公开(公告)号：US20090141583A1

公开(公告)日：2009-06-04

申请号：US12323994

申请日：2008-11-26

申请人： Norbert Fanjat ,  Karl J. Urquhart ,  Axel Soulet ,  Laurent Langellier

发明人： Norbert Fanjat ,  Karl J. Urquhart ,  Axel Soulet ,  Laurent Langellier

IPC分类号： B01F15/04

CPC分类号： G05D11/133 ,  F04C2220/10 ,  F04C2220/30 ,  G05D11/138 ,  H01L21/67017 ,  H01L21/6715 ,  H01L21/67253

摘要： In one embodiment, a method of controlling fluids in a semiconductor processing system includes mixing two or more chemical compounds in a blender to produce a solution and supplying the solution to a reclaim tank, where the solution is dispense to a process station. The solution can be monitored at a location between the tank and the process station to determine whether at least one of the chemical compounds is at a predetermined concentration. Upon determining that the at least one chemical compound in the solution is at the predetermined concentration the solution is flowed to the process station. The method further includes removing at least a portion of the solution from the process station and returning the removed portion of the solution to the reclaim tank. The removed portion of the solution is monitored at a location between the process station and the reclaim tank to determine whether at least one of the chemical compounds in the removed portion of the solution is at a predetermined concentration. Upon determining that the at least one chemical compound in the removed portion of the solution is at the predetermined concentration, the removed portion of solution is flowed to the process station.

摘要翻译： 在一个实施例中，控制半导体处理系统中的流体的方法包括在搅拌器中混合两种或更多种化合物以产生溶液并将溶液供应到回收罐，其中溶液分配到处理站。 可以在罐和处理站之间的位置处监测溶液，以确定至少一种化合物是否处于预定浓度。 当确定溶液中的至少一种化合物处于预定浓度时，溶液流到处理站。 该方法还包括从处理站中移除溶液的至少一部分并将溶液的去除部分返回回收罐。 在处理站和回收罐之间的位置处监测溶液的去除部分，以确定溶液的去除部分中的至少一种化合物是否处于预定浓度。 当确定溶液的去除部分中的至少一种化合物处于预定浓度时，溶液的去除部分流到处理站。

公开(公告)号：US07980753B2

公开(公告)日：2011-07-19

申请号：US11549104

申请日：2006-10-12

申请人： Karl J. Urquhart ,  Georges Guarneri ,  Jean-Louis Marc ,  Norbert Fanjat ,  Laurent Langellier ,  Christophe Colin

发明人： Karl J. Urquhart ,  Georges Guarneri ,  Jean-Louis Marc ,  Norbert Fanjat ,  Laurent Langellier ,  Christophe Colin

IPC分类号： B01F5/10

CPC分类号： F17D1/08 ,  B24B37/00 ,  B24B57/02 ,  F04C19/001 ,  Y10T137/0318

摘要： Methods and systems for chemical management. In one embodiment, a blender is coupled to a processing system and configured to supply an appropriate solution or solutions to the system. Solutions provided by the blender are then reclaimed from the system and subsequently reintroduced for reuse. The blender may be operated to control the concentrations of various constituents in the solution prior to the solution being reintroduced to the system for reuse. Some chemicals introduced to the system may be temperature controlled. A back end vacuum pump subsystem separates gases from liquids as part of a waste management system.

摘要翻译： 化学品管理方法和系统 在一个实施例中，搅拌器耦合到处理系统并且被配置为向系统提供适当的解决方案或解决方案。 混合器提供的解决方案然后从系统中回收并随后重新引入再利用。 在将溶液重新引入系统以重新使用之前，可以操作搅拌器以控制溶液中各种成分的浓度。 引入到系统中的一些化学品可以是温度控制的。 后端真空泵子系统将废气与液体分开，作为废物管理系统的一部分。

公开(公告)号：US07871249B2

公开(公告)日：2011-01-18

申请号：US11549094

申请日：2006-10-12

申请人： Karl J. Urquhart ,  Georges Guarneri ,  Jean-Louis Marc ,  Norbert Fanjat ,  Laurent Langellier ,  Christophe Colin

发明人： Karl J. Urquhart ,  Georges Guarneri ,  Jean-Louis Marc ,  Norbert Fanjat ,  Laurent Langellier ,  Christophe Colin

IPC分类号： F04C19/00 ,  C03C25/68 ,  B01F15/02

CPC分类号： F04C19/001 ,  H01L21/67017

摘要： Methods and systems for chemical management. In one embodiment, a blender is coupled to a processing system and configured to supply an appropriate solution or solutions to the system. Solutions provided by the blender are then reclaimed from the system and subsequently reintroduced for reuse. The blender may be operated to control the concentrations of various constituents in the solution prior to the solution being reintroduced to the system for reuse. Some chemicals introduced to the system may be temperature controlled. A back end vacuum pump subsystem separates gases from liquids as part of a waste management system.

