Solid polysilane mixtures
    10.
    发明授权
    Solid polysilane mixtures 有权
    固体聚硅烷混合物

    公开(公告)号:US08177943B2

    公开(公告)日:2012-05-15

    申请号:US12402852

    申请日:2009-03-12

    IPC分类号: B01J19/08 H05F3/00

    CPC分类号: C08G77/60

    摘要: The invention is directed to mixtures of polysilanes macroscopically solid at ambient temperature wherein the individual components of the composition SinH2n and/or SinH2n+2 of which decompose before they are boiling at an applied process pressure and which are produced from the hydrogenation of plasmachemically generated largely chlorinated polysilane mixtures. These mixtures of polysilanes are especially suited to be applied onto surfaces as solutions or dispersions and to obtain silicon-based structures or layers in subsequent process steps. Furthermore, they are especially safe in handling and can be additionally made up into transport forms in suitable transport containers.

    摘要翻译: 本发明涉及在环境温度下宏观固体的聚硅烷的混合物,其中组合物SinH2n和/或SinH2n + 2的各组分在它们在施加的工艺压力下沸腾之前分解并且由等离子体化学产生的氢化产生 氯化聚硅烷混合物。 聚硅烷的这些混合物特别适用于作为溶液或分散体施加到表面上,并在随后的工艺步骤中获得硅基结构或层。 此外,它们在处理中特别安全,并且可以在适当的运输容器中另外构成运输形式。