公开(公告)号：US09207293B2

公开(公告)日：2015-12-08

申请号：US13466887

申请日：2012-05-08

申请人： Hideto Ando ,  Shinji Sugihara ,  Fumihito Koike ,  Kota Asatsuma

发明人： Hideto Ando ,  Shinji Sugihara ,  Fumihito Koike ,  Kota Asatsuma

IPC分类号： G11B5/127 ,  H04R31/00 ,  G01R33/09 ,  B82Y25/00 ,  H01L43/08 ,  H01L43/12

CPC分类号： G01R33/093 ,  B82Y25/00 ,  H01L43/08 ,  H01L43/12

摘要： A magnetic sensor having no sensitivity differences between sensitivity axes, and an easy manufacturing method therefor are provided. The method includes a process of forming first stacked films for a magnetoresistive element on a substrate. This element has a sensitivity axis in a certain direction and includes a self-pinned ferromagnetic pinned layer in which first and second ferromagnetic films are antiferromagnetically coupled through an antiparallel coupling layer, a nonmagnetic intermediate layer, and a soft magnetic free layer. The method further includes a process of removing a region of the first stacked films from the substrate. The remaining region of the films includes at least a region to be left to form the element. The method furthermore includes a process of forming second stacked films for a magnetoresistive element, which has a sensitivity axis in a direction different from the certain direction and has the same structure, on the exposed substrate.

摘要翻译： 提供了灵敏度轴之间没有灵敏度差的磁传感器及其制造方法。 该方法包括在基板上形成用于磁阻元件的第一层叠膜的工艺。 该元件在一定方向上具有灵敏度轴，并且包括自身固定的铁磁性钉扎层，其中第一和第二铁磁性膜通过反平行耦合层，非磁性中间层和软磁性层反铁磁耦合。 该方法还包括从衬底去除第一层叠膜的区域的工艺。 膜的剩余区域至少包括要形成元件的区域。 该方法还包括在暴露的基板上形成具有与某一方向不同的方向并且具有相同结构的灵敏度轴的用于磁阻元件的第二叠层膜的工艺。

公开(公告)号：US20120200292A1

公开(公告)日：2012-08-09

申请号：US13446264

申请日：2012-04-13

申请人： Shinji SUGIHARA ,  Fumihito KOIKE ,  Yasushi WATANABE ,  Hideto ANDO

发明人： Shinji SUGIHARA ,  Fumihito KOIKE ,  Yasushi WATANABE ,  Hideto ANDO

IPC分类号： G01R33/09

CPC分类号： H01L43/08 ,  B82Y25/00 ,  G01R33/0206 ,  G01R33/093

摘要： A magnetic sensor includes magnetoresistive elements and a soft magnetic body. The magnetoresistive elements have multi layers including a magnetic layer and a nonmagnetic layer on a substrate, and exert a magnetoresistance effect. The soft magnetic body is electrically disconnected with the magnetoresistive elements, and converts a vertical magnetic field component from the outside into a magnetic field component in a horizontal direction so as to provide the magnetoresistive elements with the horizontally converted magnetic field component. The magnetoresistive elements have a pinned magnetic layer having a fixed magnetization direction and a free magnetic layer having a variable magnetization direction. The free magnetic layer is stacked on the pinned magnetic layer with a nonmagnetic layer interposed between the free magnetic layer and the pinned magnetic layer. The magnetization directions of the pinned magnetic layers of the magnetoresistive elements are the same direction. The magnetoresistive elements form a bridge circuit.

摘要翻译： 磁传感器包括磁阻元件和软磁体。 磁阻元件具有包括基板上的磁性层和非磁性层的多层，并施加磁阻效应。 软磁体与磁阻元件电气断开，并将来自外部的垂直磁场分量在水平方向上转换成磁场分量，从而为磁阻元件提供水平转换的磁场分量。 磁阻元件具有固定磁化方向的固定磁性层和具有可变磁化方向的自由磁性层。 自由磁性层被叠置在被钉扎的磁性层上，其中非磁性层介于自由磁性层和被钉扎的磁性层之间。 磁阻元件的钉扎磁性层的磁化方向是相同的方向。 磁阻元件形成桥接电路。