摘要翻译： 化学品管理方法和系统 在一个实施例中，搅拌器耦合到处理系统并且被配置为向系统提供适当的解决方案或解决方案。 混合器提供的解决方案然后从系统中回收并随后重新引入再利用。 在将溶液重新引入系统以重新使用之前，可以操作搅拌器以控制溶液中各种成分的浓度。 引入到系统中的一些化学品可以是温度控制的。 后端真空泵子系统将废气与液体分开，作为废物管理系统的一部分。

公开(公告)号：US08235580B2

公开(公告)日：2012-08-07

申请号：US12323994

申请日：2008-11-26

申请人： Norbert Fanjat ,  Karl J. Urquart ,  Axel Soulet ,  Laurent Langellier

发明人： Norbert Fanjat ,  Karl J. Urquart ,  Axel Soulet ,  Laurent Langellier

IPC分类号： B01F15/02

CPC分类号： G05D11/133 ,  F04C2220/10 ,  F04C2220/30 ,  G05D11/138 ,  H01L21/67017 ,  H01L21/6715 ,  H01L21/67253

摘要： In one embodiment, a method of controlling fluids in a semiconductor processing system includes mixing two or more chemical compounds in a blender to produce a solution and supplying the solution to a reclaim tank, where the solution is dispense to a process station. The solution can be monitored at a location between the tank and the process station to determine whether at least one of the chemical compounds is at a predetermined concentration. Upon determining that the at least one chemical compound in the solution is at the predetermined concentration the solution is flowed to the process station. The method further includes removing at least a portion of the solution from the process station and returning the removed portion of the solution to the reclaim tank. The removed portion of the solution is monitored at a location between the process station and the reclaim tank to determine whether at least one of the chemical compounds in the removed portion of the solution is at a predetermined concentration. Upon determining that the at least one chemical compound in the removed portion of the solution is at the predetermined concentration, the removed portion of solution is flowed to the process station.

摘要翻译： 在一个实施例中，控制半导体处理系统中的流体的方法包括在搅拌器中混合两种或更多种化合物以产生溶液并将溶液供应到回收罐，其中溶液分配到处理站。 可以在罐和处理站之间的位置处监测溶液，以确定至少一种化合物是否处于预定浓度。 当确定溶液中的至少一种化合物处于预定浓度时，溶液流到处理站。 该方法还包括从处理站中移除溶液的至少一部分并将溶液的去除部分返回回收罐。 在处理站和回收罐之间的位置处监测溶液的去除部分，以确定溶液的去除部分中的至少一种化合物是否处于预定浓度。 当确定溶液的去除部分中的至少一种化合物处于预定浓度时，溶液的去除部分流到处理站。

公开(公告)号：US20110310694A1

公开(公告)日：2011-12-22

申请号：US13114832

申请日：2011-05-24

申请人： Karl J. Urquhart ,  Georges Guarneri ,  Jean-Louis Marc ,  Norbert Fanjat ,  Laurent Langellier ,  Christophe Colin

发明人： Karl J. Urquhart ,  Georges Guarneri ,  Jean-Louis Marc ,  Norbert Fanjat ,  Laurent Langellier ,  Christophe Colin

IPC分类号： B01F15/02

CPC分类号： F17D1/08 ,  B24B37/00 ,  B24B57/02 ,  F04C19/001 ,  Y10T137/0318

摘要： Methods and systems for chemical management. In one embodiment, a blender is coupled to a processing system and configured to supply an appropriate solution or solutions to the system. Solutions provided by the blender are then reclaimed from the system and subsequently reintroduced for reuse. The blender may be operated to control the concentrations of various constituents in the solution prior to the solution being reintroduced to the system for reuse. Some chemicals introduced to the system may be temperature controlled. A back end vacuum pump subsystem separates gases from liquids as part of a waste management system.

