公开(公告)号：US08877122B2

公开(公告)日：2014-11-04

申请号：US13264220

申请日：2010-04-16

Applicant: Yasuhiro Aoki ,  Nobuhito Sekine ,  Akihiro Sato ,  Kazuhito Miyata ,  Kazuyoshi Chikugo

Inventor： Yasuhiro Aoki ,  Nobuhito Sekine ,  Akihiro Sato ,  Kazuhito Miyata ,  Kazuyoshi Chikugo

IPC: C22C19/05

CPC classification number: F01D5/28 ,  C22C19/05 ,  C22F1/10 ,  C30B11/00 ,  C30B29/52 ,  F05D2300/607 ,  Y02T50/671

Abstract: A Ni-based single crystal superalloy which has the following composition: Co: 0.0 wt % or more to 15.0 wt % or less, Cr: 4.1 to 8.0 wt %, Mo: 2.1 to 4.5 wt %, W: 0.0 to 3.9 wt %, Ta: 4.0 to 10.0 wt %, Al: 4.5 to 6.5 wt %, Ti: 0.0 to 1.0 wt %, Hf: 0.00 to 0.5 wt %, Nb: 0.0 to 3.0 wt %, Re: 8.1 to 9.9 wt % and Ru: 0.5 to 6.5 wt % with the remainder including Ni and unavoidable impurities. As a result, the Ni-based single crystal superalloy which includes more than 8 wt % of Re in the composition ratio and has excellent specific creep strength and the turbine blade incorporating the Ni-based single crystal superalloy may be made.

Abstract translation: 具有以下组成的Ni基单晶超合金：Co：0.0wt％以上至15.0wt％以下，Cr：4.1〜8.0wt％，Mo：2.1〜4.5wt％，W：0.0〜3.9wt％ ，Ta：4.0〜10.0wt％，Al：4.5〜6.5wt％，Ti：0.0〜1.0wt％，Hf：0.00〜0.5wt％，Nb：0.0〜3.0wt％，Re：8.1〜9.9wt％ ：0.5〜6.5重量％，余量包括Ni和不可避免的杂质。 结果，可以制备包含组合比大于8重量％的Re且具有优异的抗蠕变强度的Ni基单晶超合金，以及并入Ni基单晶超耐热合金的涡轮叶片。

公开(公告)号：US20080316656A1

公开(公告)日：2008-12-25

申请号：US12214748

申请日：2008-06-20

Applicant: Kazuhito Miyata ,  Kentarou Namiki ,  Nobuto Yasui ,  Hideaki Tanaka ,  ATsuko Okawa ,  Akihiro Namba ,  Yoshiki Yonamoto

Inventor： Kazuhito Miyata ,  Kentarou Namiki ,  Nobuto Yasui ,  Hideaki Tanaka ,  ATsuko Okawa ,  Akihiro Namba ,  Yoshiki Yonamoto

IPC: G11B5/127

CPC classification number: G11B5/3163 ,  B82Y10/00 ,  B82Y25/00 ,  G11B5/3909 ,  G11B5/41 ,  G11B2005/3996 ,  Y10T29/49048

Abstract: Embodiments of the present invention provide a magnetic head suitable for high density recording at a high yield by reducing the thickness of an air-bearing surface protection layer of a magnetic head and suppressing reduction in the signal-to-noise (S/N) ratio of a read element. According to one embodiment, a read element of a magnetic head has a magnetoresistive effect film (TMR film) between a lower magnetic shield layer and an upper magnetic shield layer, and has a refill film and a magnetic domain control film in both sides of the TMR film. The TMR film is configured by a lower metal layer, an antiferromagnetic layer, a ferromagnetic pinned layer, an intermediate layer, a ferromagnetic free layer, and an upper metal layer. An air-bearing surface protection layer, including a silicon nitride film about 2.0 nm in thickness, is formed on a recording medium facing surface of the TMR film. Since silicon in the silicon nitride film is inactivated by nitrogen, the silicon does not damage the TMR film. Therefore, noise of the read element can be controlled to be at a low level.

