Inspection device and method thereof
    1.
    发明授权
    Inspection device and method thereof 有权
    检验装置及其方法

    公开(公告)号:US09188543B2

    公开(公告)日:2015-11-17

    申请号:US13448691

    申请日:2012-04-17

    Abstract: An optical system configured to visually inspect a target having a variable position with respect to the optical system is provided. The optical system includes a polarizer configured to convert an incident light reflected or diffused from the target into linearly polarized light; a light modulating element configured to modulate a polarization state of the linearly polarized light in response to control signals; and a lens group comprising at least one birefringent element, the birefringent element configured to refract or reflect the modulated linearly polarized light with a first polarization state under a first refraction index to enable inspection of the target at a first object position, and the birefringent element further configured to refract or reflect the modulated linearly polarized light with a second polarization state under a second refraction index to enable inspection of the target at a second object position.

    Abstract translation: 提供一种被配置为目视检查相对于光学系统具有可变位置的目标的光学系统。 光学系统包括:偏振器,被配置为将从目标反射或扩散的入射光转换成线偏振光; 光调制元件,被配置为响应于控制信号调制所述线偏振光的偏振状态; 以及包括至少一个双折射元件的透镜组,所述双折射元件被配置为在第一折射率下折射或反射具有第一偏振态的调制线偏振光,以使得能够在第一物体位置检查所述目标,并且所述双折射元件 还被配置为在第二折射率下折射或反射具有第二偏振状态的经调制的线性偏振光,以使得能够在第二物体位置检查目标。

    Method and apparatus for forming multiple images
    2.
    发明授权
    Method and apparatus for forming multiple images 有权
    用于形成多个图像的方法和装置

    公开(公告)号:US09007689B2

    公开(公告)日:2015-04-14

    申请号:US13066000

    申请日:2011-04-04

    CPC classification number: G02B27/0075 G02B27/123

    Abstract: Disclosed are method and apparatus for forming multiple images of an object comprising a plurality of depth segments. An optical system comprises an infinity optical subsystem and a multi-image optical subsystem. The infinity optical subsystem is configured to receive light from the object and form a first image focussed at infinity. A multi-image optical subsystem is configured to receive the first image and form multiple images via multiple focussing lenses. Each multiple image can correspond to a different depth segment. A portion of the light from the first image can also be filtered before entering a focussing lens. Multiple images under different filtering conditions, corresponding to different depth segments or to the same depth segment, can be formed.

    Abstract translation: 公开了用于形成包括多个深度段的对象的多个图像的方法和装置。 光学系统包括无穷远光学子系统和多图像光学子系统。 无穷远光学子系统被配置为从对象接收光并形成聚焦在无限远的第一图像。 多图像光学子系统被配置为接收第一图像并通过多个聚焦透镜形成多个图像。 每个多个图像可以对应于不同的深度段。 来自第一图像的光的一部分也可以在进入聚焦透镜之前被滤波。 可以形成在不同滤波条件下对应于不同深度段或相同深度段的多个图像。

    INSPECTION SYSTEM AND METHOD WITH MULTI-IMAGE PHASE SHIFT ANALYSIS
    5.
    发明申请
    INSPECTION SYSTEM AND METHOD WITH MULTI-IMAGE PHASE SHIFT ANALYSIS 有权
    检测系统和方法与多图像相位移动分析

    公开(公告)号:US20100296104A1

    公开(公告)日:2010-11-25

    申请号:US12469893

    申请日:2009-05-21

    CPC classification number: G01B11/2527 G01N21/8806 G01N2201/0635 G02B13/22

    Abstract: An inspection system is provided. The inspection system comprises a light source, a grating, a phase shifting unit, an imager, and a processor. The light source is configured to generate light. The grating is in a path of the generated light and is configured to produce a grating image after the light passes through the grating. The phase shifting unit is configured to form and reflect a plurality of phase shifted patterns of the grating image onto an object surface to form a plurality of projected phase shifting patterns. The imager is configured to obtain image data of the projected phase shifted patterns. The processor is configured to reconstruct the object surface from the image data. An inspection method and a phase shifting projector are also presented.

    Abstract translation: 提供检查系统。 检查系统包括光源,光栅,相移单元,成像器和处理器。 光源被配置为产生光。 光栅处于所生成的光的路径中,并且被配置为在光通过光栅之后产生光栅图像。 相移单元被配置为将光栅图像的多个相移图案形成并反射到物体表面上以形成多个投影相移图案。 成像器被配置为获得投影的相移图案的图像数据。 处理器被配置为从图像数据重建物体表面。 还提出了检测方法和移相投影机。

    Fringe projection system and method for a probe using a coherent fiber bundle
    6.
    发明授权
    Fringe projection system and method for a probe using a coherent fiber bundle 有权
    边缘投影系统和使用相干光纤束的探针的方法

    公开(公告)号:US07812968B2

    公开(公告)日:2010-10-12

    申请号:US12042740

    申请日:2008-03-05

    Abstract: A probe is presented that includes a light source, a coherent fiber bundle, and a pattern selector. The pattern selector is disposed between the light source and the proximal end of the coherent fiber bundle. The pattern selector includes at least one patterned zone through which light from the light source passes to project at least one fringe set onto a surface. Each of the at least one fringe sets has a structured-light pattern. The probe further includes an imager for obtaining at least one image of the surface and a processing unit that is configured to perform phase-shift analysis on the at least one image. A method for projecting a plurality of fringe sets suitable for phase-shift analysis on a surface using a probe is presented.