摘要翻译： 化学品管理方法和系统 在一个实施例中，搅拌器耦合到处理系统并且被配置为向系统提供适当的解决方案或解决方案。 混合器提供的解决方案然后从系统中回收并随后重新引入再利用。 在将溶液重新引入系统以重新使用之前，可以操作搅拌器以控制溶液中各种成分的浓度。 引入到系统中的一些化学品可以是温度控制的。 后端真空泵子系统将废气与液体分开，作为废物管理系统的一部分。

公开(公告)号：US20070119816A1

公开(公告)日：2007-05-31

申请号：US11549091

申请日：2006-10-12

申请人： Karl Urquhart ,  Georges Guarneri ,  Jean-Louis Marc ,  Norbert Fanjat ,  Laurent Langellier ,  Christophe Colin

发明人： Karl Urquhart ,  Georges Guarneri ,  Jean-Louis Marc ,  Norbert Fanjat ,  Laurent Langellier ,  Christophe Colin

IPC分类号： C03C15/00 ,  H01L21/306 ,  H01L21/302 ,  B44C1/22

CPC分类号： G05D11/138 ,  F04C2220/10 ,  F04C2220/30 ,  H01L21/6715 ,  H01L21/67253

摘要： Methods and systems for chemical management. In one embodiment, a blender is coupled to a processing system and configured to supply an appropriate solution or solutions to the system. Solutions provided by the blender are then reclaimed from the system and subsequently reintroduced for reuse. The blender may be operated to control the concentrations of various constituents in the solution prior to the solution being reintroduced to the system for reuse. Some chemicals introduced to the system may be temperature controlled. A back end vacuum pump subsystem separates gases from liquids as part of a waste management system.

摘要翻译： 化学品管理方法和系统 在一个实施例中，搅拌器耦合到处理系统并且被配置为向系统提供适当的解决方案或解决方案。 混合器提供的解决方案然后从系统中回收并随后重新引入再利用。 在将溶液重新引入系统以重新使用之前，可以操作搅拌器以控制溶液中各种成分的浓度。 引入到系统中的一些化学品可以是温度控制的。 后端真空泵子系统将废气与液体分开，作为废物管理系统的一部分。

公开(公告)号：US20070110591A1

公开(公告)日：2007-05-17

申请号：US11549094

申请日：2006-10-12

申请人： Karl Urquhart ,  Georges Guarneri ,  Jean-Louis Marc ,  Norbert Fanjat ,  Laurent Langellier ,  Christophe Colin

发明人： Karl Urquhart ,  Georges Guarneri ,  Jean-Louis Marc ,  Norbert Fanjat ,  Laurent Langellier ,  Christophe Colin

IPC分类号： F04B49/00

CPC分类号： F04C19/001 ,  H01L21/67017

摘要： Methods and systems for chemical management. In one embodiment, a blender is coupled to a processing system and configured to supply an appropriate solution or solutions to the system. Solutions provided by the blender are then reclaimed from the system and subsequently reintroduced for reuse. The blender may be operated to control the concentrations of various constituents in the solution prior to the solution being reintroduced to the system for reuse. Some chemicals introduced to the system may be temperature controlled. A back end vacuum pump subsystem separates gases from liquids as part of a waste management system.

摘要翻译： 化学品管理方法和系统 在一个实施例中，搅拌器耦合到处理系统并且被配置为向系统提供适当的解决方案或解决方案。 混合器提供的解决方案然后从系统中回收并随后重新引入再利用。 在将溶液重新引入系统以重新使用之前，可以操作搅拌器以控制溶液中各种成分的浓度。 引入到系统中的一些化学品可以是温度控制的。 后端真空泵子系统将废气与液体分开，作为废物管理系统的一部分。

公开(公告)号：US08591095B2

公开(公告)日：2013-11-26

申请号：US13563275

申请日：2012-07-31

申请人： Norbert Fanjat ,  Karl J. Urquart ,  Axel Soulet ,  Laurent Langellier

发明人： Norbert Fanjat ,  Karl J. Urquart ,  Axel Soulet ,  Laurent Langellier

IPC分类号： B01F15/02

CPC分类号： G05D11/133 ,  F04C2220/10 ,  F04C2220/30 ,  G05D11/138 ,  H01L21/67017 ,  H01L21/6715 ,  H01L21/67253

摘要： Systems for controlling fluids in semiconductor processing systems are disclosed. The disclosed systems comprise a chemical blender, a reclaim tank, a dispense system, two chemical monitors, a controller, and a reclamation line in fluid communication with an outlet of the process station and coupled to the reclaim tank. The reclaim tank mixes solution from the chemical blender and the reclamation line. One of the two chemical monitors the mixed solution downstream from the dispense system. The controller is configured to flow the mixed solution to the process station upon determination by the first chemical monitor that at least one chemical compound in the mixed solution is at a predetermined concentration. The second chemical monitor monitors the reclaimed portion of the mixed solution to determine whether the at least one chemical compound is at a predetermined concentration before being reintroduced into the reclaim tank.