Abstract translation: 本发明的实施例通过减小磁头的空气轴承表面保护层的厚度并且抑制信噪比（S / N）比的降低来提供适于高收率地高密度记录的磁头 的读取元素。 根据一个实施例，磁头的读取元件在下磁屏蔽层和上磁屏蔽层之间具有磁阻效应膜（TMR膜），并且在该磁屏蔽的两侧具有补充膜和磁畴控制膜 TMR膜。 TMR膜由下金属层，反铁磁层，铁磁性钉扎层，中间层，铁磁性自由层和上金属层构成。 在TMR膜的面向记录介质的表面上形成包含厚度约为2.0nm的氮化硅膜的空气轴承表面保护层。 由于氮化硅膜中的硅被氮气灭活，因此硅不会损坏TMR膜。 因此，可以将读取元件的噪声控制在低水平。

公开(公告)号：US20120034098A1

公开(公告)日：2012-02-09

申请号：US13264220

申请日：2010-04-16

Applicant: Yasuhiro Aoki ,  Nobuhito Sekine ,  Akihiro Sato ,  Kazuhito Miyata ,  Kazuyoshi Chikugo

Inventor： Yasuhiro Aoki ,  Nobuhito Sekine ,  Akihiro Sato ,  Kazuhito Miyata ,  Kazuyoshi Chikugo

IPC: F01D5/14 ,  C22C30/00 ,  C22C19/05

CPC classification number: F01D5/28 ,  C22C19/05 ,  C22F1/10 ,  C30B11/00 ,  C30B29/52 ,  F05D2300/607 ,  Y02T50/671

Abstract: A Ni-based single crystal superalloy which has the following composition: Co: 0.0 wt % or more to 15.0 wt % or less, Cr: 4.1 to 8.0 wt %, Mo: 2.1 to 4.5 wt %, W: 0.0 to 3.9 wt %, Ta: 4.0 to 10.0 wt %, Al: 4.5 to 6.5 wt %, Ti: 0.0 to 1.0 wt %, Hf: 0.00 to 0.5 wt %, Nb: 0.0 to 3.0 wt %, Re: 8.1 to 9.9 wt % and Ru: 0.5 to 6.5 wt % with the remainder including Ni and unavoidable impurities. As a result, the Ni-based single crystal superalloy which includes more than 8 wt % of Re in the composition ratio and has excellent specific creep strength and the turbine blade incorporating the Ni-based single crystal superalloy may be made.

Abstract translation: 具有以下组成的Ni基单晶超合金：Co：0.0wt％以上至15.0wt％以下，Cr：4.1〜8.0wt％，Mo：2.1〜4.5wt％，W：0.0〜3.9wt％ ，Ta：4.0〜10.0重量％，Al：4.5〜6.5重量％，Ti：0.0〜1.0重量％，Hf：0.00〜0.5重量％，Nb：0.0〜3.0重量％，Re：8.1〜9.9重量％ ：0.5〜6.5重量％，余量包括Ni和不可避免的杂质。 结果，可以制备包含组合比大于8重量％的Re且具有优异的抗蠕变强度的Ni基单晶超合金，以及并入Ni基单晶超耐热合金的涡轮叶片。

公开(公告)号：US07805827B2

公开(公告)日：2010-10-05

申请号：US11486182

申请日：2006-07-12

Applicant: Nobuto Yasui ,  Hiroshi Inaba ,  Shinji Sasaki ,  Kazuhito Miyata

Inventor： Nobuto Yasui ,  Hiroshi Inaba ,  Shinji Sasaki ,  Kazuhito Miyata

IPC: G11B5/127 ,  H04R31/00

CPC classification number: G11B5/3169 ,  G11B5/102 ,  G11B5/3106 ,  G11B5/6005 ,  G11B21/21 ,  Y10T29/49025 ,  Y10T29/49027 ,  Y10T29/4903 ,  Y10T29/49032 ,  Y10T29/49046 ,  Y10T29/49048

Abstract: In one embodiment of the present invention, a method of producing a magnetic head slider comprises the steps of forming, on the air bearing surface of the slider, an air bearing surface overcoat, removing the surface region from a hard amorphous carbon film by the irradiation with an ion beam which is tilted with respect to a normal to the air bearing surface, and forming a rail in the air bearing surface on which the air bearing surface overcoat has been formed. A high density and covering performance are obtained when the angle of irradiating the ion beam is not smaller than about 60 degrees from a normal to the air bearing surface of the magnetic head slider and when the acceleration voltage for the ion beam is not higher than about 300 V in the step of removing part of the air bearing surface overcoat.

