公开(公告)号：US09263237B2

公开(公告)日：2016-02-16

申请号：US13036079

申请日：2011-02-28

申请人： Dae-Kyu Choi

发明人： Dae-Kyu Choi

IPC分类号： C23C16/00 ,  H01L21/306 ,  H01J37/32

CPC分类号： H01J37/3211 ,  H01J37/321

摘要： The following description relates to a plasma processing apparatus and a method thereof. The plasma processing apparatus comprises a first plasma chamber having a first plasma discharge space, a first plasma source for supplying a first activation energy to the first plasma discharge space within the first plasma chamber, a second plasma chamber which is connected to the first plasma chamber and has a second discharge space, and a second plasma source for supplying a second activation energy for inducing inductive coupled plasma to the second plasma discharge space within the second plasma chamber.

摘要翻译： 以下描述涉及等离子体处理装置及其方法。 等离子体处理装置包括具有第一等离子体放电空间的第一等离子体室，用于向第一等离子体室内的第一等离子体放电空间提供第一激活能的第一等离子体源，与第一等离子体室连接的第二等离子体室 并具有第二放电空间，以及第二等离子体源，用于向第二等离子体室内的第二等离子体放电空间提供用于感应感应耦合等离子体的第二激活能。

公开(公告)号：US08961736B2

公开(公告)日：2015-02-24

申请号：US12125948

申请日：2008-05-23

申请人： Dae-Kyu Choi

发明人： Dae-Kyu Choi

IPC分类号： H01L21/306 ,  C23C16/00 ,  H05H1/46

CPC分类号： H05H1/46

摘要： There is provided a plasma reactor with an internal transformer. The plasma reactor comprises: a plasma chamber with a gas inlet and a gas outlet, for providing a plasma discharging space; one or more core cylinder jackets for providing a core storage space in the plasma discharging space and forming a plasma centralized channel and a plasma decentralized channel by including one or more through-apertures; and one or more transformers each including a magnetic core with primary winding surrounding the through-aperture and installed in the core storage space, wherein the plasma discharging space comprises one or more first spatial regions to form the plasma centralized channel and one or more second spatial regions to form the plasma decentralized channel. In the plasma reactor, since the transformer is installed in the plasma chamber, energy is transferred with almost no loss from the transformer to the plasma discharging space and therefore the energy transfer efficiency is very high. Then, since most of gases flow through the first spatial region and the through-aperture inside the plasma chamber, most of active gases are generated in the plasma centralized channel. Consequently, the plasma reactor is very suitable for generating large amount of active gases. Further, even though the plasma chamber is composed of a conductive material, since no special insulating region needs to be formed, it is very easy to constitute the plasma chamber. Further, since the plasma chamber itself is sufficiently capable of forming an outer case, the plasma reactor is very simply manufactured.

摘要翻译： 提供了具有内部变压器的等离子体反应器。 等离子体反应器包括：具有气体入口和气体出口的等离子体室，用于提供等离子体放电空间; 一个或多个芯筒筒套，用于在等离子体放电空间中提供芯存储空间，并通过包括一个或多个通孔形成等离子体集中通道和等离子体分散通道; 以及一个或多个变压器，每个变压器包括具有环绕通孔的初级绕组并安装在芯存储空间中的磁芯，其中等离子体放电空间包括一个或多个第一空间区域以形成等离子体集中通道和一个或多个第二空间 区域形成等离子体分散通道。 在等离子体反应器中，由于变压器安装在等离子体室中，能量几乎没有从变压器损耗传递到等离子体放电空间，因此能量传递效率非常高。 然后，由于大多数气体流过等离子体室内的第一空间区域和通孔，所以在等离子体集中通道中产生大部分活性气体。 因此，等离子体反应器非常适于产生大量的活性气体。 此外，即使等离子体室由导电材料构成，由于不需要形成特殊的绝缘区域，因此很容易构成等离子体室。 此外，由于等离子体室本身足够能够形成外壳，所以等离子体反应器非常简单地制造。

