Quartz thermometer
    1.
    发明授权
    Quartz thermometer 失效
    石英温度计

    公开(公告)号:US4772130A

    公开(公告)日:1988-09-20

    申请号:US869103

    申请日:1986-05-30

    CPC分类号: G01K7/32 Y10T29/42

    摘要: A quartz thermometer adapted to measure the ambient temperature through detection of a change in the resonance frequency of a quartz resonator due to change in the temperature, wherein a quartz wafer of 0.02 to 0.2 mm thickness is cut from a region of a quartz within -30.degree. to -70.degree. in terms of rotation angle about the X axis of the quartz thereby to form a quart resonator within a range of between -15.degree. to +15.degree. in terms of angle of rotation about the Z' axis within the plane of the quartz wafer; and wherein thin metallic films are formed on the surfaces of the resonator to serve as exciting electrodes. The resonator and electrodes are produced by photolithography and anisotropic quartz etching processes. The resulting quartz thermometer has a large first order temperature coefficient of frequency.

    摘要翻译: 一种石英温度计,其适用于通过检测由于温度变化而导致的石英谐振器的谐振频率变化来测量环境温度,其中从石英的区域切割厚度为0.02至0.2mm的石英晶片,其范围在-30 以围绕石英X轴的旋转角度为-70°,从而在围绕Z'轴的旋转角度的-15°至+15°之间的范围内形成四分之一谐振器 石英晶片; 并且其中在谐振器的表面上形成薄金属膜以用作激励电极。 谐振器和电极通过光刻和各向异性石英蚀刻工艺制造。 所得的石英温度计具有大的一阶温度系数的频率。

    Apparatus for measuring pressure
    2.
    发明授权
    Apparatus for measuring pressure 失效
    用于测量压力的装置

    公开(公告)号:US4680970A

    公开(公告)日:1987-07-21

    申请号:US825082

    申请日:1986-01-31

    IPC分类号: G01L9/00 G01L11/00

    摘要: A pressure measuring apparatus comprising a diaphragm to which pressure to be measured is applied and a resilient vibrator connected to the diaphragm, which acts to produce a signal based on its natural frequency relative to the pressure, wherein the diaphragm comprises a peripheral circumferential portion, a central fixing portion and a non-planar intermediate portion therebetween, with the central portion being connected to the vibrator and having its edge disposed at a non-perpendicular angle with respect to the vibrator area to which it is connected. The apparatus eliminates adverse influences due to initial distortion, hysteresis of the diaphragm and produces accurate measurements.

    摘要翻译: 一种压力测量装置,包括施加有被测量压力的膜片和连接到所述膜片的弹性振动器,所述弹性振动器基于其相对于所述压力的固有频率产生信号,其中所述隔膜包括周向周向部分, 中央固定部分和其间的非平面中间部分,其中心部分连接到振动器并且其边缘相对于其连接的振动器区域以非垂直的角度设置。 该装置消除了由于初始失真,隔膜滞后等引起的不利影响,并产生了精确的测量。

    Pressure sensor
    3.
    发明授权
    Pressure sensor 失效
    压力传感器

    公开(公告)号:US4628740A

    公开(公告)日:1986-12-16

    申请号:US785909

    申请日:1985-10-09

    摘要: A pressure sensor which detects delicate changes in pressure as small as 0.01 .mu.m water column by detecting displacement or torque in a movable plate. The sensor comprises a fixed plate in which slits are formed, a movable plate on which pressure to be measured is impressed, a supporting member which supports the movable plate at two points on a straight line passing through its center of gravity so as to enable the movable plate to rotate thereabout, and a detecting means for detecting displacement or torque in the movable plate. The different pressures act on the movable plate to cause the rotation thereof and the displacement or torque so that such displacement corresponds to the pressure difference.

    摘要翻译: 一种压力传感器,通过检测可移动板中的位移或扭矩来检测小到0.01微米水柱的微小压力变化。 传感器包括形成狭缝的固定板,待测压力的可动板,支撑构件,该支撑构件在通过其重心的直线上的两点处支撑可动板,使得能够 可移动板在其周围旋转;以及检测装置,用于检测可动板中的位移或扭矩。 不同的压力作用在可移动板上以引起其旋转和位移或扭矩,使得这种位移对应于压力差。

    Absolute encoder for linear or angular position measurements
    5.
    发明授权
    Absolute encoder for linear or angular position measurements 失效
    用于线性或角位置测量的绝对编码器

    公开(公告)号:US4786891A

    公开(公告)日:1988-11-22

    申请号:US849574

    申请日:1986-04-08

    IPC分类号: H03M1/28 H03M1/22

    CPC分类号: H03M1/287

    摘要: An encoder device of the absolute position type for outputting a shift position or angle of rotation relative to the absolute position. The device comprises a code plate having first and second grid patterns wherein information is stored as 1 or 0 in a periodic manner at pitches slightly different from each other; first and second sensory arrays for detecting the first and second grid patterns; driving means for driving the sensors relative to the grid patterns and for obtaining an alternating signal from each array; and computation means for measuring the phase angle of the alternating signal from each array, and the phase angle difference therebetween and for calculating the position using such phase angles. Advantageously, the invention is suitable for miniaturization due to its simplicity, relaibility, and efficiency.

    摘要翻译: 绝对位置类型的编码器装置,用于相对于绝对位置输出换档位置或旋转角度。 该装置包括具有第一和第二格栅图案的代码板,其中信息以相对于彼此稍微不同的间距以周期性方式存储为1或0; 用于检测第一和第二网格图案的第一和第二感觉阵列; 用于驱动所述传感器相对于所述格栅图案并用于从每个阵列获得交替信号的驱动装置; 以及用于测量来自每个阵列的交变信号的相位角以及它们之间的相位角差并用于使用这种相位角来计算位置的计算装置。 有利地,本发明由于其简单性,可靠性和效率而适合于小型化。

    Mechanical vibrating element
    6.
    发明授权
    Mechanical vibrating element 失效
    机械振动元件

    公开(公告)号:US4421381A

    公开(公告)日:1983-12-20

    申请号:US242627

    申请日:1981-03-11

    摘要: Herein disclosed is a mechanical vibrating element which can be used as a resonator made operative to resonate in a predetermined frequency, a filter having a frequency selecting property or an optical deflector adapted to be mechanically dislocated in accordance with an input signal for deflecting an optical beam. The mechanical vibrating element according to the present invention is characterized in that a single insulating substrate constructs a frame and a moving portion supported by the frame, in that the moving portion is formed with a conductive pattern or a coil, and in that an electric current is fed to the conductor or the coil, while appling a magnetic field in the same direction as the plane direction of the insulating substrate, so that the moving portions may be mechanically vibrated.

    摘要翻译: 这里公开了一种机械振动元件,其可以用作可操作地以预定频率谐振的谐振器,具有频率选择性的滤波器或适于根据用于偏转光束的输入信号机械错位的光学偏转器 。 根据本发明的机械振动元件的特征在于,单个绝缘基板构造框架和由框架支撑的移动部分,因为移动部分形成有导电图案或线圈,并且电流 被馈送到导体或线圈,同时沿与绝缘基板的平面方向相同的方向施加磁场,使得移动部分可以机械振动。