Abstract translation: 在本发明的一个实施例中，制造磁头滑块的方法包括以下步骤：在滑块的空气轴承表面上形成空气轴承表面外涂层，通过照射从硬的无定形碳膜上除去表面区域 具有相对于空气轴承表面的法线倾斜的离子束，并且在已经形成有空气轴承表面外涂层的空气轴承表面中形成轨道。 当照射离子束的角度与磁头滑块的空气轴承表面的法线不小于约60度时，并且当离子束的加速电压不高于约10度时，可获得高密度和覆盖性能 在去除部分空气轴承表面外套的步骤中为300V。

公开(公告)号：US07735213B2

公开(公告)日：2010-06-15

申请号：US11845010

申请日：2007-08-24

Applicant: Nobuto Yasui ,  Katsuro Watanabe ,  Takateru Seki ,  Kazuhito Miyata ,  Tetsuya Matsusaki

Inventor： Nobuto Yasui ,  Katsuro Watanabe ,  Takateru Seki ,  Kazuhito Miyata ,  Tetsuya Matsusaki

IPC: H04R31/00

CPC classification number: G11B5/3163 ,  G11B5/3169 ,  G11B5/3173 ,  G11B5/6011 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49041

Abstract: Embodiments of the present invention provide a method of fabricating a magnetic head slider realizing high-recording density at high-yields by preventing formation of a short circuit on the air-bearing surface of a magnetic head slider and preventing formation of an oxidized layer with significant film thickness which increases the effective magnetic spacing, on the air-bearing surface of the magnetic head slider. According to one embodiment, after air-bearing surface mechanical lapping of a row bar or a magnetic head slider, cleaning is performed by ion beam bombardment to remove a conductive smear. Oxygen exposure is performed to recover a damaged region which was formed by ion beam bombardment at the end face of an intermediate layer of a magnetoresistive film 5. Thereafter, air-bearing surface protection films are formed and followed by rail formation. If the processes are performed on the row bar, the row bar is cut into individual separated magnetic head sliders.

Abstract translation: 本发明的实施例提供一种制造磁头滑块的方法，其通过防止在磁头滑块的空气轴承表面上形成短路而以高产率实现高记录密度，并且防止形成具有显着性的氧化层 在磁头滑块的空气轴承表面上增加有效磁间距的膜厚度。 根据一个实施例，在排杆或磁头滑块的空气轴承表面机械研磨之后，通过离子束轰击进行清洁以除去导电涂片。 进行氧曝光以回收在磁阻膜5的中间层的端面处通过离子束轰击形成的损伤区域。之后，形成空气轴承表面保护膜，然后形成轨道。 如果在行条上执行过程，则将行条切割成单独的分离的磁头滑块。

公开(公告)号：US20090321389A1

公开(公告)日：2009-12-31

申请号：US12491741

申请日：2009-06-25

Applicant: Nobuto Yasui ,  Shinji Sasaki ,  Kazuhito Miyata ,  Mineaki Kodama

Inventor： Nobuto Yasui ,  Shinji Sasaki ,  Kazuhito Miyata ,  Mineaki Kodama

IPC: B44C1/22

CPC classification number: G11B5/3163 ,  G11B5/102 ,  G11B5/3169 ,  G11B5/3173

Abstract: A magnetic head suitable for high-density recording is provided at a high yield by a method that suppresses a reduction in reproducing output signal due to ion-beam irradiation. After an air-bearing surface of a read element, a magnetic-head element, or a row bar is mechanically polished, the air-bearing surface is irradiated with an ion beam, such that an orthographic projection of an ion-beam incidence direction onto the air-bearing surface forms an in-plane incidence angle of 30 degrees to 150 degrees or of 210 degrees to 330 degrees with respect to a track-width direction. Thereby, the formation of a short circuit due to ion-beam irradiation may be hindered.

