Method for manufacturing surface acoustic wave device
    1.
    发明申请
    Method for manufacturing surface acoustic wave device 有权
    声表面波装置的制造方法

    公开(公告)号:US20060220500A1

    公开(公告)日:2006-10-05

    申请号:US11445586

    申请日:2006-06-01

    IPC分类号: H03H9/25

    摘要: A surface acoustic wave device is disclosed, which comprises a surface acoustic wave element including a lithium tantalate piezoelectric substrate 10 with one principal surface thereof formed with an IDT electrode 11, a connector electrode 12 and a periphery sealing electrode 13, and a base substrate 2 formed with an electrode 21 for connection to the element connected to the connector electrode 12 through a solder bump component 3 and a periphery sealing conductor film 22 joined to the periphery sealing electrode 13 thorough a solder sealing component 4. For the solder bump component 3 and the solder sealing component 4, a Sn—Sb based or Sn—Ag based lead-free solder containing 90% or more Sn is used, and the thermal expansion coefficient of the base substrate 2 is set in the range of 9-20 pm/° C. The joining is accomplished with high stability resisting thermal stress due to a difference in thermal expansion coefficient, so that a surface acoustic wave device that can maintain stable connection for a long duration of time can be provided.

    摘要翻译: 公开了一种弹性表面波器件,它包括一个表面声波元件,它包括其一个主表面形成有IDT电极11的钽酸锂压电基片10,一个连接器电极12和一个周边密封电极13,以及一个基底基片2 形成有用于通过焊料凸块部件3连接到连接到连接器电极12的元件的电极21和通过焊料密封部件4接合到周围密封电极13的周围密封导体膜22。 对于焊料凸块部件3和焊料密封部件4,使用含有90%以上Sn的Sn-Sb系或Sn-Ag系无铅焊料,将基底基板2的热膨胀系数设定在 范围为9-20μm/℃。由于热膨胀系数的差异,能够以高稳定性抵抗热应力实现接合,从而可以提供能够长时间保持稳定连接的表面声波装置 。

    Method for manufacturing surface acoustic wave device
    2.
    发明授权
    Method for manufacturing surface acoustic wave device 有权
    声表面波装置的制造方法

    公开(公告)号:US07513022B2

    公开(公告)日:2009-04-07

    申请号:US11445586

    申请日:2006-06-01

    IPC分类号: H04R17/00

    摘要: A surface acoustic wave device is disclosed, which comprises a surface acoustic wave element including a lithium tantalate piezoelectric substrate 10 with one principal surface thereof formed with an IDT electrode 11, a connector electrode 12 and a periphery sealing electrode 13, and a base substrate 2 formed with an electrode 21 for connection to the element connected to the connector electrode 12 through a solder bump component 3 and a periphery sealing conductor film 22 joined to the periphery sealing electrode 13 thorough a solder sealing component 4. For the solder bump component 3 and the solder sealing component 4, a Sn—Sb based or Sn—Ag based lead-free solder containing 90% or more Sn is used, and the thermal expansion coefficient of the base substrate 2 is set in the range of 9-20 pm/° C. The joining is accomplished with high stability resisting thermal stress due to a difference in thermal expansion coefficient, so that a surface acoustic wave device that can maintain stable connection for a long duration of time can be provided.

    摘要翻译: 公开了一种弹性表面波器件,它包括一个表面声波元件,它包括其一个主表面形成有IDT电极11的钽酸锂压电基片10,一个连接器电极12和一个周边密封电极13,以及一个基底基片2 形成有用于通过焊料凸块部件3连接到连接到连接器电极12的元件的电极21和通过焊接密封部件4接合到周围密封电极13的周围密封导体膜22.对于焊料凸块部件3和 使用焊料密封部件4,含有Sn含量为90%以上的Sn-Sb系或Sn-Ag系无铅焊料,将基底基板2的热膨胀系数设定在9〜20μm/ ℃。由于热膨胀系数的差异,接合实现了高稳定性,抗热应力,从而可以保持稳定的表面声波装置 可以提供长时间的连接。