公开(公告)号：US10353408B2

公开(公告)日：2019-07-16

申请号：US13344387

申请日：2012-01-05

Applicant: Junhua Ding ,  Michael L'Bassi ,  Tseng-Chung Lee

Inventor： Junhua Ding ,  Michael L'Bassi ,  Tseng-Chung Lee

IPC: C23C16/455 ,  G05D7/06 ,  G01F1/72

Abstract: A system for delivering pulses of a desired mass of gas to a tool, comprising: a mass flow controller including flow sensor, a control valve and a dedicated controller configured and arranged to receive a recipe of a sequence of steps for opening and closing the control valve so as to deliver as sequence of gas pulses as a function of the recipe. The mass flow controller is configured and arranged so as to operate in either one of at least two modes: as a traditional mass flow controller (MFC) mode or in a pulse gas delivery (PGD) mode. Further, the dedicated controller is configured and arranged to delivery pulses of gas in accordance with anyone of three different types of pulse gas delivery processes: a time based pulse delivery process, a mole based pulse delivery process and a profile based pulse delivery process.

公开(公告)号：US09471066B2

公开(公告)日：2016-10-18

申请号：US14180063

申请日：2014-02-13

Applicant: Junhua Ding ,  Michael L'Bassi

Inventor： Junhua Ding ,  Michael L'Bassi

IPC: G05D7/06 ,  G01F25/00 ,  G01F1/86 ,  G01F15/00

CPC classification number: G05D7/0635 ,  G01F1/86 ,  G01F15/003 ,  G01F15/005 ,  G01F25/003 ,  Y10T137/0368 ,  Y10T137/7759

Abstract: A mass flow controller comprises: a pressure-based flow meter, a thermal-based flow meter, a control valve, and a system controller. The pressure-based flow meter and thermal-based flow meter each measure flow rate of mass through the mass flow controller. The control valve controls the flow rate in response to a control signal generated as a function of the flow rate as measured by thermal-based flow meter when the measured flow rate is relatively low, and as a function of the flow rate as measured by the pressure-based flow meter when the flow rate is relatively high. A comparison of the flow measurements of the two flow meters can be used to (a) sense pressure disturbances at low flow rates, and (b) sense when the thermal-based flow meter is out of calibration so that a zero offset signal can be applied to the thermal-based flow meter.

Abstract translation: 质量流量控制器包括：基于压力的流量计，基于热量的流量计，控制阀和系统控制器。 基于压力的流量计和热式流量计每个通过质量流量控制器测量质量流量。 控制阀响应于当测量的流量相对较低时根据由热能流量计测量的流量的函数产生的控制信号来控制流量，并且作为根据由流量计测得的流量的函数 压力流量计当流量比较高时。 可以使用两个流量计的流量测量的比较来（a）感测低流量下的压力扰动，和（b）当热基流量计失去校准时感测到零偏移信号可以是 应用于热式流量计。

公开(公告)号：US20140190571A1

公开(公告)日：2014-07-10

申请号：US14209216

申请日：2014-03-13

Applicant: Junhua Ding ,  Michael L'Bassi ,  Tseng-Chung Lee

Inventor： Junhua Ding ,  Michael L'Bassi ,  Tseng-Chung Lee

IPC: G05D7/06

CPC classification number: G05D7/0635 ,  Y10T137/0318 ,  Y10T137/86389

Abstract: A system for delivering pulses of a desired mass of gas to a tool, comprising: a mass flow controller including flow sensor, a control valve and a dedicated controller configured and arranged to receive a recipe of a sequence of steps for opening and closing the control valve so as to deliver as sequence of gas pulses as a function of the recipe. The mass flow controller is configured and arranged so as to operate in either one of at least two modes: as a traditional mass flow controller (MFC) mode or in a pulse gas delivery (PGD) mode. Further, the mass flow controller includes an input configured to receive an input signal; an output configured to provide an output signal; a communication port configured to receive program instructions; memory configured and arranged to receive programming data determining the programmed configuration of the mass flow controller as either a digital or analog configuration; and a processor/controller for operating the mass flow controller in accordance with the programmed configuration.