Abstract translation: 通过抑制由离子束照射引起的再现输出信号的降低的方法，以高产率提供了适合于高密度记录的磁头。 在读取元件的空气轴承表面，磁头元件或行杆机械抛光之后，用离子束照射空气轴承表面，使得离子束入射方向的正投影到 空气轴承表面相对于轨道宽度方向形成30度至150度或210度至330度的面内入射角。 由此，可能妨碍由于离子束照射而形成的短路。

公开(公告)号：US20070014050A1

公开(公告)日：2007-01-18

申请号：US11486182

申请日：2006-07-12

Applicant: Nobuto Yasui ,  Hiroshi Inaba ,  Shinji Sasaki ,  Kazuhito Miyata

Inventor： Nobuto Yasui ,  Hiroshi Inaba ,  Shinji Sasaki ,  Kazuhito Miyata

IPC: G11B5/60

CPC classification number: G11B5/3169 ,  G11B5/102 ,  G11B5/3106 ,  G11B5/6005 ,  G11B21/21 ,  Y10T29/49025 ,  Y10T29/49027 ,  Y10T29/4903 ,  Y10T29/49032 ,  Y10T29/49046 ,  Y10T29/49048

Abstract: A magnetic head slider having an air bearing surface overcoat that has excellent corrosion resistance and wear resistance despite its very small thickness is provided. In one embodiment, a method of producing a magnetic head slider comprises the steps of forming, on the air bearing surface of the slider, an air bearing surface overcoat which is a film stack of an amorphous silicon film and a hard amorphous carbon film, removing the surface region from the hard amorphous carbon film by the irradiation with an ion beam which is tilted with respect to a normal to the air bearing surface, and forming a rail in the air bearing surface on which the air bearing surface overcoat has been formed. The amount of the diamond component in the hard amorphous carbon film must not be smaller than about 45% and, desirably, in a range of about 60% to 85%. A high density and covering performance are obtained when the angle of irradiating the ion beam is not smaller than about 60 degrees from a normal to the air bearing surface of the magnetic head slider and when the acceleration voltage for the ion beam is not higher than about 300 V in the step of removing part of the air bearing surface overcoat.

Abstract translation: 提供具有空气轴承表面外涂层的磁头滑块，其具有优异的耐腐蚀性和耐磨性，尽管其非常小的厚度。 在一个实施例中，制造磁头滑动器的方法包括以下步骤：在滑块的空气轴承表面上形成空气轴承表面外涂层，其是非晶硅膜和硬质非晶碳膜的膜叠层，去除 通过照射相对于空气轴承表面的法线倾斜的离子束，并且在已经形成有空气轴承表面外涂层的空气轴承表面中形成轨道，来自硬非晶碳膜的表面区域。 硬质无定形碳膜中的金刚石成分的含量不得小于约45％，优选为约60％〜85％的范围。 当照射离子束的角度与磁头滑块的空气轴承表面的法线不小于约60度时，并且当离子束的加速电压不高于约10度时，可获得高密度和覆盖性能 在去除部分空气轴承表面外套的步骤中为300V。

公开(公告)号：US20130070366A1

公开(公告)日：2013-03-21

申请号：US13239244

申请日：2011-09-21

Applicant: Mineaki Kodama ,  Kazuhito Miyata ,  Hiroshi Ishizaki ,  Atsuko Okawa

Inventor： Mineaki Kodama ,  Kazuhito Miyata ,  Hiroshi Ishizaki ,  Atsuko Okawa

IPC: G11B5/33 ,  B05D5/12 ,  C23C14/34 ,  G11B21/02

CPC classification number: C23C14/0605 ,  C23C14/325 ,  G11B5/102 ,  G11B5/3106 ,  Y10T428/11

Abstract: According to one embodiment, a method for manufacturing a magnetic device includes forming a protective film above a structure, wherein at least one of hydrogen and water vapor are introduced into a formation chamber during formation of the protective film. In-another embodiment, a magnetic head includes at least one of: a read element, a write element, a heater element, and a resistance detector element above a substrate, conductive terminals for each of the at least one of: the read element, the write element, and the heater element, and a protective film above the at least one of: the read element, the write element, and the heater element, wherein the protective film comprises at least one of hydrogen and water vapor.

