component such that the MEMS component is displaced relative to the semiconductor chip in a direction perpendicular to a reflecting surface of the membrane. The light source is arranged to provide light to the interferometric arrangement such that a first portion of the light propagates along a first optical path via the interferometric arrangement, and a second portion of the light propagates along a second, different optical path via the interferometric arrangement such that at least one of the first and second portions is reflected by the reflecting surface of the membrane, thereby giving rise to an optical path difference between the first and second optical paths which depends on a distance between the membrane and the optical element. The at least one photo detector is arranged to detect at least part of an interference pattern generated by the first and second portions of light dependent on the optical path difference.
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公开(公告)号：US20240329077A1
公开(公告)日：2024-10-03
申请号：US18624318
申请日：2024-04-02
申请人： SensiBel AS
IPC分类号： G01P15/093 , G01P15/08 , G01P15/13
CPC分类号： G01P15/093 , G01P15/0802 , G01P15/13 , G01P2015/084
摘要： An optical accelerometer including an interferometric arrangement, a light source, a photodetector, a support structure that is static relative to the light source and photo detector, and a dual-layer membrane that is deflectable relative to the support structure. The dual-layer membrane includes first and second membrane layers that are mechanically coupled by a proof mass that is positioned between and attached to or integrally formed with the membrane layers. The interferometric arrangement includes a first optical element which includes or is disposed on a surface of one of the membrane layers and which is moveable relative to a second optical element which includes or is disposed on a surface of the support structure. The second optical element and at least part of the support structure are positioned between the membrane layers. The light source provides light to the interferometric arrangement and the photo detector detects an interference pattern generated by the light that is dependent on a distance between the first and second optical elements.
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公开(公告)号：US20240060768A1
公开(公告)日：2024-02-22
申请号：US18267314
申请日：2021-12-14
申请人： SensiBel AS
发明人： Håkon Sagberg , Matthieu Lacolle
CPC分类号： G01B11/14 , H04R23/008 , H04R29/004
摘要： An optical displacement sensor comprises a reflective surface and one or more diffraction gratings which, together with the reflective surface, each define a respective interferometric arrangement. The reflective surface is moveable relative to the diffraction grating(s) or vice versa. Light from a light source propagates via the interferometric arrangement(s) to produce an interference pattern at a respective set of photo detectors. Each interference pattern depends on the separation between the reflective surface and the respective grating. A collimating optical arrangement at least partially collimates the light between the light source and the diffraction grating(s). For the or each interferometric arrangement, when the reflective surface or the diffraction grating is in a zero-displacement position, the optical path length L of the light propagating between the diffraction grating and the reflective surface satisfies the relationship:
L
=
T
z
n
2
,
to within 20% of
T
z
2
,
where n is an integer; where Tz is the Talbot length, defined by:
T
z
=
λ
1
-
1
-
λ
2
p
2
,
where λ is the wavelength of the light, and where p is the grating period of the respective diffraction grating.-
公开(公告)号：US20220408198A1
公开(公告)日：2022-12-22
申请号：US17775699
申请日：2020-11-11
申请人： SENSIBEL AS
发明人： Håkon Sagberg , Jakob Vennerød
摘要： An optical microphone assembly including a substrate, an interferometric arrangement, a light source, and at least one photo detector. The interferometric arrangement includes a membrane and at least one diffractive optical element spaced from the membrane. The diffractive optical element(s) include a plurality of lines formed in or disposed on a surface of the substrate and arranged in a first pattern. The substrate includes one or more holes extending fully therethrough, the hole(s) arranged in a second pattern that is different from the first pattern. The light source is arranged to provide light to the interferometric arrangement such that first and second portions of the light propagate along respective, different first and second optical paths via the interferometric arrangement. An optical path difference between the first and second optical paths depends on a distance between the membrane and the diffractive optical element(s). The hole(s) are positioned such that at least one of the first and second optical paths at least partly overlaps with the hole(s). The photo detector(s) are arranged to detect at least part of an interference pattern generated by said first and second portions of light dependent on the optical path difference.
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