公开(公告)号：US08563146B1

公开(公告)日：2013-10-22

申请号：US13169710

申请日：2011-06-27

Applicant: Jinqiu Zhang ,  Ying Hong ,  Hai Sun ,  Hongping Yuan ,  Guanghong Luo ,  Xiaoyu Yang ,  Hongmei Han ,  Lingyun Miao

Inventor： Jinqiu Zhang ,  Ying Hong ,  Hai Sun ,  Hongping Yuan ,  Guanghong Luo ,  Xiaoyu Yang ,  Hongmei Han ,  Lingyun Miao

IPC: G11B5/33

CPC classification number: G11B5/1278 ,  G11B5/3116 ,  G11B5/3163

Abstract: A method for fabricating a magnetic transducer having an air-bearing surface (ABS). An underlayer having a first and second regions and a bevel connecting these regions is provided. The first region is thicker and closer to the ABS than the second region. An intermediate layer conformal with the underlayer is provided. A hard mask layer having a top surface perpendicular to the ABS is formed on the intermediate layer. Part of the hard mask and intermediate layers are removed to provide a trench. The trench has a bottom surface and sidewalls having a first angle between the bottom surface and the intermediate layer and a second angle corresponding to the hard mask layer. A pole is provided in the trench. The pole has a pole tip, a yoke distal, and a bottom bevel. At least the yoke includes sidewalls having sidewall angles corresponding to the first and second angles.

Abstract translation: 一种制造具有空气轴承表面（ABS）的磁换能器的方法。 提供具有第一和第二区域的底层以及连接这些区域的斜面。 第一区域比第二区域更厚且更接近ABS。 提供与底层共形的中间层。 在中间层上形成具有垂直于ABS的顶表面的硬掩模层。 除去硬掩模和中间层的一部分以提供沟槽。 沟槽具有底表面和在底表面和中间层之间具有第一角度的侧壁和对应于硬掩模层的第二角度。 在沟槽中设置一个极点。 杆具有极尖，轭远端和底斜面。 至少轭包括具有对应于第一和第二角度的侧壁角的侧壁。