公开(公告)号：US20100283457A1

公开(公告)日：2010-11-11

申请号：US12838890

申请日：2010-07-19

申请人： Hideto Ando ,  Takashi Takabatake ,  Tatsuya Saito

发明人： Hideto Ando ,  Takashi Takabatake ,  Tatsuya Saito

IPC分类号： G01R33/02 ,  H05K13/00

CPC分类号： G01R33/093 ,  B82Y25/00 ,  H01L43/08 ,  H01L43/12 ,  Y10T29/49002

摘要： A magnetoresistive element includes, in plan view, an element section and an extension region extending from an end portion of the element section; and an insulation layer is formed on the element section and the extension region. A contact hole having a recessed shape, penetrating through the insulation layer, and extending at least to the extension region is formed; an electrode pad is formed in the contact hole; a surface of the electrode pad is exposed to outside; and the electrode pad is electrically connected to the extension region. The element section and the extension region are integrally formed so as to have an identical layer configuration employing a magnetoresistive effect in which electrical resistance varies in response to external magnetic fields.

摘要翻译： 磁阻元件在平面图中包括元件部分和从元件部分的端部延伸的延伸区域; 并且在元件部分和延伸区域上形成绝缘层。 形成具有贯通绝缘层的凹陷形状并且至少延伸到延伸区域的接触孔; 在接触孔中形成电极焊盘; 电极垫的表面暴露于外部; 并且电极焊盘电连接到延伸区域。 元件部分和延伸区域一体地形成为具有采用磁阻效应的相同的层结构，其中电阻响应于外部磁场而变化。

公开(公告)号：US20100253330A1

公开(公告)日：2010-10-07

申请号：US12819870

申请日：2010-06-21

申请人： Hiromitsu Sasaki ,  Hideto Ando

发明人： Hiromitsu Sasaki ,  Hideto Ando

IPC分类号： G01R33/02

CPC分类号： G01R33/09 ,  B82Y25/00 ,  G01R33/0005 ,  G01R33/093 ,  H01L43/08

摘要： A magnetic sensor including a magnetoresistive effect element has the following structure. Element units each having an element width W1 and an element length L1 perpendicular to the element width W1 and producing a magnetoresistive effect in which electrical resistance changes in response to an external magnetic field are arranged in an element-length direction with a space therebetween. An intermediate permanent magnet layer is disposed in the space, and the element units are connected to each other with the intermediate permanent magnet layer therebetween to form a connected-element body. A plurality of the connected-element bodies are arranged so as to be adjacent to one another in an element-width direction with a space therebetween, the ends of the connected-element bodies are connected to each other with an outer permanent magnet layer therebetween to form a magnetoresistive effect element having a meandering shape.

摘要翻译： 包括磁阻效应元件的磁传感器具有以下结构。 每个具有元件宽度W1和垂直于元件宽度W1的元件长度L1并且产生其中电阻随着外部磁场变化的磁阻效应的元件单元在其间具有空间的元件长度方向排列。 中间永磁体层设置在该空间中，并且元件单元彼此连接，中间永久磁铁层之间形成连接元件体。 多个连接元件体在元件宽度方向上彼此相邻设置，并且在其之间具有间隙，连接元件体的端部之间以外部永磁体层彼此连接， 形成具有曲折形状的磁阻效应元件。

公开(公告)号：US20100079135A1

公开(公告)日：2010-04-01

申请号：US12629511

申请日：2009-12-02

申请人： Hideto Ando ,  Kiyoshi Sato

发明人： Hideto Ando ,  Kiyoshi Sato

IPC分类号： G01B7/14 ,  G01R33/00

CPC分类号： G01R33/093 ,  B82Y25/00

摘要： In a magnetic detecting device, conductive patterns are formed on a substrate in a surrounding region outside chips, except for a region between the chips. Inner connection pads formed on each of the chips are wire-bonded to their corresponding conductive patterns, so that the chips are electrically connected to each other.

