COMPOSITE MECHANICAL TRANSDUCERS AND APPROACHES THEREFOR
    2.
    发明申请
    COMPOSITE MECHANICAL TRANSDUCERS AND APPROACHES THEREFOR 有权
    复合机械传感器及其应用

    公开(公告)号:US20080204173A1

    公开(公告)日:2008-08-28

    申请号:US12017228

    申请日:2008-01-21

    Abstract: Mechanical transducers such as pressure sensors, resonators or other frequency-reference devices are implemented under conditions characterized by different temperatures. According to an example embodiment of the present invention, a combination of materials is implemented for mechanical transducer applications to mitigate temperature-related changes at or near a selected turnover temperature. In one application, a material property mismatch is used to facilitate single-anchor transducer applications, such as for resonators. Another application is directed to a Silicon-Silicon dioxide combination of materials.

    Abstract translation: 诸如压力传感器,谐振器或其他频率参考装置之类的机械传感器在不同温度的特征的条件下实现。 根据本发明的示例性实施例,为机械传感器应用实施材料的组合以减轻或接近所选周转温度的温度相关变化。 在一个应用中,材料性质失配用于促进单锚传感器应用,例如用于谐振器。 另一种应用是针对硅 - 二氧化硅的材料组合。

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