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21 条记录 (耗时 0.013 秒)

    Diffusion pump with two inlets and two stage pumping capability
    3.
    发明授权
    Diffusion pump with two inlets and two stage pumping capability 失效
    扩散泵具有两个入口和两级泵送能力

    公开(公告)号：US5913662A

    公开(公告)日：1999-06-22

    申请号：US799890

    申请日：1997-02-13

    申请人： Graeme Huntley

    发明人： Graeme Huntley

    IPC分类号： F04B37/00 ,  F04F9/00 ,  F04B9/12

    CPC分类号： F04F9/00

    摘要： A diffusion pump for evacuating a chamber is provided with a hollow outer body including an outlet for connection to a backing pump and a base for containing a working fluid. A vapor chimney extends from the base within the hollow outer body and includes at least two spaced apart jet stages. The working fluid is heated when present in said base. Two or more inlets are formed in the hollow outer body for communicating with said at least one chamber to be evacuated. The presence of the two inlets provides the possibility of differential pumping.

    摘要翻译： 用于抽空室的扩散泵设置有中空的外体，其包括用于连接到背衬泵的出口和用于容纳工作流体的基座。 蒸气烟囱在空心的外部体内从基部延伸并且包括至少两个间隔开的喷射级。 当存在于所述底座中时，工作流体被加热。 在中空外体中形成两个或更多个入口，用于与所述至少一个待抽真空室连通。 两个入口的存在提供了差分泵送的可能性。

    Pump apparatus for semiconductor processing
    4.
    发明申请
    Pump apparatus for semiconductor processing 审中-公开
    用于半导体加工的泵装置

    公开(公告)号：US20070081893A1

    公开(公告)日：2007-04-12

    申请号：US11244744

    申请日：2005-10-06

    申请人： Graeme Huntley

    发明人： Graeme Huntley

    IPC分类号： F04D29/04

    CPC分类号： F04D19/042 ,  F04D17/168 ,  F04D19/046 ,  F04D23/008

    摘要： The invention relates to a pump apparatus for use in semiconductor processing. The apparatus may include a single pump configured to transition a substance flow from about molecular pressure to about atmospheric pressure.

    摘要翻译： 本发明涉及一种用于半导体加工的泵装置。 该装置可以包括构造成将物质流从约分子压力转变为大气压力的单个泵。

    Vacuum pumping system and method of controlling the same
    6.
    发明授权
    Vacuum pumping system and method of controlling the same 有权
    真空泵系统及其控制方法

    公开(公告)号：US07101155B2

    公开(公告)日：2006-09-05

    申请号：US10438427

    申请日：2003-05-15

    申请人： Derek Graeme Madgewick Savidge ,  Neil Turner ,  Graeme Huntley

    发明人： Derek Graeme Madgewick Savidge ,  Neil Turner ,  Graeme Huntley

    IPC分类号： F04B49/22 ,  C23C14/00 ,  E03B5/00

    CPC分类号： F04C28/24 ,  F04B37/14 ,  F04C25/02 ,  F04C28/065 ,  F04C2220/10 ,  F04C2220/30 ,  F04C2270/02 ,  Y10T137/86083

    摘要： A vacuum pump system (10; 36; 46) for pumping gas from an enclosure (12) comprises: a vacuum pump unit (14) having a pump inlet (16) connectable with an outlet (18) of such an enclosure and a pump outlet (20) for exhausting gas; and a chamber (22; 50) selectively connectable with the pump inlet and the pump outlet, such that, in use, in a first state gas can be pumped from the chamber to the pump inlet by the vacuum pump unit and in a second state gas can be evacuated from the pump outlet to the chamber to reduce pressure at the pump outlet.A method of controlling the vacuum pump system (10; 36; 46) comprises a first step of pumping gas from the chamber to the pump inlet using the vacuum pump unit and a second step of allowing gas to be evacuated from the pump outlet to the chamber to reduce pressure at the pump outlet.

    摘要翻译： 一种用于从外壳（12）泵送气体的真空泵系统（10; 36; 46）包括：真空泵单元（14），其具有可与这种外壳的出口（18）连接的泵入口（16） 用于排气的出口（20）; 以及可选择性地与泵入口和泵出口连接的腔室（22; 50），使得在使用中，在第一状态下，可以通过真空泵单元将气体从腔室泵送到泵入口，并且处于第二状态 气体可以从泵出口抽空到室以减小泵出口处的压力。 控制真空泵系统（10; 36; 46）的方法包括使用真空泵单元将气体从腔室泵送到泵入口的第一步骤，以及允许气体从泵出口排出到第二步骤 以减少泵出口处的压力。

