摘要:
[Problem] To provide a surface inspection apparatus able to suitably inspect the outer circumference edge part of a semiconductor wafer or other plate-shaped member.[Technical Solution] A semiconductor wafer inspection apparatus 10 has a camera lens 22 arranged facing an outer circumference edge part 101 of a semiconductor wafer 100, an imaging surface 24 arranged facing an outer circumference end face of a semiconductor wafer 100 via the camera lens 22, a mirror 12 forming an image of a first outer circumference bevel surface 101b of the semiconductor wafer 100 on the imaging surface 24 via the camera lens 22, a mirror 14 forming an image of a second outer circumference bevel surface 101c of the semiconductor wafer 100 on the imaging surface 24 via the camera lens 22, a correction lens 26 forming an image of an outer circumference end face 101a of the semiconductor wafer 100 on the imaging surface 24 via the center part of the camera lens 22, and an illumination light guide lamp part 18 illuminating surfaces so that, compared with the outer circumference end face 101a, the first outer circumference bevel surface 101b and second outer circumference bevel surface 101c become brighter.
摘要:
As an assembly 50 of articles of management targets, a serial number that becomes a consecutive number is recorded in each of RFID tags 1, 2, . . . , 12 attended to cardboard boxes 31, 32, . . . , 42 in which articles are stored and a flag, by which the total number of articles that becomes a management target of articles can be calculated, is recorded in at least one of RFID tags. For example, the serial numbers are consecutive numbers starting from one, and the total number of articles is recorded in the flags of all of the RFID tags, or an end flag indicating the last is recorded in the flag of the last RFID tag. The serial numbers are consecutive numbers starting an arbitrary number, a start flag indicating the first is recorded in the flag of the first RFID tag and an end flag indicating the last is recorded in the flag of the last RFID tag, or the total number is recorded in the flag of the last RFID tag.
摘要:
A bipolar type of semiconductor integrated circuit device is provided with U-shaped grooves which are formed by cutting a main surface of a semiconductor body to form isolation regions between bipolar transistors. A silicon oxide film can be formed in the U-shaped grooves by thermal oxidation simultaneously with the formation of a silicon oxide film used to form isolation regions between each collector contact region and base region. No separate step is needed for forming the silicon oxide film between the collector contact region and the base region. The thickness of the silicon oxide film can be controlled, and has a sufficient thickness even at its two edges, i.e., at its boundaries with the U-shaped grooves, so that the bipolar transistors exhibit good electrical characteristics. Namely, the collector resistance thereof does not increase, and the breakdown voltage at the pn junction between the collector region and the base region does not decrease. The U-shaped grooves can each comprise narrow and deep sub-grooves, with thick oxide films formed on the surfaces of the sub-grooves and a thick oxide film formed on a surface of an area between the sub-grooves, and with wiring formed on the oxide on the area between the sub-grooves.
摘要:
Process for preparing 2-alkyl-5-haloacetylbenzenesulfonamide represented by the general formula (1), ##STR1## (wherein R.sup.1 is an alkyl group having 1 to 5 carbon atoms; and X is a chlorine atom, bromine atom or iodine atom), characterized by halogenating a 5-acetyl-2-alkylbenzenesulfonamide represented by the general formula (2), ##STR2## (wherein R.sup.1 is the same as defined above) in a lower alcohol represented by the general formula (3),R.sup.4 --OH(wherein R.sup.4 is an alkyl group having 1 to 5 carbon atoms).
摘要:
A signal electrode drive circuit for driving a liquid crystal display panel includes a latch circuit for latching a digitized video signal, a buffer, a graduation signal-forming circuit, an intensity modulation pulse-generating circuit, and an analog multiplexer. The latch circuit holds the video data only once during one horizontal scanning period until a next latch pulse M is generated, thus considerably reducing current dissipation.
摘要:
Novel compounds, 4-tert.-butyl-1,2-benzenedithiol and bis(4-tert.-butyl-1,2-dithiophenolate) metal complexes having the general formula of ##STR1## wherein M represents a trivalent transition metal, and A represents a quarternary ammonium are provided.The novel benzenedithiol is produced by reacting 4-tert.-butylbenzenethiol or di(4-tert.-butylphenyl)disulfide with sulfur monochloride in the presence of iodine or a Lewis acid in a solvent, and then reducing the resultant product with a metal selected from the group consisting of zinc, tin, iron and aluminum in the presence of an acid.The novel Cu, Co and Ni complexes are produced by reacting the benzenedithiol with a salt of the corresponding divalent transition metal in the presence of an alkoxide metal or a hydride metal and a quarternary ammonium salt in a solvent under an oxidative atmosphere.The complexes strongly absorb rays in the region of ultraviolet, visible or near infrared, and are useful intermediates for the production of optical information recording media.
摘要:
A process for producing p-hydroxybenzaldehyde through p-aminobenzaldehyde from p-nitrotoluene, comprising reacting p-nitrotoluene with sodium polysulphide in an alcohol-alkali aqueous solution mixed solvent in the presence or absence of an aprotic polar compound to produce p-aminobenzaldehyde, diazotizing the p-aminobenzaldehyde and then hydrolyzing the diazotized p-aminobenzaldehyde to produce p-hydroxybenzaldehyde.
摘要:
A sealing device is provided for use in a butterfly valve, ball valve or the like wherein a seal ring is provided which forms a seal in co-operation with a rotating valve member, in which the seal is held in position by an annular pressure member which is impelled towards the body of the valve by springs, and whose inner periphery is adapted to form an emergency seal in co-operation with the valve member, should the seal itself be damaged or destroyed by fire.
摘要:
A process for producing p-hydroxybenzaldehyde through p-aminobenzaldehyde from p-nitrotoluene, comprising reacting p-nitrotoluene with sodium polysulphide in an alcohol-alkali aqueous solution mixed solvent in the presence or absence of an aprotic polar compound to produce p-aminobenzaldehyde, diazotizing the p-aminobenzaldehyde and then hydrolyzing the diazotized p-aminobenzaldehyde to produce p-hydroxybenzaldehyde.
摘要:
A semiconductor wafer inspection apparatus for inspecting an outer circumference edge part of a semiconductor wafer. The apparatus has a camera lens arranged facing an outer circumference edge part of a semiconductor wafer, an imaging surface arranged facing an outer circumference end face of a semiconductor wafer via the camera lens, a mirror forming an image of a first outer circumference bevel surface of the semiconductor wafer on the imaging surface via the camera lens, a mirror forming an image of a second outer circumference bevel surface of the semiconductor wafer on the imaging surface via the camera lens, a correction lens forming an image of an outer circumference end face of the semiconductor wafer on the imaging surface via the center part of the camera lens, and an illumination light guide lamp part illuminating the surfaces. With use of the apparatus the first outer circumference bevel surface and second outer circumference bevel surface become brighter compared with the outer circumference end face.