公开(公告)号：US07185310B2

公开(公告)日：2007-02-27

申请号：US10823981

申请日：2004-04-14

Applicant: Robin Lynn Almes ,  Mark Anthony Church ,  Mary Kathyrn Gutberlet ,  Jiunn Tsay ,  Benjamin Lu Chen Wang

Inventor： Robin Lynn Almes ,  Mark Anthony Church ,  Mary Kathyrn Gutberlet ,  Jiunn Tsay ,  Benjamin Lu Chen Wang

IPC: G06F17/50

CPC classification number: G11B5/3903 ,  G03F1/78 ,  G11B5/3163

Abstract: A charge-balanced, continuous-write mask and wafer process changes the magneto resistive photo-definition step to a two-mask step operation. Critical images are written on one mask layer at a very small electron beam spot size, and non-critical images are written on a second mask layer at a relatively larger electron beam spot size. Both mask layers are put onto the same glass substrate where the critical mask layer is located at the most accurate position on the substrate. The non-critical images may be placed in a peripheral field. In wafer processing, the critical field is aligned and exposed onto the wafer and then the non-critical field is aligned and exposed.

Abstract translation: 电荷平衡，连续写入掩模和晶片处理将磁阻照相分辨步骤改变为双掩模步骤操作。 临界图像以非常小的电子束斑尺寸写在一个掩模层上，并且非相关图像以相对较大的电子束斑尺寸写在第二掩模层上。 将两个掩模层放置在相同的玻璃基板上，其中临界掩模层位于基板上最精确的位置。 非关键图像可以被放置在外围场中。 在晶片处理中，临界场对准并暴露在晶片上，然后非关键场对准和暴露。

公开(公告)号：US06174218B1

公开(公告)日：2001-01-16

申请号：US09295696

申请日：1999-04-21

Applicant: Mark Anthony Church ,  Alain M. Desouches ,  Christopher Arcona ,  George M. Moorefield, II

Inventor： Mark Anthony Church ,  Alain M. Desouches ,  Christopher Arcona ,  George M. Moorefield, II

IPC: B24B4900

CPC classification number: G11B5/39 ,  B24B37/048 ,  B24B49/00 ,  G11B5/1871 ,  G11B5/3103 ,  G11B5/3173

Abstract: A method and apparatus for controlling the amount of row distortion before and dynamically during the lapping process used to manufacture sliders for magnetic storage devices. A wafer quadrant of slider rows is bonded to an extender tool held in a carrier assembly and an actuator is used to laterally apply force to the extender tool such that it changes the profile of the wafer quadrant, and thus the foremost slider row. Multiple arms may be defined in the extender tool, permitting independent engagement with and application of the lateral force by the actuator. Bending moments in each arm are then efficiently and controllably transferred into a beam in the extender tool which is proximate to the point where the wafer quadrant is bonded.

Abstract translation: 一种用于在用于制造磁存储装置的滑块的研磨过程之前和动态地控制行失真量的方法和装置。 滑块列的晶片象限被结合到保持在载体组件中的延伸器工具上，并且致动器用于向延伸器工具横向施加力，使得其改变晶片象限的轮廓，并因此改变最前面的滑块排。 可以在扩展器工具中限定多个臂，从而允许与致动器的侧向力的独立接合和施加。 然后将每个臂中的弯曲力矩有效地和可控制地转移到靠近晶片象限结合的点的扩展器工具中的梁中。

公开(公告)号：US6134080A

公开(公告)日：2000-10-17

申请号：US138307

申请日：1998-08-21

Applicant: Mike Yu Chieh Chang ,  Mark Anthony Church

Inventor： Mike Yu Chieh Chang ,  Mark Anthony Church

IPC: G11B5/31 ,  G11B5/39

CPC classification number: B82Y10/00 ,  G11B5/3116 ,  G11B5/3133 ,  G11B5/3166 ,  G11B5/3967 ,  Y10T29/49037 ,  Y10T29/49043 ,  Y10T29/49044

