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公开(公告)号：US07111476B2
公开(公告)日：2006-09-26
申请号：US10139940
申请日：2002-05-07
CPC分类号： C03B19/12 , C03B19/06 , C03B19/066 , C03B20/00 , C03B2201/24
摘要： Cup-shaped porous silica preforms suitable for manufacture of large 24-inch crucibles used in Czochralski crystal-growing furnaces are produced by a unique electrophoretic casting process using a high-purity aqueous silica slip or slurry having a predetermined particle-size distribution, an average particle size of from 6 to 10 microns and a solids content of from 80 to 85 percent by weight. The slurry contains an electrolyte, such as ammonium hydroxide, has a pH of from 7.5 to 8.5, and can be wet milled at a pH of at least 7 in such manner as to provide the micronized silica particles with excellent electrophoretic mobility, thereby providing a superb process for economical mass production of large pure silica preforms using safe voltages, such as 20 to 40 volts. The electrophoretic casting apparatus can be of the type shown in FIGS. 1 and 2 and includes a permeable porous cup-shaped carbon-graphite mold (2) that serves as a positive anode and an internal reticulate or perforated cathode (3) of similar shape having a thin pervious cover means, such as the shroud 25, to prevent local dilution of the slurry at the cathode.
摘要翻译： 用于制造用于切克劳斯基晶体生长炉的大型24英寸坩埚的杯状多孔二氧化硅预制件通过使用具有预定粒度分布的高纯度水性二氧化硅滑石或浆料的独特的电泳铸造方法生产，平均 粒度为6至10微米，固体含量为80至85重量％。 该浆料含有电解质如氢氧化铵，其pH值为7.5-8.5，并且可以在pH至少为7的条件下进行湿法研磨，以使微粉化的二氧化硅颗粒具有优异的电泳迁移率，从而提供了一种 使用安全电压（例如20至40伏特）大规模生产大型纯二氧化硅预制件的卓越工艺。 电泳铸造装置可以是图1和图2所示的类型。 如图1和图2所示，并且包括用作正阳极的可渗透多孔杯形碳 - 石墨模具（2）和具有类似形状的内部网状或多孔阴极（3），其具有薄的可透过的覆盖装置，例如护罩25， 以防止浆料在阴极处的局部稀释。
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公开(公告)号：US06355587B1
公开(公告)日：2002-03-12
申请号：US08914288
申请日：1997-08-18
IPC分类号： C03B2000
CPC分类号： C03B19/12 , C03B19/06 , C03B19/066 , C03B20/00 , C03B2201/24 , Y02P40/57 , Y10S65/08
摘要： The application discloses a number of unique sintered quartz glass products together with new silica compositions and processes for making and using such products. Nitrided clear and opaque nitrided quartz products are disclosed having incredible physical properties resulting from the incorporation of very small, but effective, amounts (e.g., 25 ppm or more) of chemically bound nitrogen. Opaque quartz glass heat shields with remarkable resistance to transmission of infrared radiation are disclosed which can have a high bubble population density, such as 80 to 120 per mm2. These heat shields make possible remarkable improvement in the performance of tube furnaces and other reactors used in processing silicon wafers and other electronic components.
摘要翻译： 该申请公开了许多独特的烧结石英玻璃产品以及新的二氧化硅组合物和制备和使用这些产品的方法。 公开了氮化透明和不透明的氮化石英产物，其具有由于引入非常小但有效的化学键合氮的量（例如25ppm或更多）而产生的令人难以置信的物理性质。 公开了具有显着的抗红外辐射透射性的不透明石英玻璃隔热罩，其可以具有高的气泡总体密度，例如80至120 / mm 2。 这些隔热罩可以显着改善用于处理硅晶片和其他电子部件的管式炉和其他反应器的性能。
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公开(公告)号：US06381986B1
公开(公告)日：2002-05-07
申请号：US09481208
申请日：2000-01-11
IPC分类号： C03B1906
CPC分类号： C03B19/12 , C03B19/06 , C03B19/066 , C03B20/00 , C03B2201/24 , Y02P40/57 , Y10S65/08
摘要： A number of unique processes are disclosed for manufacture of sintered high-purity quartz glass products in which a shaped silica body or preform is made from an aqueous slurry of micronized silica particles by gel casting, slip casting or electrophoretic deposition. The silica particles may comprise a major portion by weight of crystalline silica. In one embodiment of the invention the sintered quartz glass is transparent, substantially bubble-free and suitable for scientific or optical uses. In another embodiment the porous silica preform is fired in steam to increase the hydroxyl content and then nitrided in a nitrogen-hydrogen reducing atmosphere. A minute amount of chemically-combined nitrogen in the high-purity quartz glass is sufficient to provide a tremendous improvement in physical properties and an incredible increase in the resistance to devitrification.
