公开(公告)号：US08516906B2

公开(公告)日：2013-08-27

申请号：US13475579

申请日：2012-05-18

申请人： Eiji Umetsu ,  Masahiko Ishizone ,  Motoki Hirayama ,  Hideki Gochou

发明人： Eiji Umetsu ,  Masahiko Ishizone ,  Motoki Hirayama ,  Hideki Gochou

IPC分类号： G01L1/04 ,  G01L1/10 ,  H01L21/00

CPC分类号： G01L1/18 ,  G01L5/162

摘要： A sensor substrate includes a plurality of piezoresistance elements. The electrical resistance of each piezoresistance element changes in accordance with an amount of displacement of a displacement portion displaced by an external load applied through a pressure receiving unit. A base substrate supports the sensor substrate. The sensor substrate and the base substrate each include a support supporting the displacement portion such that the displacement portion can be displaced and a plurality of electrically connecting portions electrically connected to the plurality of piezoresistance elements. The supports of the sensor and base substrates are joined to each other and the plurality of electrically connecting portions of the sensor and base substrates are joined to each other. Furthermore, in each of the sensor and base substrates, either the support or the plurality of electrically connecting portions or both extend to the periphery of the sensor substrate or the base substrate.

摘要翻译： 传感器基板包括多个压阻元件。 每个压电元件的电阻根据通过压力接收单元施加的外部负载而移位的位移部分的位移量而变化。 基底支撑传感器基底。 传感器基板和基板各自包括支撑位移部分的支撑件，使得位移部分可以移位，并且多个电连接部分电连接到多个压阻元件。 传感器和基底基板的支撑件彼此接合，并且传感器和基底基板的多个电连接部分彼此接合。 此外，在每个传感器和基底基板中，支撑件或多个电连接部分或两者都延伸到传感器基板或基底基板的周边。

公开(公告)号：USD683634S1

公开(公告)日：2013-06-04

申请号：US29417020

申请日：2012-03-29

申请人： Yasuo Hayakawa ,  Satoshi Waga ,  Hideki Kamimura ,  Masaya Yamatani ,  Motoki Hirayama

设计人： Yasuo Hayakawa ,  Satoshi Waga ,  Hideki Kamimura ,  Masaya Yamatani ,  Motoki Hirayama

公开(公告)号：US07592805B2

公开(公告)日：2009-09-22

申请号：US11679015

申请日：2007-02-26

申请人： Hideto Ando ,  Hideki Gochou ,  Motoki Hirayama

发明人： Hideto Ando ,  Hideki Gochou ,  Motoki Hirayama

IPC分类号： G01R33/02

CPC分类号： G01D5/142

摘要： In a magnetic detection device using a magnetic resistance element, the resistance of a layer having a multi-layer structure can be easily adjusted without causing damages to the layer. A magneto-resistance layer is connected in series to a reference resistance layer, and a magneto-resistance layer is connected in series to a reference resistance layer on a substrate. A voltage is applied between a power supply layer and a grounding layer. A first output conductive layer and the reference resistance layer extend in parallel to each other so that they are partially electrically connected to each other via a connection layer. A second output conductive layer and the reference resistance layer extend in parallel to each other so that they are partially electrically connected to each other via a connection layer. Accordingly, it is possible to adjust the resistance of the reference resistance layers by selecting the respective positions of the connection layers.

摘要翻译： 在使用磁阻元件的磁检测装置中，可以容易地调整具有多层结构的层的电阻而不会对该层造成损害。 磁阻层与参考电阻层串联连接，并且磁阻层与衬底上的参考电阻层串联连接。 在电源层和接地层之间施加电压。 第一输出导电层和参考电阻层彼此并联延伸，使得它们经由连接层部分地彼此电连接。 第二输出导电层和参考电阻层彼此并联延伸，使得它们经由连接层部分地彼此电连接。 因此，可以通过选择连接层的各个位置来调整参考电阻层的电阻。

公开(公告)号：US20060176359A1

公开(公告)日：2006-08-10

申请号：US11339370

申请日：2006-01-25

申请人： Shinya Yokoyama ,  Motoki Hirayama

发明人： Shinya Yokoyama ,  Motoki Hirayama

IPC分类号： B41J2/335

CPC分类号： B41J2/3351 ,  H01L2224/05554 ,  H01L2224/48137 ,  Y10T29/49083

摘要： A thermal head includes a large number of heating resistors disposed at a regular interval, individual conductors individually connected to each of the heating resistors, and common conductors connected to each of the heating resistors in common, the individual conductors and the common conductors serving as conductors for supplying the heating resistors with a current. In the thermal head, an underlayer having a large number of irregularities is provided and a conductor layer is provided on the underlayer along the irregularities. Thereby, bonding pads that are composed of the conductor layer and that have irregularities are provided as electrodes of the individual conductors or the common conductors.