公开(公告)号：US20130171038A1

公开(公告)日：2013-07-04

申请号：US13734781

申请日：2013-01-04

申请人： Dae-Kyu CHOI

发明人： Dae-Kyu CHOI

IPC分类号： B01J19/12

CPC分类号： B01J19/12 ,  H01J37/32082 ,  H01J37/32669 ,  H05H1/46 ,  H05H2001/4675

摘要： A magnetic flux channel coupled plasma reactor includes a hollow reactor body having a plasma discharge space coupled to magnetic flux channels, a magnetic flux channel coupled plasma source including magnetic cores having two or more magnetic flux entrances forming the magnetic channel and primary winding coils wound in the magnetic cores and generating magnetic flux channel coupled plasma in the plasma discharge space, and an AC switching power supply for supplying plasma generation power to the primary winding coils and the capacitively coupled electrodes. The magnetic flux channel coupled plasma reactor independently generates the magnetic flux channel coupled plasma or hybrid plasma through capacitively coupled electrodes or inductive antenna coils in the inside of the reactor body.

摘要翻译： 磁通量耦合等离子体反应器包括具有耦合到磁通量的等离子体放电空间的中空反应器主体，包括形成磁通道的两个或更多个磁通入口的磁芯和包含磁路的初级绕组线圈的磁通量耦合等离子体源 磁芯和等离子体放电空间中产生磁通量耦合等离子体，以及用于向初级绕组线圈和电容耦合电极提供等离子体产生电力的AC开关电源。 磁通量耦合等离子体反应器通过电抗耦合电极或反应器主体内部的感应天线线圈独立地产生耦合的等离子体或混合等离子体的磁通量通道。

公开(公告)号：US20130154480A1

公开(公告)日：2013-06-20

申请号：US13687067

申请日：2012-11-28

申请人： Dae-Kyu CHOI

发明人： Dae-Kyu CHOI

IPC分类号： H05H1/46

CPC分类号： H05H1/46 ,  H05H2001/4652 ,  H05H2001/4675 ,  H05H2001/4682

摘要： A hybrid plasma reactor includes a reactor body having a plasma discharge space, a gas inlet, and a gas outlet; a hybrid plasma source including a first hybrid electrode and a second hybrid electrode, which face each other while the reactor body is positioned therebetween and provide a current path having one or more turns, to be inductively and capacitively coupled to plasma formed in the plasma discharge space; and an alternating switching power supply for supplying plasma generation power to the first hybrid electrode and the second hybrid electrode. The hybrid plasma reactor can complexly generate capacitively coupled plasma and inductively coupled plasma, thereby achieving a wide operation area from a low-pressure area to a high-pressure area.

摘要翻译： 混合等离子体反应器包括具有等离子体放电空间的反应器主体，气体入口和气体出口; 包括第一混合电极和第二混合电极的混合等离子体源，其在反应器主体位于其间并且提供具有一个或多个匝的电流通路的情况下彼此面对，以与等离子体放电中形成的等离子体感应和电容耦合 空间; 以及用于向第一混合电极和第二混合电极提供等离子体发生电力的交替开关电源。 复合等离子体反应器可以复杂地产生电容耦合等离子体和电感耦合等离子体，从而实现从低压区域到高压区域的宽操作区域。

公开(公告)号：US07862681B2

公开(公告)日：2011-01-04

申请号：US11679790

申请日：2007-02-27

申请人： Dae-Kyu Choi

发明人： Dae-Kyu Choi

IPC分类号： H01L21/306 ,  B05C11/00

CPC分类号： H01J37/32082 ,  H01J37/32174

摘要： Provided is a plasma processing system comprising: a plasma reactor generating plasma by receiving an input gas; and a radio frequency generator supplying radio frequency. The radio frequency generator supplies radio frequency power for plasma generation to the plasma reactor, wherein upon power interruption within a predetermined time occurring during the operation of the plasma reactor, the radio frequency generator re-supplies the radio frequency power, without discontinuing the operation of the plasma reactor, after power returns. Thereby, the plasma reactor stably maintains plasma upon momentary power interruption.

