摘要:
Disclosed is an optical modulator including: a substrate; an insulation layer disposed on the substrate; a ribbon layer, a center portion of which is spaced apart from the insulation layer by a predetermined gap; a piezoelectric element that is disposed on the ribbon layer and allows the center portion of the ribbon layer to bend vertically; and a passivation layer that is disposed on the piezoelectric element and comprises a main passivation film.
摘要:
Disclosed is an optical modulator including: a substrate; an insulation layer disposed on the substrate; a ribbon layer, a center portion of which is spaced apart from the insulation layer by a predetermined gap; a piezoelectric element that is disposed on the ribbon layer and allows the center portion of the ribbon layer to bend vertically; and a passivation layer that is disposed on the piezoelectric element and comprises a main passivation film.
摘要:
An optical modulator having a protective film on a reflective layer is disclosed. One aspect of the invention provides an optical modulator having a protective film on a reflective layer, including a substrate; an insulation layer positioned on the substrate; a ribbon layer which has its center portion spaced apart from the insulation layer by a predetermined distance; an upper reflective layer, positioned on the center portion of the ribbon layer, which reflects or diffracts incident light; an upper-reflective-layer protective film, positioned on the upper reflective layer, which protects the upper reflective layer; and a piezoelectric element, positioned on the ribbon layer, which moves the center portion of the ribbon layer vertically. Certain embodiments of the invention prevent the deterioration and oxidation of the reflective layer surface due to heat or humidity, to maximize the light diffraction property and reliability of the optical modulator.
摘要:
An FBAR device includes a substrate structure provided with an upper surface, a seed layer formed on the upper surface of the substrate structure and made of one selected from gold (Au) and titanium (Ti), and one or more acoustic resonant portions. Each of the acoustic resonant portions includes a lower electrode film formed on the seed layer and made of molybdenum (Mo), a piezoelectric layer formed on the lower electrode film and made of aluminum nitride (AlN), and an upper electrode film formed on the piezoelectric layer.
摘要:
There is provided a duplexer device and a method of manufacturing the same. The duplexer device includes a substrate including a duplex circuit; first and second acoustic wave filter chips mounted on the substrate in a flip chip bonding manner and constituting an Rx (receiver) filter and a Tx (transmitter) filter, respectively; and a molding portion covering the first and second acoustic wave filter chips. The first and second acoustic wave filter chips are arranged by flip chip bonding, so there is no need for a separate protective structure so as to protect device functional portions of the chips. Accordingly, a compact product is realized and a manufacturing process is simplified.
摘要:
An optical modulator having a protective film on a reflective layer is disclosed. One aspect of the invention provides an optical modulator having a protective film on a reflective layer, including a substrate; an insulation layer positioned on the substrate; a ribbon layer which has its center portion spaced apart from the insulation layer by a predetermined distance; an upper reflective layer, positioned on the center portion of the ribbon layer, which reflects or diffracts incident light; an upper-reflective-layer protective film, positioned on the upper reflective layer, which protects the upper reflective layer; and a piezoelectric element, positioned on the ribbon layer, which moves the center portion of the ribbon layer vertically. Certain embodiments of the invention prevent the deterioration and oxidation of the reflective layer surface due to heat or humidity, to maximize the light diffraction property and reliability of the optical modulator.