Abstract translation: 根据一个实施例，一种用于制造磁性装置的方法包括在结构之上形成保护膜，其中在形成保护膜期间，将氢和水蒸汽中的至少一种引入到形成室中。 在另一个实施例中，磁头包括以下中的至少一个：读取元件，写入元件，加热器元件和基板上方的电阻检测器元件中的至少一个，用于读取元件中的至少一个的导电端子， 写入元件和加热器元件，以及保护膜，其包括以下至少一个：读取元件，写入元件和加热器元件，其中保护膜包括氢和水蒸气中的至少一种。

公开(公告)号：US20080062579A1

公开(公告)日：2008-03-13

申请号：US11845010

申请日：2007-08-24

Applicant: Nobuto Yasui ,  Katsuro Watanabe ,  Takateru Seki ,  Kazuhito Miyata ,  Tetsuya Matsusaki

Inventor： Nobuto Yasui ,  Katsuro Watanabe ,  Takateru Seki ,  Kazuhito Miyata ,  Tetsuya Matsusaki

IPC: G11B5/33

CPC classification number: G11B5/3163 ,  G11B5/3169 ,  G11B5/3173 ,  G11B5/6011 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49041

Abstract: Embodiments of the present invention provide a method of fabricating a magnetic head slider realizing high-recording density at high-yields by preventing formation of a short circuit on the air-bearing surface of a magnetic head slider and preventing formation of an oxidized layer with significant film thickness which increases the effective magnetic spacing, on the air-bearing surface of the magnetic head slider. According to one embodiment, after air-bearing surface mechanical lapping of a row bar or a magnetic head slider, cleaning is performed by ion beam bombardment to remove a conductive smear. Oxygen exposure is performed to recover a damaged region which was formed by ion beam bombardment at the end face of an intermediate layer of a magnetoresistive film 5. Thereafter, air-bearing surface protection films are formed and followed by rail formation. If the processes are performed on the row bar, the row bar is cut into individual separated magnetic head sliders.

Abstract translation: 本发明的实施例提供一种制造磁头滑块的方法，其通过防止在磁头滑块的空气轴承表面上形成短路而以高产率实现高记录密度，并且防止形成具有显着性的氧化层 在磁头滑块的空气轴承表面上增加有效磁间距的膜厚度。 根据一个实施例，在排杆或磁头滑块的空气轴承表面机械研磨之后，通过离子束轰击进行清洁以除去导电涂片。 进行氧曝光以回收在磁阻膜5的中间层的端面处通过离子束轰击形成的损伤区域。之后，形成空气轴承表面保护膜，然后形成轨道。 如果在行条上执行过程，则将行条切割成单独的分离的磁头滑块。

公开(公告)号：US08354034B2

公开(公告)日：2013-01-15

申请号：US12491741

申请日：2009-06-25

Applicant: Nobuto Yasui ,  Shinji Sasaki ,  Kazuhito Miyata ,  Mineaki Kodama

Inventor： Nobuto Yasui ,  Shinji Sasaki ,  Kazuhito Miyata ,  Mineaki Kodama

IPC: B44C1/22

CPC classification number: G11B5/3163 ,  G11B5/102 ,  G11B5/3169 ,  G11B5/3173

Abstract: A magnetic head suitable for high-density recording is provided at a high yield by a method that suppresses a reduction in reproducing output signal due to ion-beam irradiation. After an air-bearing surface of a read element, a magnetic-head element, or a row bar is mechanically polished, the air-bearing surface is irradiated with an ion beam, such that an orthographic projection of an ion-beam incidence direction onto the air-bearing surface forms an in-plane incidence angle of 30 degrees to 150 degrees or of 210 degrees to 330 degrees with respect to a track-width direction. Thereby, the formation of a short circuit due to ion-beam irradiation may be hindered.

Abstract translation: 通过抑制由离子束照射引起的再现输出信号的降低的方法，以高产率提供了适合于高密度记录的磁头。 在读取元件的空气轴承表面，磁头元件或行杆机械抛光之后，用离子束照射空气轴承表面，使得离子束入射方向的正投影到 空气轴承表面相对于轨道宽度方向形成30度至150度或210度至330度的面内入射角。 由此，可能妨碍由于离子束照射而形成的短路。