Abstract translation: 一种用于将期望质量的气体脉冲输送到工具的系统，包括：质量流量控制器，包括流量传感器，控制阀和专用控制器，其被配置和布置成接收用于打开和关闭控制的一系列步骤的配方 阀门，以作为配方的函数输送气体脉冲序列。 质量流量控制器被配置和布置成以至少两种模式中的任一种操作：作为传统质量流量控制器（MFC）模式或脉冲气体输送（PGD）模式。 此外，质量流量控制器包括被配置为接收输入信号的输入; 被配置为提供输出信号的输出; 通信端口，被配置为接收程序指令; 存储器被配置和布置成接收将质量流量控制器的编程配置确定为数字或模拟配置的编程数据; 以及用于根据编程配置操作质量流量控制器的处理器/控制器。

公开(公告)号：US07467027B2

公开(公告)日：2008-12-16

申请号：US11340260

申请日：2006-01-26

Applicant: Junhua Ding ,  Michael L'Bassi ,  Kaveh H. Zarkar

Inventor： Junhua Ding ,  Michael L'Bassi ,  Kaveh H. Zarkar

IPC: F17D3/00 ,  G05D7/00

CPC classification number: G05D7/0635

Abstract: A thermal mass flow controller for controlling flow rate of a fluid includes a conduit configured to receive the fluid, a pressure sensor that measures the pressure of the fluid as the fluid flows within the conduit, a temperature sensor that measures the ambient temperature of the fluid, and a thermal sensor that generates an output representative of the flow rate of the fluid. The thermal mass flow controller further includes a control system configured to monitor the output from the thermal sensor, the pressure measured by the pressure sensor, and the ambient temperature measured by the temperature sensor, to regulate flow of the fluid within the conduit so as to compensate for a shift in the thermal sensor output caused by thermal siphoning.

Abstract translation: 用于控制流体流速的热质量流量控制器包括构造成接收流体的导管，当流体在导管内流动时测量流体的压力的压力传感器，测量流体的环境温度的温度传感器 ，以及产生表示流体流量的输出的热传感器。 热质量流量控制器还包括控制系统，其被配置为监测来自热传感器的输出，由压力传感器测量的压力和由温度传感器测量的环境温度，以调节管道内的流体的流动，从而 补偿由热虹吸引起的热传感器输出的偏移。

公开(公告)号：US07706925B2

公开(公告)日：2010-04-27

申请号：US11651908

申请日：2007-01-10

Applicant: Junhua Ding ,  Michael L'Bassi ,  Kaveh H. Zarkar ,  William R. Clark

Inventor： Junhua Ding ,  Michael L'Bassi ,  Kaveh H. Zarkar ,  William R. Clark

IPC: G05D7/00 ,  G05D9/00 ,  G01F7/00

CPC classification number: G05D11/132 ,  G05D16/2046

Abstract: An integrated pressure and flow ratio control system includes N mass flow controllers MFCi (i=1, . . . , N) that each control the flow rate of a fluid Fi (i=1, . . . , N) flowing into a processing chamber. These N mass flow controllers are linked together by a digital communication network. One of the mass flow controllers is a master MFC, and the remaining N−1 MFCs are slave MFCs. The master MFC receives a pressure set point and a plurality N of flow ratio set points from a host controller, and communicates these set points to all the slave MFCs. In this way, the pressure in the chamber is maintained at the pressure set point and the flow ratios Qi/QT are maintained at the flow ratio set points, where Qi is flow rate of the i-th fluid Fi, and QT=Q1+Q2+ . . . QN is the sum of all N flow rates.

Abstract translation: 集成的压力和流量比控制系统包括N个质量流量控制器MFCi（i = 1，...，N），每个控制器控制流入处理中的流体Fi（i = 1，...，N）的流量 房间。 这些N个质量流量控制器通过数字通信网络连接在一起。 质量流量控制器之一是主MFC，其余的N-1 MFC是从MFC。 主MFC从主机控制器接收压力设定点和多个N个流量设定点，并将这些设定点传送到所有从MFC。 以这种方式，室内的压力保持在压力设定点，并且流量比Q i / Q T保持在流量比设定点，其中Qi是第i个流体Fi的流量，QT = Q1 + Q2 +。 。 。 QN是所有N个流量的总和。

