公开(公告)号：US06859482B1

公开(公告)日：2005-02-22

申请号：US09510538

申请日：2000-02-22

Applicant: Claus Strowitzki ,  Hans Kodeda

Inventor： Claus Strowitzki ,  Hans Kodeda

IPC: H01S3/038 ,  H01S3/225 ,  H01S3/097

CPC classification number: H01S3/038 ,  H01S3/225

Abstract: A laser discharge unit is provided. The discharge unit includes an elongated electrode plate, an elongated high voltage electrode, and an elongated ground electrode. Both the high voltage electrode and the ground electrode are mounted to the electrode plate in a spaced-apart relationship with their longitudinal axis being substantially parallel to thereby define a gas discharge gap between the electrodes. The gas laser discharge unit may be removably mounted as a module into a gas laser such as an excimer laser.

Abstract translation: 提供了一种激光放电单元。 放电单元包括细长电极板，细长高压电极和细长接地电极。 高压电极和接地电极都以与其纵向轴线间隔开的关系安装到电极板，其基本上平行，从而限定了电极之间的气体放电间隙。 气体激光放电单元可以作为模块可拆卸地安装到诸如准分子激光器的气体激光器中。

公开(公告)号：US06480517B1

公开(公告)日：2002-11-12

申请号：US09510017

申请日：2000-02-22

Applicant: Claus Strowitzki ,  Hans Kodeda

Inventor： Claus Strowitzki ,  Hans Kodeda

IPC: H01S322

CPC classification number: H01S3/038 ,  H01S3/225

Abstract: An electrode arrangement for a gas laser is provided. The electrode arrangement includes an elongated high voltage electrode, an elongated ground electrode disposed adjacent to the high voltage electrode, a discharge gap between the two electrodes an insulator element, a high voltage conductor having a first end connected to the high voltage electrode and extending through the insulator element, and a shadow plate interposed between the discharge gap and the insulator element. The electrode arrangement may be employed in a variety of gas lasers, including excimer lasers.

Abstract translation: 提供了一种用于气体激光器的电极装置。 电极装置包括细长的高压电极，与高压电极相邻设置的细长接地电极，两个电极之间的放电间隙，绝缘体元件，高压导体，其第一端连接到高电压电极并延伸穿过 绝缘体元件和插入在放电间隙和绝缘体元件之间的阴影板。 电极装置可用于各种气体激光器，包括准分子激光器。

公开(公告)号：US06804284B1

公开(公告)日：2004-10-12

申请号：US09510666

申请日：2000-02-22

Applicant: Hans Kodeda ,  Helmut Frowein

Inventor： Hans Kodeda ,  Helmut Frowein

IPC: H01S322

CPC classification number: G02B7/00 ,  H01S3/034 ,  H01S3/225

Abstract: An optical element holding and extraction device is provided. The device includes an optical element, an optical element holder having a tubular gripping portion and a tubular extraction portion connected at one end to the tubular gripping portion, and a retainer that is slideably carried on the tubular extraction portion. The diameter of the tubular extraction portion is less than the tubular gripping portion. In addition, the tubular gripping portion grips the peripheral edge of the optical clement. The device may be used in a variety of gas lasers, including excimer lasers.

Abstract translation: 提供了一种光学元件保持和提取装置。 该装置包括光学元件，具有管状夹持部分的光学元件保持器和在一端连接到管状夹持部分的管状提取部分，以及可滑动地承载在管状提取部分上的保持器。 管状提取部分的直径小于管状夹持部分。 此外，管状夹持部分夹持光学元件的周缘。 该装置可用于各种气体激光器，包括准分子激光器。

公开(公告)号：US06522679B1

公开(公告)日：2003-02-18

申请号：US09510539

申请日：2000-02-22

Applicant: Claus Strowitzki ,  Hans Kodeda

Inventor： Claus Strowitzki ,  Hans Kodeda

IPC: H01S3097

CPC classification number: H01S3/038 ,  H01S3/225

Abstract: A gas laser discharge unit is provided. The discharge unit includes an elongated electrode plate having a plurality of spaced-apart holes therein and a plurality of coaxial high voltage ducts. Each duct extends through one of the holes in the electrode plate and includes a central conductive core and an insulator element arranged around the core to electrically insulate said core from the electrode plate. An elongated high voltage electrode is electrically connected to the cores of the ducts. In addition, an elongated ground electrode is positioned to oppose the high voltage electrode and form a gas discharge gap therebetween. The ground electrode is electrically connected to the electrode plate. The gas laser discharge unit may be removably mounted as a module into a gas laser tube, such as an excimer laser tube.

