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公开(公告)号：US08367968B2
公开(公告)日：2013-02-05
申请号：US11969000
申请日：2008-01-03
IPC分类号： B23K26/38
CPC分类号： B23K26/0604 , B23K26/0624 , B23K26/40 , B23K2103/172 , H01L23/5258 , H01L2924/0002 , H01L2924/00
摘要： Laser pulses are selected from a group of closely spaced laser pulses with an optical modulator by adjusting pulse timing relative to an impingement interval. An adjusted pulse is moved from an impingement interval to a non-impingement interval and is blocked. The blocked laser source is stabilized by running nearly continuously. Pulse selection with multiple laser sources is achieved with a single acousto-optic modulator.
摘要翻译： 通过相对于冲击间隔调整脉冲定时，通过光学调制器从一组紧密间隔的激光脉冲中选择激光脉冲。 调整脉冲从冲击间隔移动到非冲击间隔并被阻挡。 封闭的激光源通过几乎连续运行而稳定。 使用单个声光调制器实现具有多个激光源的脉冲选择。
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2.发明申请SYSTEMS AND METHODS FOR PROVIDING TEMPERATURE STABILITY OF ACOUSTO-OPTIC BEAM DEFLECTORS AND ACOUSTO-OPTIC MODULATORS DURING USE 有权ACOUSTO-OPTIC BEAM偏转器和ACOUSTO-OPTIC MODULATOR在使用过程中提供温度稳定性的系统和方法公开(公告)号：US20130010349A1
公开(公告)日：2013-01-10
申请号：US13542177
申请日：2012-07-05
申请人： James Cordingley , Dimitry Maltsev
发明人： James Cordingley , Dimitry Maltsev
IPC分类号： G02F1/33
CPC分类号： G02F1/33 , G02F1/113 , G02F2203/21
摘要： The invention provides a method of laser processing that includes the steps of: generating a sequence of RF pulses corresponding to a sequence of laser pulses having a laser pulse repetition rate, the RF pulses including transmitting RF pulses at transmitting RF frequencies and non-transmitting RF pulses at non-transmitting RF frequencies for causing the sequence of laser pulses to be deflected in respective transmitting and non-transmitting directions, each RF pulse comprising an RF frequency, an RF amplitude and a duration; controlling each RF pulse such that the sequence of RF pulses provides a modulated RF drive signal that is modulated to provide a balanced thermal loading on the acousto-optic deflector; applying the modulated RF drive signal to the acousto-optic deflector; and deflecting at least one laser pulse with the acousto-optic deflector using the modulated RF drive signal to irradiate a selected target position with a predetermined pulse energy.
摘要翻译： 本发明提供了一种激光处理方法，其包括以下步骤：产生与具有激光脉冲重复频率的激光脉冲序列对应的RF脉冲序列，所述RF脉冲包括在发送RF频率时发射RF脉冲和非发射RF 在非发射RF频率处的脉冲，用于使激光脉冲序列在相应的发射和非发射方向上偏转，每个RF脉冲包括RF频率，RF振幅和持续时间; 控制每个RF脉冲，使得RF脉冲序列提供调制的RF驱动信号，其被调制以在声光偏转器上提供平衡的热负载; 将调制的RF驱动信号施加到声光偏转器; 并且使用调制的RF驱动信号使用声光偏转器偏转至少一个激光脉冲，以用预定的脉冲能量照射所选择的目标位置。
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公开(公告)号：US20120241427A1
公开(公告)日：2012-09-27
申请号：US13404930
申请日：2012-02-24
申请人： Dimitry Maltsev , Dmitry N. Romashko , Michael Plotkin , Jonathan S. Ehrmann , James J. Cordingley
发明人： Dimitry Maltsev , Dmitry N. Romashko , Michael Plotkin , Jonathan S. Ehrmann , James J. Cordingley
IPC分类号： B23K26/00
CPC分类号： B23K26/0732 , B23K26/042 , B23K26/0619 , B23K26/0622 , B23K26/082 , H01L21/76892 , H01L23/5258 , H01L2924/0002 , H01L2924/00
摘要： A method of processing material of device elements by laser interaction is disclosed. According to one aspect, the method includes generating a pulsed laser processing output along a laser beam axis, the output including a plurality of laser pulses triggered sequentially at times determined by a pulse repetition rate. A trajectory relative to locations of device elements to be processed is generated. A position of one or more designated device elements relative to an intercept point position on the trajectory at one or more laser pulse times is determined, and a laser beam is deflected based on the predicted position within a predetermined deflection range. According to some aspects, the predetermined deflection range may correspond to a compass rose or cruciform field shape. As a result, a deflection accuracy for laser processing may be improved.
