摘要:
A piezoresistive MEMS oscillator comprises a resonator body, first and second drive electrodes located adjacent the resonator body for providing an actuation signal; and at least a first sense electrode connected to a respective anchor point. The voltages at the electrodes are controlled and/or processed such that the feedthrough AC current from one drive electrode to the sense electrode is at least partially offset by the feedthrough AC current from the other drive electrode to the sense electrode.
摘要:
A resonator comprises a resonator mass (34), a first connector (30) on a first side of the mass connected between the resonator mass and a first fixed mounting and a second connector (32) on a second, opposite, side of the mass connected between the resonator mass and a second fixed mounting. Drive means drives the mass (34) into a resonant mode in which it oscillates in a sideways direction, thereby compressing one of the first and second connectors while extending the other of the first and second connectors.
摘要:
Devices (1) are provided with sensor arrangements (2) comprising field generators (10) for generating magnetic fields and first/second/third elements (R1-R4, S1-S4, T1-T4) for detecting first/second/third components of the magnetic fields in a plane and movable objects (14) for, in response to changing the first/second/third accelerations of the moveable objects (14) in first/second/third directions, changing the first/second/third components of the magnetic fields in the plane. The first (second, third) field detector (11, 12, 13) is more sensitive to the first (second, third) acceleration than to the other accelerations. Such devices (1) have a good sensitivity and a good linearity. The elements (R1-R4, S1-S4, T1-T4) form part of bridges. The first elements (R1-R4) may be in round or rectangular form and the second and third elements (S1-S4, T1-T4) may be in the form of sun beams leaving a sun.
摘要:
Detection circuits (1) for detecting movements of movable objects (2) such as joysticks are provided with first detectors (100) for detecting first movements of the joysticks in first directions, comprising first detection units (101) for detecting a presence/absence of light spots (3), locations of the light spots (3) depending on said first movements, and with second detectors (200) for detecting second movements of the joysticks in second directions, comprising second detection units (201) for detecting first second intensities of the light spots (3), intensities of the light spots (3) depending on said second movements. Such detection circuits (1) are less sensitive to misalignment of components during an assembly and simpler to produce and less costly. The second detectors (200) are entirely located within the light spot (3) independently from positions of the joysticks and the first and third detectors are partly located within the light spot (3) dependently on positions of the joysticks. The detection units (101) comprise photo diodes (120) and transistors (121) for digitizing the signals from the photo diodes (120).
摘要:
Detection circuits (1) for detecting movements of movable objects (2) such as joysticks are provided with detectors (100,200) for detecting movements of the movable objects (2), comprising detection units (101-136,201-204) for detecting light spots (3) from sources (4), the light spots (3) depending on said movements, and with reference detectors (300) for compensating for aging/process variations, comprising reference detection units (301-304) for calibrating the detection units (101-136,201-204). Such detection circuits (1) suffer from aging/process variations to a relatively small extent. First detectors (100) for detecting x or y movements are partly located within the light spot (3) dependently on positions of the joysticks and the reference detectors (300) are then entirely located within the light spot (3) independently from positions of the joysticks. Second detectors (200) for detecting z movements are entirely located within the light spot (3) independently from positions of the joysticks and the reference detectors (300) are then entirely located outside the light spot (3) independently from positions of the joysticks.
摘要:
An oscillator device comprises a resonator mass which is connected by a spring arrangement to a substrate and a feedback element for controlling oscillation of the resonator mass, which comprises a piezoresistive element connected between the resonator mass and the substrate. The invention provides an oscillator device in which the two parts (resonator and circuit to close the oscillation loop) are combined inside one single oscillator device, which can be a MEMS device.
摘要:
A MEMS resonator has a component which provides a capacitance associated with the transduction gap which has a temperature-dependent dielectric characteristic, which varies in the same direction (i.e. the slope has the same sign) as the Young's modulus of the material of the resonator versus temperature. This means that the resonant frequency is less dependent on temperature.
摘要:
A device has a micro electromechanical structure (10) with a first arm (102), at least one second arm (104a, b) connected to each other via a connection (100). Both arms (102, 104a, b) and the connection (100) are preferably made of a single crystalline body. The first and second arm (102, 104a, b) have end portions attached to a substrate, but otherwise the arms and their connection are free to move relative to the substrate. The first and second arm (102, 104a, b) extending from the end portions to the connection (100) along different directions, preferably perpendicularly to each other. An electrode (12) is provided on the substrate, adjacent to the micro electromechanical structure (10) to excite vibration of the structure. The two arms in different directions make it possible to reduce the nonlinearity of the stiffness during vibrations of the structure.
摘要:
Detection circuits (1) for detecting movements of movable objects (2) such as joysticks are provided with first detectors (100) for detecting first movements of the joysticks in first directions, comprising first detection units (101) for detecting a presence/absence of light spots (3), locations of the light spots (3) depending on said first movements, and with second detectors (200) for detecting second movements of the joysticks in second directions, comprising second detection units (201) for detecting first/second intensities of the light spots (3), intensities of the light spots (3) depending on said second movements. Such detection circuits (1) are less sensitive to misalignment of components during an assembly and simpler to produce and less costly. The second detectors (200) are entirely located within the light spot (3) independently from positions of the joysticks and the first and third detectors are partly located within the light spot (3) dependently on positions of the joysticks. The detection units (101) comprise photo diodes (120) and transistors (121) for digitizing the signals from the photo diodes (120).
摘要:
Detection circuits (1) for detecting movements of movable objects (2) such as joysticks are provided with first detectors (100) for detecting first movements of the joysticks in first directions, comprising first detection units (101) for detecting a presence/absence of light spots (3), locations of the light spots (3) depending on said first movements, and with second detectors (200) for detecting second movements of the joysticks in second directions, comprising second detection units (201) for detecting first/second intensities of the light spots (3), intensities of the light spots (3) depending on said second movements. Such detection circuits (1) are less sensitive to misalignment of components during an assembly and simpler to produce and less costly. The second detectors (200) are entirely located within the light spot (3) independently from positions of the joysticks and the first and third detectors are partly located within the of light spot (3) dependently on positions of the joysticks. The detection units (101) comprise photo diodes (120) and transistors (121) for digitizing the signals from the photo diodes (120).