A1 composite material being crumbled with water, a1 film and a1 power comprising the material and methods for preparation thereof, constitutional member for film-forming chamber method for recovering film-forming material
    3.
    发明申请

    公开(公告)号:US20060240271A1

    公开(公告)日:2006-10-26

    申请号:US10549034

    申请日:2005-03-04

    IPC分类号: B22F7/04 B05D1/08

    摘要: In An Al composite material collapsible in the presence of moisture, the external surface of small pieces or powder constructed from a single or a plurality of crystalline grains of Al or an Al alloy is covered with a film of a low melting point metal or alloy selected from the group consisting of In, Sn, combinations of In and Sn, and alloys thereof. The content of the foregoing low melting point metal or alloy ranges from 0.1 to 20% by mass on the basis of the total mass of the composite material. A material obtained by adding a low melting point metal in an amount specified above to, for instance, Al and then fusing and melting the resulting mixture is quenched and solidified within a non-oxidizing atmosphere to thus form an Al composite material. An Al film, an Al spray-coated film and Al powder can be prepared from the foregoing Al composite material. A component member for a film-forming chamber is also provided, which is provided with a water-collapsible Al film on the surface thereof. Film-forming operations are continued over a long period of time using the component member for a film-forming chamber provided with the water-collapsible Al film and then film-forming materials can be recovered from the component member on which the film-forming materials are deposited in a substantial thickness.

    摘要翻译: 在存在水分的铝复合材料中,由Al或Al合金的单个或多个晶粒构成的小块或粉末的外表面被选择的低熔点金属或合金膜覆盖 由In,Sn,In和Sn的组合组成的组及其合金组成。 前述低熔点金属或合金的含量基于复合材料的总质量为0.1〜20质量%。 将上述量的低熔点金属加入到例如Al中然后使所得混合物熔融和熔融而获得的材料在非氧化性气氛中淬火固化,从而形成Al复合材料。 可以由上述Al复合材料制备Al膜,Al喷镀膜和Al粉末。 还提供了一种用于成膜室的部件,其表面上设置有水可折叠的Al膜。 使用具有水溶性Al膜的成膜室的成分构件长时间地进行成膜操作,然后可以从成膜材料的成膜材料回收成膜材料 以相当大的厚度沉积。

    Components for a film-forming device and method for cleaning the same
    4.
    发明授权
    Components for a film-forming device and method for cleaning the same 有权
    用于成膜装置的部件及其清洁方法

    公开(公告)号:US08216654B2

    公开(公告)日:2012-07-10

    申请号:US10538856

    申请日:2004-02-18

    IPC分类号: B23B3/02

    摘要: There are provided a film forming equipment component having a structure in which an deposited film d formed on the component can be separated from the component for a time period shorter than the prior art to reduce damage due to a cleaning fluid S, and a method of cleaning such a component. A metal film layer 2 electrochemically less noble than the matrix metal material 1 of the aforementioned component is formed on the surface of the matrix metal material 1 through thermal spraying, vapor depositing, sputtering, laminating or other process. Alternatively, a second metal film layer 3 electrochemically more noble than the aforementioned matrix metal material 1 is formed on the surface of the metal film layer 2 through said thermal spraying or other process. Thus, a local cell is formed between the metal film layer 2 and the matrix metal material 1 or the second metal film layer 3. Therefore, the deposited film d can be separated from the matrix metal material 1 for an extremely shortened time period, without damaging the matrix metal material 1 itself from the cleaning fluid S.

    摘要翻译: 提供了一种成膜设备部件,其具有这样一种结构,其中在组件上形成的沉积膜d可以比现有技术短的时间段与部件分离,以减少由清洗液S引起的损坏的方法 清洗这样一个组件。 通过热喷涂,气相沉积,溅射,层压或其它工艺在基体金属材料1的表面上形成电化学上比上述组分的基体金属材料1更不贵的金属膜层2。 或者,通过所述热喷涂或其它工艺在金属膜层2的表面上形成比上述基体金属材料1电化学更高的第二金属膜层3。 因此,在金属膜层2和基体金属材料1或第二金属膜层3之间形成局部电池。因此,沉积膜d可以在极短的时间内与基体金属材料1分离,而没有 从清洗液S破坏基质金属材料1本身。

    METHOD FOR THE PRODUCTION OF WATER-REACTIVE AL FILM AND CONSTITUENT MEMBER FOR FILM-FORMING CHAMBER
    5.
    发明申请
    METHOD FOR THE PRODUCTION OF WATER-REACTIVE AL FILM AND CONSTITUENT MEMBER FOR FILM-FORMING CHAMBER 审中-公开
    水膜反渗膜生产方法及成膜室成型方法

    公开(公告)号:US20110041760A1

    公开(公告)日:2011-02-24

    申请号:US12989974

    申请日:2009-04-27

    IPC分类号: B05C21/00 C21D1/00 B32B15/04

    摘要: Herein disclosed are a method for the production of a water-reactive Al film comprising the steps of melting a material which contains 4NAl or 5NAl as an Al raw material and added In in an amount ranging from 2 to 5% by mass on the basis of the mass of the Al raw material in such a manner that the composition of the material becomes uniform; thermally spraying the resulting molten material on the surface of a base material according to the flame spraying technique; and solidifying the sprayed molten material through quenching to thus form an Al film in which In is uniformly dispersed in Al crystalline grains; and a constituent member for a film-forming chamber, which is provided, on the surface, with the water-reactive Al film.

    摘要翻译: 本文公开了一种制备水反应性Al膜的方法,包括以下步骤:将含有4NA1或5NA1的材料作为Al原料熔化,并以基于2〜5质量%的量添加In Al原料的质量使得材料的组成变得均匀; 根据火焰喷涂技术将所得熔融材料热喷涂在基材表面上; 并通过淬火固化喷射的熔融材料,从而形成其中In均匀分散在Al晶粒中的Al膜; 以及在表面上设置有水反应性Al膜的成膜室的构成部件。

    Method for the production of water-reactive Al film and constituent member for film-forming chamber
    7.
    发明授权
    Method for the production of water-reactive Al film and constituent member for film-forming chamber 有权
    水反应性Al膜的制造方法和成膜室的构成要素

    公开(公告)号:US08596216B2

    公开(公告)日:2013-12-03

    申请号:US12990152

    申请日:2009-04-27

    IPC分类号: C22C21/00 B05C11/00 C23C4/08

    摘要: Provided herein are a method for the production of a water-reactive Al film which comprises the steps of melting a material which comprises 4NAl or 5NAl as an Al raw material and added In in an amount ranging from 2 to 5% by mass on the basis of the mass of the Al raw material in such a manner that the composition of the material becomes uniform; thermally spraying the resulting molten material on the surface of a base material according to the electric arc spraying technique, while using Ar gas as a spraying gas; and solidifying the sprayed molten material through quenching to thus form an Al film in which In is uniformly dispersed in Al crystalline grains; and a constituent member for a film-forming chamber, which is provided, on the surface, with this water-reactive Al film.

    摘要翻译: 本文提供了一种制备水反应性Al膜的方法,其包括以下步骤:将包含4NA1或5NA1的材料作为Al原料熔化,并以基于2至5质量%的量添加In 的Al原料的质量,使得材料的组成变得均匀; 在使用Ar气体作为喷射气体的同时,根据电弧喷涂技术将所得到的熔融材料热喷涂到基材的表面上; 并通过淬火固化喷射的熔融材料,从而形成其中In均匀分散在Al晶粒中的Al膜; 以及在表面上设置有这种水反应性Al膜的成膜室的构成部件。