    Equipment skid
    7.
    发明授权
    Equipment skid 有权
    设备打滑

    公开(公告)号：US06397883B1

    公开(公告)日：2002-06-04

    申请号：US09464184

    申请日：1999-12-16

    申请人： Graeme Huntley ,  Kate Wilson

    发明人： Graeme Huntley ,  Kate Wilson

    IPC分类号： F16K2708

    CPC分类号： H01L21/67017 ,  Y10T137/6851 ,  Y10T137/6881 ,  Y10T137/7062 ,  Y10T137/86083

    摘要： An equipment skid for mounting ancillary equipment to support a semiconductor processing tool. The equipment skid comprises a plurality of equipment sections and a service section. The ancillary equipment is mounted within the equipment sections and the plurality of equipment and service sections are connected to one another in an in-line relationship to define a framework to allow external connections between the ancillary equipment and the semiconductor processing tool to pass through a region overlying the footprint of the service section. The equipment and service sections are preferably covered by an enclosure to contain leakage.

    摘要翻译： 用于安装辅助设备以支持半导体加工工具的设备滑道。 设备滑行包括多个设备部分和服务部分。 辅助设备安装在设备部分内，并且多个设备和维修部分以线内关系彼此连接，以限定框架，以允许辅助设备和半导体加工工具之间的外部连接通过一个区域 覆盖服务部分的足迹。 设备和维修部分优选地被外壳覆盖以容纳泄漏。

    Conveyance vehicles
    8.
    发明授权
    Conveyance vehicles 失效
    运输车辆

    公开(公告)号：US6095234A

    公开(公告)日：2000-08-01

    申请号：US807841

    申请日：1997-02-26

    申请人： Graeme Huntley

    发明人： Graeme Huntley

    IPC分类号： B62B3/10 ,  H01J9/385 ,  H01J9/46 ,  F28D15/00

    CPC分类号： H01J9/385 ,  Y10S277/93

    摘要： A conveyance vehicle for the transportation of a vessel to be evacuated includes a heat sink in the form of one or more heat pipes located adjacent a seal forming part of a gripper assembly. The heat sink inhibits degradation of the seal when subjected to elevated temperatures consequent to engaging the neck of the vessel to be evacuated.

    摘要翻译： 用于输送要抽真空的容器的输送车辆包括形成一个或多个热管的形式的散热器，所述散热器邻近形成夹持器组件的一部分的密封件。 当散热器接受要抽真空的容器的颈部时，散热器会受到高温的影响。

    Ejector Pump
    9.
    发明申请
    Ejector Pump 有权
    喷射泵

    公开(公告)号：US20120148421A1

    公开(公告)日：2012-06-14

    申请号：US11883896

    申请日：2006-01-12

    申请人： Graeme Huntley

    发明人： Graeme Huntley

    IPC分类号： F04B23/04

    CPC分类号： F04F5/20 ,  F04C19/00 ,  F04C23/006 ,  F04F5/54

    摘要： An ejector pump (100) comprises a chamber having a gas mixing portion (108) and a diffuser portion (112) . An inlet (10S) conveys a gas stream into the gas mixing portion, and an outlet (114) conveys the gas stream from the diffuser portion. To provide a motive fluid for the pump, a stream of plasma is ejected through a nozzle (116) into the gas mixing portion (108) of the chamber. Reactive species contained within the plasma stream react with a component of the gas stream to provide simultaneous pumping and abatement of the gas stream.

    摘要翻译： 喷射泵（100）包括具有气体混合部分（108）和扩散器部分（112）的室。 入口（10S）将气流输送到气体混合部分中，并且出口（114）输送来自扩散器部分的气流。 为了为泵提供运动流体，等离子体流通过喷嘴（116）喷射到室的气体混合部分（108）中。 包含在等离子体流内的活性物质与气流的组分反应以提供气流的同时泵送和减少。

    Vacuum pump with a continuous ignition source
    10.
    发明授权
    Vacuum pump with a continuous ignition source 有权
    具有连续点火源的真空泵

    公开(公告)号：US07819635B2

    公开(公告)日：2010-10-26

    申请号：US10594402

    申请日：2005-03-08

    申请人： Graeme Huntley ,  Andrew James Seeley ,  James Robert Smith

    发明人： Graeme Huntley ,  Andrew James Seeley ,  James Robert Smith

    IPC分类号： F04B3/00

    CPC分类号： F04D19/04

    摘要： A multi-stage vacuum pump comprises, between adjacent stages of the pump, a continuous ignition source for igniting a fuel within a pumped fluid. This can ensure that the concentration of the fuel in fluid exhaust from the pump is below its lower explosive limit.

    摘要翻译： 多级真空泵在泵的相邻级之间包括用于点燃泵送流体内的燃料的连续点火源。 这可以确保来自泵的流体排出物中的燃料浓度低于其较低的爆炸极限。