Method For Measuring The Thickness Of Multi-Layer Films
    1.
    发明申请
    Method For Measuring The Thickness Of Multi-Layer Films 审中-公开
    测量多层膜厚度的方法

    公开(公告)号:US20110161036A1

    公开(公告)日:2011-06-30

    申请号:US12986106

    申请日:2011-01-06

    IPC分类号: G06F19/00

    摘要: The invention relates to a method for determining the thickness of multi-layer films (13) comprising layers consisting of various non-conductive materials. According to said method, the thickness of the multi-layer film (13) is measured by a first sensor (17) and a second sensor (16) and optionally additional sensors. The first sensor (17) measures the profile of the total thickness in a short cycle with a duration of approximately 1-2 minutes, but with a large measuring error margin. The second sensor (16) measures the profile of the total thickness with a small measuring error margin but in a long cycle with a duration of approximately 10 to 30 minutes. A correction profile for the first sensor (17) can be calculated by comparing the two thickness profiles. Provided that this correction profile remains constant throughout the long cycle, it can be applied to all thickness profiles of the sensor (17) until a new, more accurate thickness profile is made available by the second sensor, permitting the calculation of a new correction profile.

    摘要翻译: 本发明涉及一种用于确定多层薄膜(13)厚度的方法,该薄膜包括由各种不导电材料组成的层。 根据所述方法,通过第一传感器(17)和第二传感器(16)以及可选地附加的传感器来测量多层膜(13)的厚度。 第一传感器(17)以约1-2分钟的持续时间在短周期内测量总厚度的轮廓,但具有大的测量误差容限。 第二传感器(16)以小的测量误差容限来测量总厚度的轮廓,但以约10至30分钟的持续时间的长周期测量。 可以通过比较两个厚度分布来计算第一传感器(17)的校正曲线。 如果该校正轮廓在整个长周期内保持恒定,则可以将其应用于传感器(17)的所有厚度轮廓,直到由第二传感器使新的更准确的厚度轮廓可用,允许计算新的校正轮廓 。

    Method for Measuring the Thickness of Multi-Layer Films
    2.
    发明申请
    Method for Measuring the Thickness of Multi-Layer Films 审中-公开
    多层膜厚度测定方法

    公开(公告)号:US20100141274A1

    公开(公告)日:2010-06-10

    申请号:US12084175

    申请日:2006-10-02

    IPC分类号: G01B7/02 G01R27/26 G01B11/02

    摘要: The invention relates to a method for determining the thickness of multi-layer films (13) comprising layers consisting of various non-conductive materials. According to said method, the thickness of the multi-layer film (13) is measured by a first sensor (17) and a second sensor (16) and optionally additional sensors, whereby all the sensors take a measurement at the same location under the same conditions if possible. The first sensor (17) and the second (16) or additional sensors generate different measured values for layers of the multi-layer film (13) of the same thickness consisting of the same material (13). The measured signals of the sensors (16, 17) are fed to a computer (18), which determines the total thickness of the multi-layer film (13) and/or the thickness of the individual layers of the multi-layer film (13) from the different measured values of the first sensor (17) and the second (16) or additional sensors.

    摘要翻译: 本发明涉及一种用于确定多层薄膜(13)厚度的方法,该薄膜包括由各种不导电材料组成的层。 根据所述方法,通过第一传感器(17)和第二传感器(16)以及可选地附加的传感器来测量多层膜(13)的厚度,由此所有传感器在同一位置下测量 同样条件如果可能的话。 第一传感器(17)和第二(16)或附加传感器对由相同材料(13)组成的相同厚度的多层膜(13)的层产生不同的测量值。 传感器(16,17)的测量信号被馈送到计算机(18),该计算机确定多层膜(13)的总厚度和/或多层膜的各层的厚度( (17)和第二传感器(16)的不同测量值。

    Method for Measuring the Thickness of Multi-Layer Films
    3.
    发明申请
    Method for Measuring the Thickness of Multi-Layer Films 审中-公开
    多层膜厚度测定方法

    公开(公告)号:US20090306923A1

    公开(公告)日:2009-12-10

    申请号:US12084167

    申请日:2006-10-02

    IPC分类号: G06F19/00

    摘要: The invention relates to a method for determining the thickness of multi-layer films (13) comprising layers consisting of various non-conductive materials. According to said method, the thickness of the multi-layer film (13) is measured by a first sensor (17) and a second sensor (16) and optionally additional sensors. The first sensor (17) measures the profile of the total thickness in a short cycle with a duration of approximately 1-2 minutes, but with a large measuring error margin. The second sensor (16) measures the profile of the total thickness with a small measuring error margin but in a long cycle with a duration of approximately 10 to 30 minutes. A correction profile for the first sensor (17) can be calculated by comparing the two thickness profiles. Provided that this correction profile remains constant throughout the long cycle, it can be applied to all thickness profiles of the sensor (17) until a new, more accurate thickness profile is made available by the second sensor, permitting the calculation of a new correction profile.

    摘要翻译: 本发明涉及一种用于确定多层薄膜(13)厚度的方法,该薄膜包括由各种不导电材料组成的层。 根据所述方法,通过第一传感器(17)和第二传感器(16)以及可选地附加的传感器来测量多层膜(13)的厚度。 第一传感器(17)以约1-2分钟的持续时间在短周期内测量总厚度的轮廓,但具有大的测量误差容限。 第二传感器(16)以小的测量误差容限来测量总厚度的轮廓,但以约10至30分钟的持续时间的长周期测量。 可以通过比较两个厚度分布来计算第一传感器(17)的校正曲线。 如果该校正轮廓在整个长周期内保持恒定,则可以将其应用于传感器(17)的所有厚度轮廓,直到由第二传感器使新的更准确的厚度轮廓可用,允许计算新的校正轮廓 。

    Positioning system with pressure measurement in the layer of air between
the measuring head and the material being measured
    4.
    发明授权
    Positioning system with pressure measurement in the layer of air between the measuring head and the material being measured 失效
    测量头和测量材料之间的空气层中的压力测量定位系统

    公开(公告)号:US6029502A

    公开(公告)日:2000-02-29

    申请号:US832993

    申请日:1997-04-04

    申请人: Peter Stuker

    发明人: Peter Stuker

    IPC分类号: G01B13/00 G01B13/04

    CPC分类号: G01B13/00

    摘要: The object of positioning a measurement probe (5) very close to but not in contact with moving measured material (9) is solved in accordance with the invention in that air is blown through a nozzle in the measurement probe between the probe and the material being measured, and in that the pressure in the flowing medium between the measurement probe and the material being measured is measured, and from this a regulation signal is derived for the spacing. The air cushion which forms between the material being measured and the measurement probe, on the one hand, prevents mutual contact and additionally serves as a medium in the measuring system for the measurement of the spacing.

    摘要翻译: 根据本发明,解决了将测量探针(5)定位成非常接近但不与移动的测量材料(9)接触的目的,因为空气通过探针和材料之间的测量探针中的喷嘴吹送, 并且测量测量探针和被测量材料之间的流动介质中的压力,并且由此得出了间隔的调节信号。 一方面,在测量材料和测量探针之间形成的气垫防止相互接触,并且另外用作用于测量间隔的测量系统中的介质。