公开(公告)号：US20240329077A1

公开(公告)日：2024-10-03

申请号：US18624318

申请日：2024-04-02

Applicant: SensiBel AS

Inventor： Sigbjørn Kolberg ,  Matthieu Lacolle ,  Hallvard Angelskår

IPC: G01P15/093 ,  G01P15/08 ,  G01P15/13

CPC classification number: G01P15/093 ,  G01P15/0802 ,  G01P15/13 ,  G01P2015/084

Abstract: An optical accelerometer including an interferometric arrangement, a light source, a photodetector, a support structure that is static relative to the light source and photo detector, and a dual-layer membrane that is deflectable relative to the support structure. The dual-layer membrane includes first and second membrane layers that are mechanically coupled by a proof mass that is positioned between and attached to or integrally formed with the membrane layers. The interferometric arrangement includes a first optical element which includes or is disposed on a surface of one of the membrane layers and which is moveable relative to a second optical element which includes or is disposed on a surface of the support structure. The second optical element and at least part of the support structure are positioned between the membrane layers. The light source provides light to the interferometric arrangement and the photo detector detects an interference pattern generated by the light that is dependent on a distance between the first and second optical elements.