摘要翻译： 在磁检测装置中，除了芯片之间的区域之外，在芯片外的周围区域中的基板上形成导电图案。 形成在每个芯片上的内部连接焊盘被引线接合到它们相应的导电图案，使得芯片彼此电连接。

公开(公告)号：US20090315552A1

公开(公告)日：2009-12-24

申请号：US12545639

申请日：2009-08-21

申请人： Hideto Ando ,  Hideki Gochou ,  Motoki Hirayama

发明人： Hideto Ando ,  Hideki Gochou ,  Motoki Hirayama

IPC分类号： G01R33/09

CPC分类号： G01D5/142

摘要： In a magnetic detection device using a magnetic resistance element, the resistance of a layer having a multi-layer structure can be easily adjusted without causing damages to the layer. A magneto-resistance layer is connected in series to a reference resistance layer, and a magneto-resistance layer is connected in series to a reference resistance layer on a substrate. A voltage is applied between a power supply layer and a grounding layer. A first output conductive layer and the reference resistance layer extend in parallel to each other so that they are partially electrically connected to each other via a connection layer. A second output conductive layer and the reference resistance layer extend in parallel to each other so that they are partially electrically connected to each other via a connection layer. Accordingly, it is possible to adjust the resistance of the reference resistance layers by selecting the respective positions of the connection layers.

摘要翻译： 在使用磁阻元件的磁检测装置中，可以容易地调整具有多层结构的层的电阻而不会对该层造成损害。 磁阻层与基准电阻层串联连接，并且磁电阻层与衬底上的参考电阻层串联连接。 在电源层和接地层之间施加电压。 第一输出导电层和参考电阻层彼此并联延伸，使得它们经由连接层部分地彼此电连接。 第二输出导电层和参考电阻层彼此并联延伸，使得它们经由连接层部分地彼此电连接。 因此，可以通过选择连接层的各个位置来调整参考电阻层的电阻。

公开(公告)号：US07345477B1

公开(公告)日：2008-03-18

申请号：US11678846

申请日：2007-02-26

申请人： Hideto Ando ,  Kiyoshi Sato ,  Hiroyuki Nakada

发明人： Hideto Ando ,  Kiyoshi Sato ,  Hiroyuki Nakada

IPC分类号： G01R33/02 ,  H01L29/82

CPC分类号： G01R33/093 ,  B82Y25/00 ,  H01L43/08

摘要： In a magnetic detection device for obtaining an output from between a variable resistance element using the magnetoresistance effect and a reference resistance element, a balance between resistance values in the device can be easily adjusted in a wide range. A voltage is applied to a resistance adjusting unit, a reference resistance element, and a variable resistance element, which are serially connected, and is also applied to another variable resistance element, another reference resistance element, and another resistance adjusting unit, which are serially connected. When subjected to a magnetic field of a predetermined size, resistance values of the variable resistance elements change, and as a result, the potentials of output terminals change. Each of the resistance adjusting units includes serially connected parallel portions each including a plurality of parallel connected resistance elements. The resistance value of the resistance adjusting unit can be changed by bringing one of the parallel connected resistance elements into a non-conduction state.

摘要翻译： 在用于获得使用磁阻效应的可变电阻元件的输出与参考电阻元件之间的输出的磁性检测装置中，可以容易地在宽范围内调节器件中的电阻值之间的平衡。 电压被施加到串联连接的电阻调节单元，参考电阻元件和可变电阻元件，并且还被施加到串联的另一个可变电阻元件，另一个参考电阻元件和另一个电阻调节单元 连接的。 当受到预定尺寸的磁场时，可变电阻元件的电阻值改变，结果导致输出端子的电位变化。 每个电阻调节单元包括串联连接的并联部分，每个并联部分包括多个平行连接的电阻元件。 可以通过使并联的电阻元件中的一个成为非导通状态来改变电阻调节单元的电阻值。

公开(公告)号：US20080054890A1

公开(公告)日：2008-03-06

申请号：US11679098

申请日：2007-02-26

申请人： Shinichi Sasaki ,  Motoki Hirayama ,  Hideto Ando ,  Yoshito Sasaki ,  Daigo Aoki

发明人： Shinichi Sasaki ,  Motoki Hirayama ,  Hideto Ando ,  Yoshito Sasaki ,  Daigo Aoki

IPC分类号： G01R33/09

CPC分类号： G01R33/093 ,  B82Y25/00 ,  G01R33/0052

摘要： A magnetic detection device has stable characteristics having an area of a resist layer covering an insulating passivation layer, forming the magnetic detection element and a connection layer on a small stepped surface with high-precision, and preventing the resist layer from peeling, thereby providing a method of manufacturing the magnetic detection device. A resist layer 42 is overlapped through the insulating passivation layer 41 on an interconnection layer 35.