Abstract: A strip of baked photoresist is employed for defining the zero throat height (ZTH) of a write head portion of a merged head. The zero throat height is the location where first and second pole pieces of the write head first commence to separate after an air bearing surface (ABS) of the write head for reducing flux leakage therebetween. A read head portion of the merged head includes a read sensor that has a recessed edge. The recessed edge defines a stripe height of the read head. The stripe height, which is the distance between the ABS and the recessed edge, establishes the magnetics of the read head. The present invention more accurately positions the ZTH with improved predictability relative to the stripe height since there is minimal shrinkage of the photoresist strip during a baking step. Further the photoresist strip has a desirable apex angle at its front ZTH defining edge for minimizing flux leakage between the pole pieces.

Abstract translation: 使用烘烤光致抗蚀剂条来限定合并头部的写头部分的零喉部高度（ZTH）。 零喉部高度是写头的第一和第二极片首先开始在写入头的空气轴承表面（ABS）之后分离的位置，以减少它们之间的磁通泄漏。 合并头的读头部分包括具有凹入边缘的读取传感器。 凹入边缘限定读头的条带高度。 条纹高度，即ABS和凹入边缘之间的距离，建立读头的磁性。 由于在烘烤步骤期间光致抗蚀剂条的收缩最小，本发明可以更精确地将ZTH定位成具有相对于条带高度的可预测性。 此外，光致抗蚀剂条在其前ZTH限定边缘处具有期望的顶角，以最小化极片之间的漏磁。

公开(公告)号：US5987725A

公开(公告)日：1999-11-23

申请号：US918323

申请日：1997-08-26

Applicant: Mark Anthony Church ,  John C. Major ,  Bruno Alejandro Valdes

Inventor： Mark Anthony Church ,  John C. Major ,  Bruno Alejandro Valdes

IPC: G11B5/31 ,  G11B5/48 ,  B23Q17/00 ,  B23P17/00

CPC classification number: G11B5/3103 ,  G11B5/3163 ,  G11B5/4806 ,  Y10T29/49041 ,  Y10T29/49771 ,  Y10T29/49778 ,  Y10T29/49798

Abstract: An apparatus, method, and article of manufacture to separate a slider from a slider row in which it was manufactured. The apparatus comprises an articulating robot including a stage which may be moved in X-Y coordinate directions and an articulating arm that may be used to place rows of sliders on the stage. The articulating arm incorporates a rotating effectuator unit mounted at the end of the arm, the effectuator being used to pick up individual slider rows, the tray in which they sit when first introduced to the robot, or any other item that needs to be positioned during the alignment of the rows. The apparatus includes sensors and a processing unit that may be used to detect and determine dimensional characteristics of an ABS surface of a slider integral to the row. The apparatus may also include a parting device for separating the slider from the row. In performing the method, a slider row is positioned on the stage in a manner that allows the ABS surface of a slider to be sensed by the sensors. Using the sensed data, the processing unit determines the location of the centroid of the ABS surface for the slider. The processing unit uses the centroid location of the ABS surface in establishing a parting position for parting the slider from the row.

Abstract translation: 一种用于将滑块与其制造的滑块排分离的装置，方法和制品。 该装置包括一个铰接式机器人，其包括可以在X-Y坐标方向上移动的平台和可用于将行滑块放置在平台上的铰接臂。 铰接臂包括安装在臂的端部的旋转实验器单元，该实验器用于拾取单独的滑块行，当第一次引入机器人时，它们坐在其中的托盘或需要在其中定位的任何其它物品 行的对齐。 该装置包括传感器和处理单元，该处理单元可用于检测并确定与该行积分的滑块的ABS表面的尺寸特性。 该装置还可以包括用于将滑块与行分开的分离装置。 在执行该方法时，滑块行以允许滑块的ABS表面被传感器感测的方式定位在平台上。 使用感测数据，处理单元确定滑块的ABS表面的质心的位置。 处理单元使用ABS表面的重心位置来建立分离位置，以便从该行分离滑块。

