公开(公告)号：US20120112062A1

公开(公告)日：2012-05-10

申请号：US12942201

申请日：2010-11-09

Applicant: Libor Novak ,  Marek Uncovsky ,  Milos Toth ,  Martin Cafourek ,  William Parker ,  Marcus Straw ,  Mark Emerson

Inventor： Libor Novak ,  Marek Uncovsky ,  Milos Toth ,  Martin Cafourek ,  William Parker ,  Marcus Straw ,  Mark Emerson

IPC: G01N23/22 ,  G21K5/04

CPC classification number: H01J37/20 ,  H01J37/18 ,  H01J37/244 ,  H01J2237/024 ,  H01J2237/2001 ,  H01J2237/2003 ,  H01J2237/2445

Abstract: An environmental cell for a charged particle beam system allows relative motion between the cell mounted on an X-Y stage and the optical axis of the focusing column, thereby eliminating the need for a sub-stage within the cell. A flexible cell configuration, such as a retractable lid, permits a variety of processes, including beam-induced and thermally-induced processes. Photon yield spectroscopy performed in a charged particle beam system and using gas cascade amplification of the photoelectrons allows analysis of material in the cell and monitoring of processing in the cell. Luminescence analysis can be also performed using a retractable minor.

Abstract translation: 用于带电粒子束系统的环境单元允许安装在X-Y平台上的单元和聚焦列的光轴之间的相对运动，从而消除对单元内的子级的需要。 诸如可伸缩盖的柔性电池构造允许多种工艺，包括光束诱导和热诱导工艺。 在带电粒子束系统中进行的光子产率光谱和使用光电子的气体级联放大允许分析细胞中的材料并监测细胞中的处理。 也可以使用可伸缩的未成年人进行发光分析。

公开(公告)号：US09679741B2

公开(公告)日：2017-06-13

申请号：US12942201

申请日：2010-11-09

Applicant: Libor Novak ,  Marek Uncovsky ,  Milos Toth ,  Martin Cafourek ,  William Parker ,  Marcus Straw ,  Mark Emerson

Inventor： Libor Novak ,  Marek Uncovsky ,  Milos Toth ,  Martin Cafourek ,  William Parker ,  Marcus Straw ,  Mark Emerson

IPC: G01N23/00 ,  H01J37/20 ,  H01J37/18 ,  H01J37/244

CPC classification number: H01J37/20 ,  H01J37/18 ,  H01J37/244 ,  H01J2237/024 ,  H01J2237/2001 ,  H01J2237/2003 ,  H01J2237/2445

Abstract: An environmental cell for a charged particle beam system allows relative motion between the cell mounted on an X-Y stage and the optical axis of the focusing column, thereby eliminating the need for a sub-stage within the cell. A flexible cell configuration, such as a retractable lid, permits a variety of processes, including beam-induced and thermally-induced processes. Photoelectron yield spectroscopy performed in a charged particle beam system and using gas cascade amplification of the photoelectrons allows analysis of material in the cell and monitoring of processing in the cell. Luminescence analysis can be also performed using a retractable mirror.