摘要翻译： 磁性检测装置具有稳定的特性，其具有覆盖绝缘钝化层的抗蚀剂层的面积，高精度地形成磁性检测元件和小型台阶表面上的连接层，并且防止抗蚀剂层剥离，从而提供 制造磁检测装置的方法。 抗蚀剂层42通过互连层35上的绝缘钝化层41重叠。

公开(公告)号：US07855556B2

公开(公告)日：2010-12-21

申请号：US12819870

申请日：2010-06-21

申请人： Hiromitsu Sasaki ,  Hideto Ando

发明人： Hiromitsu Sasaki ,  Hideto Ando

IPC分类号： G01R33/09 ,  H01L43/08

CPC分类号： G01R33/09 ,  B82Y25/00 ,  G01R33/0005 ,  G01R33/093 ,  H01L43/08

摘要： A magnetic sensor including a magnetoresistive effect element has the following structure. Element units each having an element width W1 and an element length L1 perpendicular to the element width W1 and producing a magnetoresistive effect in which electrical resistance changes in response to an external magnetic field are arranged in an element-length direction with a space therebetween. An intermediate permanent magnet layer is disposed in the space, and the element units are connected to each other with the intermediate permanent magnet layer therebetween to form a connected-element body. A plurality of the connected-element bodies are arranged so as to be adjacent to one another in an element-width direction with a space therebetween, the ends of the connected-element bodies are connected to each other with an outer permanent magnet layer therebetween to form a magnetoresistive effect element having a meandering shape.

摘要翻译： 包括磁阻效应元件的磁传感器具有以下结构。 每个具有元件宽度W1和垂直于元件宽度W1的元件长度L1并且产生其中电阻随着外部磁场变化的磁阻效应的元件单元在其间具有空间的元件长度方向排列。 中间永磁体层设置在该空间中，并且元件单元彼此连接，中间永久磁铁层之间形成连接元件体。 多个连接元件体在元件宽度方向上彼此相邻设置，并且在其之间具有间隙，连接元件体的端部之间以外部永磁体层彼此连接， 形成具有曲折形状的磁阻效应元件。

公开(公告)号：US07592805B2

公开(公告)日：2009-09-22

申请号：US11679015

申请日：2007-02-26

申请人： Hideto Ando ,  Hideki Gochou ,  Motoki Hirayama

发明人： Hideto Ando ,  Hideki Gochou ,  Motoki Hirayama

IPC分类号： G01R33/02

CPC分类号： G01D5/142

摘要： In a magnetic detection device using a magnetic resistance element, the resistance of a layer having a multi-layer structure can be easily adjusted without causing damages to the layer. A magneto-resistance layer is connected in series to a reference resistance layer, and a magneto-resistance layer is connected in series to a reference resistance layer on a substrate. A voltage is applied between a power supply layer and a grounding layer. A first output conductive layer and the reference resistance layer extend in parallel to each other so that they are partially electrically connected to each other via a connection layer. A second output conductive layer and the reference resistance layer extend in parallel to each other so that they are partially electrically connected to each other via a connection layer. Accordingly, it is possible to adjust the resistance of the reference resistance layers by selecting the respective positions of the connection layers.

摘要翻译： 在使用磁阻元件的磁检测装置中，可以容易地调整具有多层结构的层的电阻而不会对该层造成损害。 磁阻层与参考电阻层串联连接，并且磁阻层与衬底上的参考电阻层串联连接。 在电源层和接地层之间施加电压。 第一输出导电层和参考电阻层彼此并联延伸，使得它们经由连接层部分地彼此电连接。 第二输出导电层和参考电阻层彼此并联延伸，使得它们经由连接层部分地彼此电连接。 因此，可以通过选择连接层的各个位置来调整参考电阻层的电阻。