摘要翻译： 提供了一种等离子体处理系统，包括：等离子体反应器，其通过接收输入气体产生等离子体; 以及提供射频的射频发生器。 无线电频率发生器向等离子体电抗器提供用于等离子体产生的射频功率，其中在等离子体反应器的操作期间发生的预定时间内的电力中断时，射频发生器重新提供射频功率，而不中断操作 等离子体反应器，电源返回后。 因此，等离子体电抗器在瞬时停电时稳定地维持等离子体。

公开(公告)号：US20090291027A1

公开(公告)日：2009-11-26

申请号：US12125948

申请日：2008-05-23

申请人： Dae-Kyu CHOI

发明人： Dae-Kyu CHOI

IPC分类号： B01J19/08 ,  G05D99/00

CPC分类号： H05H1/46

摘要： There is provided a plasma reactor with an internal transformer. The plasma reactor comprises: a plasma chamber with a gas inlet and a gas outlet, for providing a plasma discharging space; one or more core cylinder jackets for providing a core storage space in the plasma discharging space and forming a plasma centralized channel and a plasma decentralized channel by including one or more through-apertures; and one or more transformers each including a magnetic core with primary winding surrounding the through-aperture and installed in the core storage space, wherein the plasma discharging space comprises one or more first spatial regions to form the plasma centralized channel and one or more second spatial regions to form the plasma decentralized channel. In the plasma reactor, since the transformer is installed in the plasma chamber, energy is transferred with almost no loss from the transformer to the plasma discharging space and therefore the energy transfer efficiency is very high. Then, since most of gases flow through the first spatial region and the through-aperture inside the plasma chamber, most of active gases are generated in the plasma centralized channel. Consequently, the plasma reactor is very suitable for generating large amount of active gases. Further, even though the plasma chamber is composed of a conductive material, since no special insulating region needs to be formed, it is very easy to constitute the plasma chamber. Further, since the plasma chamber itself is sufficiently capable of forming an outer case, the plasma reactor is very simply manufactured.

摘要翻译： 提供了具有内部变压器的等离子体反应器。 等离子体反应器包括：具有气体入口和气体出口的等离子体室，用于提供等离子体放电空间; 一个或多个芯筒筒套，用于在等离子体放电空间中提供芯存储空间，并通过包括一个或多个通孔形成等离子体集中通道和等离子体分散通道; 以及一个或多个变压器，每个变压器包括具有环绕通孔的初级绕组并安装在芯存储空间中的磁芯，其中等离子体放电空间包括一个或多个第一空间区域以形成等离子体集中通道和一个或多个第二空间 区域形成等离子体分散通道。 在等离子体反应器中，由于变压器安装在等离子体室中，能量几乎没有从变压器损耗传递到等离子体放电空间，因此能量传递效率非常高。 然后，由于大多数气体流过等离子体室内的第一空间区域和通孔，所以在等离子体集中通道中产生大部分活性气体。 因此，等离子体反应器非常适于产生大量的活性气体。 此外，即使等离子体室由导电材料构成，由于不需要形成特殊的绝缘区域，因此很容易构成等离子体室。 此外，由于等离子体室本身足够能够形成外壳，所以等离子体反应器非常简单地制造。

公开(公告)号：US20090229758A1

公开(公告)日：2009-09-17

申请号：US12382328

申请日：2009-03-13

申请人： Young-Min Min ,  Dae-Kyu Choi ,  Do-In Bae ,  Yun-Sik Yang ,  Wan-Goo Hwang ,  Jin-Man Kim

发明人： Young-Min Min ,  Dae-Kyu Choi ,  Do-In Bae ,  Yun-Sik Yang ,  Wan-Goo Hwang ,  Jin-Man Kim

IPC分类号： H01L21/3065 ,  C09K13/00

CPC分类号： H01L21/31116 ,  H01J37/321 ,  H01J37/32357 ,  Y02C20/30 ,  Y02P70/605

摘要： A method for manufacturing a semiconductor device may include: forming a main magnetic field having an axis, and forming a subsidiary magnetic field substantially parallel to the axis; applying an alternating current along a path between the main and the subsidiary magnetic fields; allowing a gas to flow along a flow path along the path of the current so that a gas plasma is generated from the gas; providing the gas plasma into a chamber separated from a position where the gas plasma is generated; and performing a process for manufacturing a semiconductor device by employing the gas plasma.