    Abstract translation: 提出了一种包括光源,相干光纤束和图案选择器的探针。 图案选择器设置在光源和相干光纤束的近端之间。 图案选择器包括至少一个图案化区域,光源通过该图案区域将至少一个边缘组投影到表面上。 至少一个边缘组中的每一个具有结构化光图案。 探头还包括用于获得表面的至少一个图像的成像器和被配置为对至少一个图像执行相移分析的处理单元。 提出了一种用于使用探针在表面上投影适合于相移分析的多个边缘组的方法。

    System and method for detecting repeating defects in a light-management film
    7.
    发明授权
    System and method for detecting repeating defects in a light-management film 有权
    用于检测光管理膜中的重复缺陷的系统和方法

    公开(公告)号:US07435986B2

    公开(公告)日:2008-10-14

    申请号:US11609605

    申请日:2006-12-12

    CPC classification number: G01N21/95 G01N2021/9513

    Abstract: A system and a method for detecting defects in a light-management film are provided. The system includes a first light source configured to emit light onto a first side of the film in a first predetermined region of the film. The system further includes a second light source configured to emit light onto a second side of the film in the first predetermined region of the film. The system further includes a first camera configured to receive a first portion of light reflected from the first predetermined region of film from the first light source and a second portion of the light propagating through the film from the second light source. Finally, the system includes a signal-processing device openably coupled to the first camera configured to detect a defect in the first predetermined region of the film based on at least one of the first and second portions of light.

    Abstract translation: 提供了一种用于检测光管理膜中的缺陷的系统和方法。 该系统包括配置成在膜的第一预定区域中将光发射到膜的第一侧上的第一光源。 该系统还包括被配置为在薄膜的第一预定区域中将光发射到薄膜的第二侧上的第二光源。 该系统还包括第一照相机,其配置为从第一光源接收从第一预定区域反射的光的第一部分,以及从第二光源传播通过膜的光的第二部分。 最后,该系统包括可开启地耦合到第一照相机的信号处理设备,其被配置为基于第一和第二光部分中的至少一个来检测胶片的第一预定区域中的缺陷。

    Multi-layer holographic data reading method
    8.
    发明授权
    Multi-layer holographic data reading method 有权
    多层全息数据读取方法

    公开(公告)号:US07428205B2

    公开(公告)日:2008-09-23

    申请号:US10065882

    申请日:2002-11-27

    CPC classification number: G11B7/0065

    Abstract: A plurality of holographic recording media are positioned one above the other on an optical substrate and contain conventional stationary or moving imagery or data sets such as binary data representative of for example written text. A plurality of memory address access media are alternately interleaved between the plurality of holographic recording media. The memory access media causes a pair of optical beams to create an interference pattern at particular hologram recording media layers causing that layer to be read out. The specific memory access media layer is selected by means of scanning the interference pattern spatially within the interrogation beam, or by means of scanning the interrogation beam in wavelength.

    Abstract translation: 多个全息记录介质在光学基板上彼此重叠地定位,并且包含常规的静止或运动图像或数据集,例如表示例如书写文本的二进制数据。 多个存储器地址访问介质交替地交错在多个全息记录介质之间。 存储器存取介质使一对光束在特定的全息图记录介质层上产生干涉图案,从而使该层被读出。 通过在询问光束内空间扫描干涉图,或通过扫描波长的询问光来选择特定存储器存取介质层。

    Method and system for image processing for structured light profiling of a part
    9.
    发明授权
    Method and system for image processing for structured light profiling of a part 失效
    用于部件结构光谱分析的图像处理方法和系统

    公开(公告)号:US07302109B2

    公开(公告)日:2007-11-27

    申请号:US10652366

    申请日:2003-08-28

    CPC classification number: G01B11/25 G06T7/521

    Abstract: An image processing method for structured light profiling includes sampling an image of a structured light pattern to obtain an intensity distribution, selecting a number of sets of sampled points from the intensity distribution. Each of the respective sets includes a number of sampled points. The image processing method further includes fitting each of the sets of sampled points to a respective distribution function and filtering the distribution functions to select a representative distribution function for the intensity distribution.

    Abstract translation: 用于结构化光谱分析的图像处理方法包括对结构化光图案的图像进行采样以获得强度分布,从强度分布中选择多个采样点集合。 各组中的每一个包括多个采样点。 图像处理方法还包括将采样点集合中的每一个拟合到相应的分布函数,并对分布函数进行滤波以选择用于强度分布的代表性分布函数。

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