摘要翻译： 热敏头包括大量以规则间隔布置的加热电阻器，单独连接到每个加热电阻器的各个导体以及连接到每个加热电阻器的公共导体，各个导体和用作导体的公共导体 用于向加热电阻器提供电流。 在热敏头中，设置具有大量不规则的底层，并且沿着凹凸设置在底层上设置导体层。 由此，由导体层构成且具有凹凸的接合焊盘作为各导体或共用导体的电极设置。

公开(公告)号：US07324126B2

公开(公告)日：2008-01-29

申请号：US11339370

申请日：2006-01-25

申请人： Shinya Yokoyama ,  Motoki Hirayama

发明人： Shinya Yokoyama ,  Motoki Hirayama

IPC分类号： B41J2/335

CPC分类号： B41J2/3351 ,  H01L2224/05554 ,  H01L2224/48137 ,  Y10T29/49083

摘要： A thermal head includes a large number of heating resistors disposed at a regular interval, individual conductors individually connected to each of the heating resistors, and common conductors connected to each of the heating resistors in common, the individual conductors and the common conductors serving as conductors for supplying the heating resistors with a current. In the thermal head, an underlayer having a large number of irregularities is provided and a conductor layer is provided on the underlayer along the irregularities. Thereby, bonding pads that are composed of the conductor layer and that have irregularities are provided as electrodes of the individual conductors or the common conductors.

摘要翻译： 热敏头包括大量以规则间隔布置的加热电阻器，单独连接到每个加热电阻器的各个导体以及连接到每个加热电阻器的公共导体，各个导体和用作导体的公共导体 用于向加热电阻器提供电流。 在热敏头中，设置具有大量不规则的底层，并且沿着凹凸设置在底层上设置导体层。 由此，由导体层构成且具有凹凸的接合焊盘作为各导体或共用导体的电极设置。

公开(公告)号：US20090315552A1

公开(公告)日：2009-12-24

申请号：US12545639

申请日：2009-08-21

申请人： Hideto Ando ,  Hideki Gochou ,  Motoki Hirayama

发明人： Hideto Ando ,  Hideki Gochou ,  Motoki Hirayama

IPC分类号： G01R33/09

CPC分类号： G01D5/142

摘要： In a magnetic detection device using a magnetic resistance element, the resistance of a layer having a multi-layer structure can be easily adjusted without causing damages to the layer. A magneto-resistance layer is connected in series to a reference resistance layer, and a magneto-resistance layer is connected in series to a reference resistance layer on a substrate. A voltage is applied between a power supply layer and a grounding layer. A first output conductive layer and the reference resistance layer extend in parallel to each other so that they are partially electrically connected to each other via a connection layer. A second output conductive layer and the reference resistance layer extend in parallel to each other so that they are partially electrically connected to each other via a connection layer. Accordingly, it is possible to adjust the resistance of the reference resistance layers by selecting the respective positions of the connection layers.

摘要翻译： 在使用磁阻元件的磁检测装置中，可以容易地调整具有多层结构的层的电阻而不会对该层造成损害。 磁阻层与基准电阻层串联连接，并且磁电阻层与衬底上的参考电阻层串联连接。 在电源层和接地层之间施加电压。 第一输出导电层和参考电阻层彼此并联延伸，使得它们经由连接层部分地彼此电连接。 第二输出导电层和参考电阻层彼此并联延伸，使得它们经由连接层部分地彼此电连接。 因此，可以通过选择连接层的各个位置来调整参考电阻层的电阻。

公开(公告)号：US20080054890A1

公开(公告)日：2008-03-06

申请号：US11679098

申请日：2007-02-26

申请人： Shinichi Sasaki ,  Motoki Hirayama ,  Hideto Ando ,  Yoshito Sasaki ,  Daigo Aoki

发明人： Shinichi Sasaki ,  Motoki Hirayama ,  Hideto Ando ,  Yoshito Sasaki ,  Daigo Aoki

IPC分类号： G01R33/09

CPC分类号： G01R33/093 ,  B82Y25/00 ,  G01R33/0052

摘要： A magnetic detection device has stable characteristics having an area of a resist layer covering an insulating passivation layer, forming the magnetic detection element and a connection layer on a small stepped surface with high-precision, and preventing the resist layer from peeling, thereby providing a method of manufacturing the magnetic detection device. A resist layer 42 is overlapped through the insulating passivation layer 41 on an interconnection layer 35.