公开(公告)号：US20060120082A1

公开(公告)日：2006-06-08

申请号：US11282216

申请日：2005-11-17

申请人： Dae-Ho Choo ,  Dae-Kyu Choi

发明人： Dae-Ho Choo ,  Dae-Kyu Choi

IPC分类号： F21V23/04

CPC分类号： G09G3/3426 ,  G02F1/133603 ,  G02F1/133604 ,  G02F1/133611 ,  G02F2001/133612 ,  G02F2201/58 ,  G09G3/3611 ,  G09G2310/024 ,  G09G2320/0646 ,  G09G2360/144 ,  G09G2360/16

摘要： A surface light source includes a discharge tube, a power source, and a surface light source control part. The discharge tube includes a plurality of lighting areas. Each lighting area has a discharge electrode part. The power source applies electric power to the discharge electrode parts. The surface light source control part separately controls brightness of each lighting area by separately controlling electric power levels applied to the discharge electrode part of each lighting area, respectively. Therefore, relatively high contrasts and relatively low power consumption are obtained.

摘要翻译： 表面光源包括放电管，电源和表面光源控制部。 放电管包括多个照明区域。 每个照明区域具有放电电极部分。 电源向放电电极部分施加电力。 表面光源控制部分别通过分别控制施加到各照明区域的放电电极部分的电功率水平来分别控制各照明区域的亮度。 因此，获得相对高的对比度和相对低的功耗。

公开(公告)号：US08597464B2

公开(公告)日：2013-12-03

申请号：US11737648

申请日：2007-04-19

申请人： Dae-Kyu Choi

发明人： Dae-Kyu Choi

IPC分类号： C23C16/00 ,  H01L21/306

CPC分类号： H01J37/32009 ,  H01J37/321 ,  H01J37/32357

摘要： There is provided an inductively coupled plasma reactor. The inductively coupled plasma reactor is connected to a transformer with multiple magnetic cores and a primary winding, to transfer an electromotive force for plasma discharge to a plasma discharge chamber of a reactor body. Parts of magnetic core positioned in side the plasma discharge chamber are protected by being entirely covered by a core protecting tube. The primary winding is electrically connected to a power supply source providing radio frequency power. In the inductively coupled plasma reactor, since a number of magnetic core cross sectional parts are positioned inside the plasma discharge chamber, the efficiency of transferring the inductively coupled energy to be connected with plasma is very high.

公开(公告)号：US20130307414A1

公开(公告)日：2013-11-21

申请号：US13673513

申请日：2012-11-09

申请人： Dae-Kyu CHOI

发明人： Dae-Kyu CHOI

IPC分类号： H01J37/32

CPC分类号： H01J37/32816 ,  H01J37/321

摘要： A hybrid plasma reactor includes a reactor body having a plasma discharge space, a gas inlet, and a gas outlet; a hybrid plasma source including an inductive antenna inductively coupled to plasma formed in the plasma discharge space and a primary winding coil transformer coupled to the plasma and wound in a magnetic core; and an alternating switching power supply for supplying plasma generation power to the inductive antenna and the primary winding coil. The hybrid plasma reactor induces a plasma discharge using the inductively coupled plasma source and the transformer coupled plasma source, so that it has a wide operational area from a low pressure area to a high pressure area.

摘要翻译： 混合等离子体反应器包括具有等离子体放电空间的反应器主体，气体入口和气体出口; 混合等离子体源，包括感应耦合到等离子体放电空间中形成的等离子体的感应天线和耦合到等离子体并缠绕在磁芯中的初级绕组线圈变压器; 以及用于向感应天线和初级绕组线圈提供等离子体产生功率的交替开关电源。 混合等离子体反应器使用电感耦合等离子体源和变压器耦合的等离子体源诱导等离子体放电，使得其具有从低压区域到高压区域的宽操作区域。