公开(公告)号：US20070240778A1

公开(公告)日：2007-10-18

申请号：US11279786

申请日：2006-04-14

Applicant: Michael L'Bassi ,  Junhua Ding ,  David D'Entremont

Inventor： Michael L'Bassi ,  Junhua Ding ,  David D'Entremont

IPC: F16K11/22

CPC classification number: G05D7/0664 ,  Y10T137/87877 ,  Y10T137/87885

Abstract: A system for dividing a single mass flow into a plurality N of secondary flows includes an inlet configured to receive the single mass flow, a master FRC (flow ratio controller), and one or more slave FRCs. Each FRC is connected to the inlet and including at least one flow channel. The master FRC and the slave FRCs include in combination a total of N flow channels. Each flow channel i (i=1, . . . , N) is connected to carry a corresponding one of the N secondary flows. In response to preselected ratio setpoints received from a host controller, the master FRC and the slave FRCs maintain ratios Qi/QT (i=1, . . . , N) between individual flow rates Qi (i=1, . . . , N) and a total flow rate QT at the preselected ratio set points.

Abstract translation: 用于将单个质量流分成多个N个次流的系统包括构造成接收单个质量流的入口，主FRC（流量比控制器）和一个或多个从动FRC。 每个FRC连接到入口并且包括至少一个流动通道。 主FRC和从站FRC共包括N个流量通道。 每个流道i（i = 1，...，N）被连接以携带N个次流中的相应一个。 响应于从主机控制器接收到的预选比率设定点，主FRC和从FRC保持比例Q i（i = 1，...，N ）（i = 1，...，N）和预选比率设定点处的总流量Q T SUB之间。

公开(公告)号：US08997791B2

公开(公告)日：2015-04-07

申请号：US11279786

申请日：2006-04-14

Applicant: Michael L'Bassi ,  Junhua Ding ,  David D'Entremont

Inventor： Michael L'Bassi ,  Junhua Ding ,  David D'Entremont

IPC: F16K11/20 ,  G05D7/06

CPC classification number: G05D7/0664 ,  Y10T137/87877 ,  Y10T137/87885

Abstract: A system for dividing a single mass flow into a plurality N of secondary flows includes an inlet configured to receive the single mass flow, a master FRC (flow ratio controller), and one or more slave FRCs. Each FRC is connected to the inlet and including at least one flow channel. The master FRC and the slave FRCs include in combination a total of N flow channels. Each flow channel i (i=1, . . . , N) is connected to carry a corresponding one of the N secondary flows. In response to preselected ratio setpoints received from a host controller, the master FRC and the slave FRCs maintain ratios Qi/QT (i=1, . . . , N) between individual flow rates Qi (i=1, . . . , N) and a total flow rate QT at the preselected ratio set points.

Abstract translation: 用于将单个质量流分成多个N个次流的系统包括构造成接收单个质量流的入口，主FRC（流量比控制器）和一个或多个从动FRC。 每个FRC连接到入口并且包括至少一个流动通道。 主FRC和从站FRC共包括N个流量通道。 每个流道i（i = 1，...，N）被连接以携带N个次流中的相应一个。 响应于从主控制器接收到的预选比率设定点，主FRC和从FRC保持单独流量之间的比率Qi / QT（i = 1，...，N）Qi（i = 1，...，N ）和预选比率设定点的总流量QT。

公开(公告)号：US20140158211A1

公开(公告)日：2014-06-12

申请号：US14180063

申请日：2014-02-13

Applicant: Junhua Ding ,  Michael L'Bassi

Inventor： Junhua Ding ,  Michael L'Bassi

IPC: G05D7/06

CPC classification number: G05D7/0635 ,  G01F1/86 ,  G01F15/003 ,  G01F15/005 ,  G01F25/003 ,  Y10T137/0368 ,  Y10T137/7759

Abstract: A mass flow controller comprises: a pressure-based flow meter, a thermal-based flow meter, a control valve, and a system controller. The pressure-based flow meter and thermal-based flow meter each measure flow rate of mass through the mass flow controller. The control valve controls the flow rate in response to a control signal generated as a function of the flow rate as measured by thermal-based flow meter when the measured flow rate is relatively low, and as a function of the flow rate as measured by the pressure-based flow meter when the flow rate is relatively high. A comparison of the flow measurements of the two flow meters can be used to (a) sense pressure disturbances at low flow rates, and (b) sense when the thermal-based flow meter is out of calibration so that a zero offset signal can be applied to the thermal-based flow meter.

