公开(公告)号：US06278595B1

公开(公告)日：2001-08-21

申请号：US09237361

申请日：1999-01-26

Applicant: Song Sheng Xue ,  Bogdan Marius Simion ,  James Frank Dolejsi ,  Patrick Joseph Ryan

Inventor： Song Sheng Xue ,  Bogdan Marius Simion ,  James Frank Dolejsi ,  Patrick Joseph Ryan

IPC: G11B539

CPC classification number: G11B5/3932 ,  G11B5/3903

Abstract: The present invention is a magnetoresistive (MR) sensor that combines a hard-biasing material with an underlayer of cubic-titanium-tungsten to improve the stability of the MR sensor. The permanency of the hard-biasing material affects both the transverse and longitudinal biasing of the MR sensor, which in turn affects the stability of the MR sensor. The stability of the hard-biasing material is improved by combining it with an underlayer of cubic-titanium-tungsten. The underlayer enhances the hard-biasing material by improving the longitudinal magnetic anisotropy, the coercivity, and the in-plane squareness of the hard-biasing material. The combination of hard-biasing material and cubic-titanium-tungsten underlayer can be used in a variety of MR sensor embodiments, specifically an abutted junction or an overlaid structure. The method of making the abutted junction or overlaid structures is also improved by using cubic-titanium-tungsten as the underlayer of the hard-biasing material. The cubic-titanium-tungsten underlayer can be deposited at temperatures which are normal for the manufacturing of MR sensors, thus extra process steps are not needed. In addition, the process is more consistent and reliable.

Abstract translation: 本发明是一种磁阻（MR）传感器，其将硬偏压材料与立方钛钨的底层组合以提高MR传感器的稳定性。 硬偏压材料的永久性影响MR传感器的横向和纵向偏置，这又影响MR传感器的稳定性。 通过将其与立方钛 - 钨的底层组合来改善硬偏压材料的稳定性。 底层通过改善硬偏压材料的纵向磁各向异性，矫顽力和面内矩形度来增强硬偏压材料。 硬偏压材料和立方钛钨钨底层的组合可用于各种MR传感器实施例中，特别是邻接结或覆盖结构。 通过使用立方钛钨作为硬质偏压材料的底层，也可以提高制造邻接结或重叠结构的方法。 立方钛 - 钨底层可以在用于制造MR传感器的正常温度下沉积，因此不需要额外的工艺步骤。 此外，该过程更加一致和可靠。