公开(公告)号：US07697259B2

公开(公告)日：2010-04-13

申请号：US11295026

申请日：2005-12-05

Applicant: Chian-Chen Chiou ,  Chi-Chien Chang ,  Shun Chih Hsieh ,  Yi Heng Lin ,  Hsiao-Lung Sun ,  Nien-Hua Chang

Inventor： Chian-Chen Chiou ,  Chi-Chien Chang ,  Shun Chih Hsieh ,  Yi Heng Lin ,  Hsiao-Lung Sun ,  Nien-Hua Chang

IPC: H01T23/00

CPC classification number: B62B3/006 ,  H01L21/67359 ,  H01L21/67396 ,  H01L21/67724 ,  H05F3/04

Abstract: A novel vehicle which is suitable for transporting and/or temporarily storing objects such as masks or reticles and is effective in eliminating or preventing electrostatic discharges on the masks, reticles or other objects. The vehicle includes a frame for receiving the objects and at least one ESD eliminator provided on the frame for neutralizing electrostatic charges on the objects. Neutralization of the electrostatic charges prevents electrostatic discharges from damaging microelectronic circuits, for example, on the masks, reticles or other objects.

Abstract translation: 适用于传输和/或临时存储诸如掩模或掩模版的物体的新型载体，并且有效地消除或防止对掩模，掩模版或其它物体的静电放电。 车辆包括用于接收物体的框架和设置在框架上的用于中和物体上的静电电荷的至少一个ESD消除器。 静电电荷的中和可以防止静电放电损坏微电子电路，例如在掩模，掩模版或其他物体上。

公开(公告)号：US20070126322A1

公开(公告)日：2007-06-07

申请号：US11295026

申请日：2005-12-05

Applicant: Chian-Chen Chiou ,  Chi-Chien Chang ,  Shun Hsieh ,  Yi Lin ,  Hsiao-Lung Sun ,  Nien-Hua Chang

Inventor： Chian-Chen Chiou ,  Chi-Chien Chang ,  Shun Hsieh ,  Yi Lin ,  Hsiao-Lung Sun ,  Nien-Hua Chang

IPC: A47B97/00

CPC classification number: B62B3/006 ,  H01L21/67359 ,  H01L21/67396 ,  H01L21/67724 ,  H05F3/04

Abstract: A novel vehicle which is suitable for transporting and/or temporarily storing objects such as masks or reticles and is effective in eliminating or preventing electrostatic discharges on the masks, reticles or other objects. The vehicle includes a frame for receiving the objects and at least one ESD eliminator provided on the frame for neutralizing electrostatic charges on the objects. Neutralization of the electrostatic charges prevents electrostatic discharges from damaging microelectronic circuits, for example, on the masks, reticles or other objects.

Abstract translation: 适用于传输和/或临时存储诸如掩模或掩模版的物体的新型载体，并且有效地消除或防止对掩模，掩模版或其它物体的静电放电。 车辆包括用于接收物体的框架和设置在框架上的用于中和物体上的静电电荷的至少一个ESD消除器。 静电电荷的中和可以防止静电放电损坏微电子电路，例如在掩模，掩模版或其他物体上。