摘要翻译： 公开了用于制造烧结高纯度石英玻璃产品的许多独特方法，其中通过凝胶浇铸，滑移浇铸或电泳沉积由二氧化硅微粒化颗粒的水性浆料制成成形二氧化硅体或预制件。 二氧化硅颗粒可以包含大部分重量的结晶二氧化硅。 在本发明的一个实施例中，烧结石英玻璃是透明的，基本上无气泡的并且适用于科学或光学用途。 在另一个实施方案中，多孔二氧化硅预制体在蒸汽中焙烧以增加羟基含量，然后在氮 - 氢还原气氛中氮化。 高纯度石英玻璃中的少量化学结合的氮足以提供物理性能的极大改善和耐失透性的惊人增加。
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公开(公告)号：US6012304A
公开(公告)日：2000-01-11
申请号：US804234
申请日：1997-02-22
CPC分类号： C03B19/12 , C03B19/06 , C03B19/066 , C03B20/00 , C03B2201/24 , Y02P40/57 , Y10S65/08
摘要： A number of unique processes are disclosed for manufacture of sintered high-purity quartz glass products in which a shaped silica body or preform is made from an aqueous slurry of micronized silica particles by gel casting, slip casting or electrophoretic deposition. The silica particles may comprise a major portion by weight of crystalline silica. In one embodiment of the invention the sintered quartz glass is transparent, substantially bubble-free and suitable for scientific or optical uses. In another embodiment the porous silica preform is fired in steam to increase the hydroxyl content and then nitrided in a nitrogen-hydrogen reducing atmosphere. A minute amount of chemically-combined nitrogen in the high-purity quartz glass is sufficient to provide a tremendous improvement in physical properties and an incredible increase in the resistance to devitrification.
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公开(公告)号：US5389582A
公开(公告)日：1995-02-14
申请号：US767691
申请日：1991-09-30
申请人： Ted A. Loxley , John F. Blackmer
发明人： Ted A. Loxley , John F. Blackmer
CPC分类号： C30B15/10 , C03B32/02 , C03C10/0009 , C30B35/002
摘要： Unique cristobalite-seeded quartz glass crucibles and cores admirably suited for Cz crystal growing and D.S. metal casting are formed by slip casting using a slurry containing a quartz refractory composition comprising silica particles with an average particle size of from 1 to 10 microns and a minute but effective amount of micronized dispersible particles of a unique crystallization aid, such as basic aluminum acetate, which provides the glass with at least 0.005 percent by weight of evenly dispersed metallic ions. The metallic ions provide the quartz glass with nucleation sites so that heating of the glass to a temperature of from 1200.degree. C. to 1250.degree. C. permits formation of a high concentration of evenly dispersed cristobalite nuclei in the glass without causing excessive devitrification prior to cooling of the seeded glass. The desired nucleation sites can also be provided by using micronized particles of alpha quartz or alpha cristobalite.
摘要翻译： 通过使用包含平均粒度为1至10微米的二氧化硅颗粒和1分钟的石英耐火材料组合物的浆料的滑移浇铸来形成非常适用于Cz晶体生长和DS金属铸造的独特的方英石种子石英玻璃坩埚和芯， 有效量的独特结晶助剂的微粉化可分散颗粒，例如碱性乙酸铝，其为玻璃提供至少0.005重量％的均匀分散的金属离子。 金属离子为石英玻璃提供成核位置，使玻璃加热至1200℃至1250℃的温度，可以在玻璃中形成高浓度的均匀分散的方英石核，而不会在之前引起过度失透 冷却种子玻璃。 也可以通过使用α石英或α方英石的微粉化颗粒来提供所需的成核位点。
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