摘要翻译： 公开了一种通过激光相互作用处理器件元件材料的方法。 根据一个方面，所述方法包括沿着激光束轴产生脉冲激光处理输出，所述输出包括在由脉冲重复率确定的时间顺序触发的多个激光脉冲。 产生相对于要处理的设备元件的位置的轨迹。 确定一个或多个指定装置元件相对于在一个或多个激光脉冲时间的轨迹上的截点位置的位置，并且激光束基于在预定偏转范围内的预测位置偏转。 根据一些方面，预定的偏转范围可以对应于罗盘玫瑰或十字形场的形状。 结果，可以提高激光加工的偏转精度。
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4.发明授权Systems and methods for providing temperature stability of acousto-optic beam deflectors and acousto-optic modulators during use 有权在使用过程中提供声光束偏转器和声光调制器的温度稳定性的系统和方法公开(公告)号：US08593722B2
公开(公告)日：2013-11-26
申请号：US13542177
申请日：2012-07-05
申请人： James Cordingley , Dimitry Maltsev
发明人： James Cordingley , Dimitry Maltsev
CPC分类号： G02F1/33 , G02F1/113 , G02F2203/21
摘要： The invention provides a method of laser processing that includes the steps of: generating a sequence of RF pulses corresponding to a sequence of laser pulses having a laser pulse repetition rate, the RF pulses including transmitting RF pulses at transmitting RF frequencies and non-transmitting RF pulses at non-transmitting RF frequencies for causing the sequence of laser pulses to be deflected in respective transmitting and non-transmitting directions, each RF pulse comprising an RF frequency, an RF amplitude and a duration; controlling each RF pulse such that the sequence of RF pulses provides a modulated RF drive signal that is modulated to provide a balanced thermal loading on the acousto-optic deflector; applying the modulated RF drive signal to the acousto-optic deflector; and deflecting at least one laser pulse with the acousto-optic deflector using the modulated RF drive signal to irradiate a selected target position with a predetermined pulse energy.
摘要翻译： 本发明提供了一种激光处理方法，其包括以下步骤：产生与具有激光脉冲重复频率的激光脉冲序列对应的RF脉冲序列，所述RF脉冲包括在发送RF频率时发射RF脉冲和非发射RF 在非发射RF频率处的脉冲，用于使激光脉冲序列在相应的发射和非发射方向上偏转，每个RF脉冲包括RF频率，RF振幅和持续时间; 控制每个RF脉冲，使得RF脉冲序列提供调制的RF驱动信号，其被调制以在声光偏转器上提供平衡的热负载; 将调制的RF驱动信号施加到声光偏转器; 并且使用调制的RF驱动信号使用声光偏转器偏转至少一个激光脉冲，以用预定的脉冲能量照射所选择的目标位置。
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公开(公告)号：US20080164240A1
公开(公告)日：2008-07-10
申请号：US11969000
申请日：2008-01-03
IPC分类号： B23K26/08
CPC分类号： B23K26/0604 , B23K26/0624 , B23K26/40 , B23K2103/172 , H01L23/5258 , H01L2924/0002 , H01L2924/00
摘要： Laser pulses are selected from a group of closely spaced laser pulses with an optical modulator by adjusting pulse timing relative to an impingement interval. An adjusted pulse is moved from an impingement interval to a non-impingement interval and is blocked. The blocked laser source is stabilized by running nearly continuously. Pulse selection with multiple laser sources is achieved with a single acousto-optic modulator.
摘要翻译： 通过相对于冲击间隔调整脉冲定时，通过光学调制器从一组紧密间隔的激光脉冲中选择激光脉冲。 调整脉冲从冲击间隔移动到非冲击间隔并被阻挡。 封闭的激光源通过几乎连续运行而稳定。 使用单个声光调制器实现具有多个激光源的脉冲选择。
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