摘要翻译： 公开了用于控制半导体处理系统中的流体的系统。 所公开的系统包括与处理站的出口流体连通并耦合到回收罐的化学搅拌器，回收罐，分配系统，两个化学监测器，控制器和回收管线。 回收罐混合来自化学搅拌机和回收生产线的溶液。 两种化学品监测器之一是分配系统下游的混合溶液。 所述控制器被配置为当所述第一化学监测器确定所述混合溶液中的至少一种化合物处于预定浓度时，将所述混合溶液流动到所述处理站。 第二化学监测器监测混合溶液的回收部分，以确定至少一种化合物在再次引入回收罐之前是否处于预定浓度。

公开(公告)号：US20130028043A1

公开(公告)日：2013-01-31

申请号：US13563275

申请日：2012-07-31

申请人： Norbert FANJAT ,  Karl J. URQUART ,  Axel SOULET ,  Laurent LANGELLIER

发明人： Norbert FANJAT ,  Karl J. URQUART ,  Axel SOULET ,  Laurent LANGELLIER

IPC分类号： G05D21/00

CPC分类号： G05D11/133 ,  F04C2220/10 ,  F04C2220/30 ,  G05D11/138 ,  H01L21/67017 ,  H01L21/6715 ,  H01L21/67253

摘要： Systems for controlling fluids in semiconductor processing systems are disclosed. The disclosed systems comprise a chemical blender, a reclaim tank, a dispense system, two chemical monitors, a controller, and a reclamation line in fluid communication with an outlet of the process station and coupled to the reclaim tank. The reclaim tank mixes solution from the chemical blender and the reclamation line. One of the two chemical monitors the mixed solution downstream from the dispense system. The controller is configured to flow the mixed solution to the process station upon determination by the first chemical monitor that at least one chemical compound in the mixed solution is at a predetermined concentration. The second chemical monitor monitors the reclaimed portion of the mixed solution to determine whether the at least one chemical compound is at a predetermined concentration before being reintroduced into the reclaim tank.

摘要翻译： 公开了用于控制半导体处理系统中的流体的系统。 所公开的系统包括与处理站的出口流体连通并耦合到回收罐的化学搅拌器，回收罐，分配系统，两个化学监测器，控制器和回收管线。 回收罐混合来自化学搅拌机和回收生产线的溶液。 两种化学品监测器之一是分配系统下游的混合溶液。 所述控制器被配置为当所述第一化学监测器确定所述混合溶液中的至少一种化合物处于预定浓度时，将所述混合溶液流动到所述处理站。 第二化学监测器监测混合溶液的回收部分，以确定至少一种化合物在再次引入回收罐之前是否处于预定浓度。

公开(公告)号：US08317388B2

公开(公告)日：2012-11-27

申请号：US13114832

申请日：2011-05-24

申请人： Karl J. Urquhart ,  Georges Guarneri ,  Jean-Louis Marc ,  Norbert Fanjat ,  Laurent Langellier ,  Christophe Colin

发明人： Karl J. Urquhart ,  Georges Guarneri ,  Jean-Louis Marc ,  Norbert Fanjat ,  Laurent Langellier ,  Christophe Colin

IPC分类号： B01F5/10

CPC分类号： F17D1/08 ,  B24B37/00 ,  B24B57/02 ,  F04C19/001 ,  Y10T137/0318

摘要： Methods and systems for chemical management. In one embodiment, a blender is coupled to a processing system and configured to supply an appropriate solution or solutions to the system. Solutions provided by the blender are then reclaimed from the system and subsequently reintroduced for reuse. The blender may be operated to control the concentrations of various constituents in the solution prior to the solution being reintroduced to the system for reuse. Some chemicals introduced to the system may be temperature controlled. A back end vacuum pump subsystem separates gases from liquids as part of a waste management system.

摘要翻译： 化学品管理方法和系统 在一个实施例中，搅拌器耦合到处理系统并且被配置为向系统提供适当的解决方案或解决方案。 混合器提供的解决方案然后从系统中回收并随后重新引入再利用。 在将溶液重新引入系统以重新使用之前，可以操作搅拌器以控制溶液中各种成分的浓度。 引入到系统中的一些化学品可以是温度控制的。 后端真空泵子系统将废气与液体分开，作为废物管理系统的一部分。