Abstract translation: 质量流量控制器包括：基于压力的流量计，基于热量的流量计，控制阀和系统控制器。 基于压力的流量计和热式流量计每个通过质量流量控制器测量质量流量。 控制阀响应于当测量的流量相对较低时根据由热能流量计测量的流量的函数产生的控制信号来控制流量，并且作为根据由流量计测得的流量的函数 压力流量计当流量比较高时。 可以使用两个流量计的流量测量的比较来（a）感测低流量下的压力扰动，和（b）当热基流量计失去校准时感测到零偏移信号可以是 应用于热式流量计。

公开(公告)号：US20080167748A1

公开(公告)日：2008-07-10

申请号：US11651908

申请日：2007-01-10

Applicant: Junhua Ding ,  Michael L'Bassi ,  Kaveh H. Zarkar ,  William R. Clark

Inventor： Junhua Ding ,  Michael L'Bassi ,  Kaveh H. Zarkar ,  William R. Clark

IPC: G06F19/00

CPC classification number: G05D11/132 ,  G05D16/2046

Abstract: An integrated pressure and flow ratio control system includes N mass flow controllers MFCi (i=1, . . . , N) that each control the flow rate of a fluid Fi (i=1, . . . , N) flowing into a processing chamber. These N mass flow controllers are linked together by a digital communication network. One of the mass flow controllers is a master MFC, and the remaining N-1 MFCs are slave MFCs. The master MFC receives a pressure set point and a plurality N of flow ratio set points from a host controller, and communicates these set points to all the slave MFCs. In this way, the pressure in the chamber is maintained at the pressure set point and the flow ratios Qi/QT are maintained at the flow ratio set points, where Qi is flow rate of the i-th fluid Fi, and QT=Q1+Q2+ . . . QN is the sum of all N flow rates.

Abstract translation: 集成的压力和流量比控制系统包括N个质量流量控制器MIP（i = 1，...，N），每个控制器控制流体F i i的流量 （i = 1，...，N）流入处理室。 这些N个质量流量控制器通过数字通信网络连接在一起。 质量流量控制器之一是主MFC，其余的N-1 MFC是从MFC。 主MFC从主机控制器接收压力设定点和多个N个流量设定点，并将这些设定点传送到所有从MFC。 以这种方式，室中的压力保持在压力设定点，并且流量比Q 1 / Q T T T保持在流量比设定点，其中Q 第i个流体F i i的流速，Q 3 = Q 1 + Q 2， SUB> 2 +。 。 。 Q N N是所有N个流速的总和。

公开(公告)号：US07000465B1

公开(公告)日：2006-02-21

申请号：US10943377

申请日：2004-09-17

Applicant: Michael L'Bassi ,  Mark J. Quaratiello ,  Ronald H. Bouley

Inventor： Michael L'Bassi ,  Mark J. Quaratiello ,  Ronald H. Bouley

IPC: G01F1/68

CPC classification number: G01F1/6965 ,  G01F1/6847 ,  G05D7/0635

Abstract: A system for and method of compensating for attitude sensitivity of at least two thermal sensor coils mounted on a tube through which a fluid flows along a common axis of flow for use in generating a flow measurement signal representative of the flow of fluid through the tube is disclosed. One of the coils is adapted in provide thermal energy to the fluid flowing through the tube at an upstream location so as to establish and measure the upstream temperature of the fluid at the upstream location, and one of the coils is adapted to measure the downstream temperature of the fluid at a downstream location. The flow measurement signal is a function of the difference between the measured upstream and downstream temperatures. The system includes structure for, and the method includes the steps of measuring the force of gravity in the direction of the common axis; and modifying the flow measurement signal as a function of the measured force of gravity.

Abstract translation: 用于补偿安装在管上的至少两个热传感器线圈的姿态灵敏度的系统和方法，流体沿着公共轴流动流动，用于产生代表通过管的流体流动的流量测量信号， 披露 线圈中的一个适于向在上游位置处流过管的流体提供热能，以便建立和测量在上游位置处的流体的上游温度，并且一个线圈适于测量下游温度 的流体在下游位置。 流量测量信号是测量的上游和下游温度之差的函数。 该系统包括结构，该方法包括测量沿公共轴方向的重力的步骤; 以及根据所测量的重力来修改流量测量信号。