Invention Grant
US08563146B1 Method and system for providing a magnetic recording pole having a dual sidewall angle
有权
用于提供具有双重侧壁角的磁记录极的方法和系统
- Patent Title: Method and system for providing a magnetic recording pole having a dual sidewall angle
- Patent Title (中): 用于提供具有双重侧壁角的磁记录极的方法和系统
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Application No.: US13169710Application Date: 2011-06-27
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Publication No.: US08563146B1Publication Date: 2013-10-22
- Inventor: Jinqiu Zhang , Ying Hong , Hai Sun , Hongping Yuan , Guanghong Luo , Xiaoyu Yang , Hongmei Han , Lingyun Miao
- Applicant: Jinqiu Zhang , Ying Hong , Hai Sun , Hongping Yuan , Guanghong Luo , Xiaoyu Yang , Hongmei Han , Lingyun Miao
- Applicant Address: US CA Fremont
- Assignee: Western Digital (Fremont), LLC
- Current Assignee: Western Digital (Fremont), LLC
- Current Assignee Address: US CA Fremont
- Main IPC: G11B5/33
- IPC: G11B5/33

Abstract:
A method for fabricating a magnetic transducer having an air-bearing surface (ABS). An underlayer having a first and second regions and a bevel connecting these regions is provided. The first region is thicker and closer to the ABS than the second region. An intermediate layer conformal with the underlayer is provided. A hard mask layer having a top surface perpendicular to the ABS is formed on the intermediate layer. Part of the hard mask and intermediate layers are removed to provide a trench. The trench has a bottom surface and sidewalls having a first angle between the bottom surface and the intermediate layer and a second angle corresponding to the hard mask layer. A pole is provided in the trench. The pole has a pole tip, a yoke distal, and a bottom bevel. At least the yoke includes sidewalls having sidewall angles corresponding to the first and second angles.
Information query
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