公开(公告)号：US06346029B1

公开(公告)日：2002-02-12

申请号：US09712024

申请日：2000-11-13

Applicant: Mark Anthony Church ,  Alain M. Desouches ,  Christopher Arcona ,  George M. Moorefield, II

Inventor： Mark Anthony Church ,  Alain M. Desouches ,  Christopher Arcona ,  George M. Moorefield, II

IPC: B24B100

CPC classification number: G11B5/39 ,  B24B37/048 ,  B24B49/00 ,  G11B5/1871 ,  G11B5/3103 ,  G11B5/3173

Abstract: A method and apparatus for controlling the amount of row distortion before and dynamically during the lapping process used to manufacture sliders for magnetic storage devices. A wafer quadrant of slider rows is bonded to an extender tool held in a carrier assembly and an actuator is used to laterally apply force to the extender tool such that it changes the profile of the wafer quadrant, and thus the foremost slider row. Multiple arms may be defined in the extender tool, permitting independent engagement with and application of the lateral force by the actuator. Bending moments in each arm are then efficiently and controllably transferred into a beam in the extender tool which is proximate to the point where the wafer quadrant is bonded.

Abstract translation: 一种用于在用于制造磁存储装置的滑块的研磨过程之前和动态地控制行失真量的方法和装置。 滑块列的晶片象限被结合到保持在载体组件中的延伸器工具上，并且致动器用于向延伸器工具横向施加力，使得其改变晶片象限的轮廓，并因此改变最前面的滑块排。 可以在扩展器工具中限定多个臂，从而允许与致动器的侧向力的独立接合和施加。 然后将每个臂中的弯曲力矩有效地和可控制地转移到靠近晶片象限结合的点的扩展器工具中的梁中。

公开(公告)号：US06588091B1

公开(公告)日：2003-07-08

申请号：US09616665

申请日：2000-07-14

Applicant: Mike Yu Chieh Chang ,  Mark Anthony Church

Inventor： Mike Yu Chieh Chang ,  Mark Anthony Church

IPC: G11B5127

CPC classification number: B82Y10/00 ,  G11B5/3116 ,  G11B5/3133 ,  G11B5/3166 ,  G11B5/3967 ,  Y10T29/49037 ,  Y10T29/49043 ,  Y10T29/49044

Abstract: A method makes a magnetic head having a top and a bottom, front and rear ends and an air bearing surface (ABS) at the front end, comprising the steps of forming first and second pole piece layers with the first and second pole piece layers separated by a write gap layer at the ABS and connected at a back gap that is recessed rearwardly in the head from the ABS; forming a zero throat height (ZTH) defining layer of baked photoresist that is sandwiched between the first and second pole piece layers with the ZTH defining layer having a rounded front edge where the first and second pole piece layers first separate from one another after the ABS to define the ZTH; and forming an insulation stack with a coil layer embedded therein between the first and second pole piece layers with the insulation stack placed so that the ZTH defining layer is located entirely between the ABS and the coil layer.

Abstract translation: 一种方法使得在前端具有顶部和底部，前后端和空气轴承表面（ABS）的磁头包括以下步骤：形成第一和第二极片层，第一和第二极片层分离 通过在ABS处的写间隙层并且在从ABS处向后凹入头部的后间隙处连接; 形成限定了烘烤光致抗蚀剂层的零喉高度（ZTH），其被夹在第一和第二极片层之间，其中ZTH限定层具有圆形的前边缘，其中第一和第二极片层首先在ABS之后彼此分离 定义ZTH; 并且在所述第一和第二极靴层之间形成具有嵌入其中的线圈层的绝缘叠层，其中所述绝缘堆叠被放置成使得所述ZTH限定层完全位于所述ABS和所述线圈层之间。