摘要翻译： 磁性检测装置具有稳定的特性，其具有覆盖绝缘钝化层的抗蚀剂层的面积，高精度地形成磁性检测元件和小型台阶表面上的连接层，并且防止抗蚀剂层剥离，从而提供 制造磁检测装置的方法。 抗蚀剂层42通过互连层35上的绝缘钝化层41重叠。

公开(公告)号：US20120234112A1

公开(公告)日：2012-09-20

申请号：US13475579

申请日：2012-05-18

申请人： Eiji UMETSU ,  Masahiko ISHIZONE ,  Motoki HIRAYAMA ,  Hideki GOCHOU

发明人： Eiji UMETSU ,  Masahiko ISHIZONE ,  Motoki HIRAYAMA ,  Hideki GOCHOU

IPC分类号： G01L1/18 ,  H01L41/22

CPC分类号： G01L1/18 ,  G01L5/162

摘要： A sensor substrate includes a plurality of piezoresistance elements. The electrical resistance of each piezoresistance element changes in accordance with an amount of displacement of a displacement portion displaced by an external load applied through a pressure receiving unit. A base substrate supports the sensor substrate. The sensor substrate and the base substrate each include a support supporting the displacement portion such that the displacement portion can be displaced and a plurality of electrically connecting portions electrically connected to the plurality of piezoresistance elements. The supports of the sensor and base substrates are joined to each other and the plurality of electrically connecting portions of the sensor and base substrates are joined to each other. Furthermore, in each of the sensor and base substrates, either the support or the plurality of electrically connecting portions or both extend to the periphery of the sensor substrate or the base substrate.

摘要翻译： 传感器基板包括多个压阻元件。 每个压电元件的电阻根据通过压力接收单元施加的外部负载而移位的位移部分的位移量而变化。 基底支撑传感器基底。 传感器基板和基板各自包括支撑位移部分的支撑件，使得位移部分可以移位，并且多个电连接部分电连接到多个压阻元件。 传感器和基底基板的支撑件彼此接合，并且传感器和基底基板的多个电连接部分彼此接合。 此外，在每个传感器和基底基板中，支撑件或多个电连接部分或两者都延伸到传感器基板或基底基板的周边。

公开(公告)号：US20080054888A1

公开(公告)日：2008-03-06

申请号：US11679015

申请日：2007-02-26

申请人： Hideto Ando ,  Hideki Gochou ,  Motoki Hirayama

发明人： Hideto Ando ,  Hideki Gochou ,  Motoki Hirayama

IPC分类号： G01D5/12

CPC分类号： G01D5/142

摘要： In a magnetic detection device using a magnetic resistance element, the resistance of a layer having a multi-layer structure can be easily adjusted without causing damages to the layer. A magneto-resistance layer is connected in series to a reference resistance layer, and a magneto-resistance layer is connected in series to a reference resistance layer on a substrate. A voltage is applied between a power supply layer and a grounding layer. A first output conductive layer and the reference resistance layer extend in parallel to each other so that they are partially electrically connected to each other via a connection layer. A second output conductive layer and the reference resistance layer extend in parallel to each other so that they are partially electrically connected to each other via a connection layer. Accordingly, it is possible to adjust the resistance of the reference resistance layers by selecting the respective positions of the connection layers.

摘要翻译： 在使用磁阻元件的磁检测装置中，可以容易地调整具有多层结构的层的电阻而不会对该层造成损害。 磁阻层与基准电阻层串联连接，并且磁电阻层与衬底上的参考电阻层串联连接。 在电源层和接地层之间施加电压。 第一输出导电层和参考电阻层彼此并联延伸，使得它们经由连接层部分地彼此电连接。 第二输出导电层和参考电阻层彼此并联延伸，使得它们经由连接层部分地彼此电连接。 因此，可以通过选择连接层的各个位置来调整参考电阻层的电阻。