Abstract translation: 提供气体激光放电单元。 放电单元包括其中具有多个间隔开的孔的细长电极板和多个同轴高压导管。 每个管道延伸穿过电极板中的一个孔，并且包括中心导电芯和布置在芯周围的绝缘体元件，以使所述芯与电极板电绝缘。 细长的高压电极电连接到管道的芯。 此外，细长的接地电极被定位成与高压电极相对并在其间形成气体放电间隙。 接地电极与电极板电连接。 气体激光放电单元可以作为模块可拆卸地安装到诸如准分子激光管的气体激光管中。

公开(公告)号：US06603790B1

公开(公告)日：2003-08-05

申请号：US09511649

申请日：2000-02-22

Applicant: Hans Kodeda ,  Helmut Frowein ,  Claus Strowitzki ,  Alexander Hohla

Inventor： Hans Kodeda ,  Helmut Frowein ,  Claus Strowitzki ,  Alexander Hohla

IPC: H01S303

CPC classification number: H01S3/036 ,  H01S3/225

Abstract: A gas laser and a dedusting unit thereof are provided. The gas laser comprises a tube containing a gas mixture including a laser gas and preferably a buffer gas. The tube preferably comprises a cylindrical inner wall. A discharge unit is inserted into the tube and has two elongated electrodes defining an electrical gas discharge gap therebetween for providing an electric gas discharge between said electrodes to generate laser light. A circulation means is included in the tube for generating a gas flow within the tube that passes through the discharge gap. A dedusting unit is mounted along the inner cylindrical wall of the tube in such a manner that only a bypass flow which is a part of the gas flow within the tube passes through the dedusting unit.

Abstract translation: 提供气体激光器及其除尘单元。 气体激光器包括含有包括激光气体和优选缓冲气体的气体混合物的管。 管优选地包括圆柱形内壁。 放电单元插入管中并具有两个细长电极，在其间限定电气放电间隙，以在所述电极之间提供电气放电以产生激光。 管中包括循环装置，用于在管内产生通过放电间隙的气流。 沿着管的内圆筒壁安装除尘单元，使得只有作为管内气体的一部分的旁通流通过除尘单元。

公开(公告)号：US06493375B1

公开(公告)日：2002-12-10

申请号：US09511648

申请日：2000-02-22

Applicant: Hans Kodeda ,  Helmut Frowein ,  Claus Strowitzki ,  Alexander Hohla

Inventor： Hans Kodeda ,  Helmut Frowein ,  Claus Strowitzki ,  Alexander Hohla

IPC: H01S322

CPC classification number: H01S3/086 ,  H01S3/034 ,  H01S3/225

Abstract: An adjustable mounting unit for an optical element of a gas laser is provided. The typical gas laser for which the mounting unit will be used comprises a tube having a first end wall at one end and a second end wall at the other end, an optical axis extending longitudinally through the tube, and a port in the first end wall through which the optical axis passes. The mounting unit includes a rigid support structure having an aperture therein and an optical element mounted within the aperture. In addition, at least three adjustable mounting devices are used to attach the support structure to the laser tube. The mounting points are preferably selected so that they are displaced in an axial direction by substantially the same amount due to dimensional changes in the laser occurring during operation of the laser. When attached to the laser, the rigid support is spaced apart from the laser tube to allow for the adjustment of the angular positioning of the optical element. Furthermore, the aperture and optical element are disposed transverse to the optical axis and are aligned with the optical axis. Adjustment of the adjustable mounting devices changes the angular position of the optical element relative to the optical axis.

Abstract translation: 提供了一种用于气体激光器的光学元件的可调安装单元。 将使用安装单元的典型的气体激光器包括管，其一端具有第一端壁，在另一端具有第二端壁，纵向延伸穿过管的光轴和第一端壁中的端口 光轴通过该光轴。 安装单元包括其中具有孔的刚性支撑结构和安装在孔内的光学元件。 另外，使用至少三个可调整的安装装置将支撑结构附接到激光管。 优选地选择安装点，使得它们由于在激光器的操作期间发生的激光器的尺寸变化而在轴向方向上移位基本相同的量。 当附接到激光器时，刚性支撑件与激光管间隔开以允许调整光学元件的角度定位。 此外，孔径和光学元件横向于光轴布置并且与光轴对准。 可调安装装置的调节改变了光学元件相对于光轴的角度位置。