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1.发明授权Method of manufacturing an SPM probe with a scanning tip and with an alignment aid located opposite the scanning tip 有权制造具有扫描尖端的SPM探针和位于扫描尖端相对的对准辅助装置的方法公开(公告)号：US08209768B2
公开(公告)日：2012-06-26
申请号：US12576326
申请日：2009-10-09
Applicant: Thomas Sulzbach , Oliver Krause , Mathieu Burri , Manfred Detterbeck , Bernd Irmer , Christian Penzkofer
Inventor： Thomas Sulzbach , Oliver Krause , Mathieu Burri , Manfred Detterbeck , Bernd Irmer , Christian Penzkofer
IPC: G01Q70/00
Abstract: A method of manufacturing an SPM probe having a support element, a cantilever, and a scanning tip on an underside of the cantilever, and having a mark located on the top side of the cantilever opposite the scanning tip. The mark on the top side of the cantilever is located exactly opposite the scanning tip on the underside of the cantilever. This makes it possible to identify the exact position of the scanning tip in the scanning probe microscope from the upward-pointing top side of the cantilever, which significantly simplifies the alignment of the SPM probe. The support element with the cantilever may be prefabricated conventionally and the scanning tip and the mark are then produced on the cantilever in a self-aligning way by means of a particle-beam-induced material deposition based on a gas-induced process.
Abstract translation: 一种制造具有在悬臂的下侧上的支撑元件，悬臂和扫描尖端的SPM探针的方法，并且具有位于与扫描尖端相对的悬臂的顶侧上的标记。 悬臂顶部的标记位于悬臂底面的扫描尖端正好相对的位置。 这使得可以从悬臂的向上的顶侧识别扫描探针显微镜中扫描尖端的确切位置，这显着简化了SPM探针的对准。 具有悬臂的支撑元件可以是常规预制的，然后通过基于气体诱导过程的粒子束诱导材料沉积以自对准方式在悬臂上产生扫描尖端和标记。
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Patent Agency Ranking
公开(公告)号：US08164071B2
公开(公告)日：2012-04-24
申请号：US12570112
申请日：2009-09-30
Applicant: Volker Drexel , Ulrich Mantz , Bernd Irmer , Christian Penzkofer
Inventor： Volker Drexel , Ulrich Mantz , Bernd Irmer , Christian Penzkofer
IPC: H01J27/00
CPC classification number: H01J37/065 , H01J1/3044 , H01J37/06 , H01J2201/30415 , H01J2201/30446 , H01J2201/30476 , H01J2237/06316 , H01J2237/06375 , H01J2237/065 , Y10T29/49888
Abstract: A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.
Abstract translation: 电子束源的尖端包括承载涂层的芯。 该涂层由具有比形成芯的表面的材料更大的导电性的材料形成。
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3.发明申请METHOD OF MANUFACTURING AN SPM PROBE WITH A SCANNING TIP AND WITH AN ALIGNMENT AID LOCATED OPPOSITE THE SCANNING TIP 有权使用扫描提示和对齐辅助位置对准的SPM探针的制造方法扫描提示公开(公告)号：US20100095409A1
公开(公告)日：2010-04-15
申请号：US12576326
申请日：2009-10-09
Applicant: Thomas SULZBACH , Oliver KRAUSE , Mathieu BURRI , Manfred DETTERBECK , Bernd IRMER , Christian PENZKOFER
Inventor： Thomas SULZBACH , Oliver KRAUSE , Mathieu BURRI , Manfred DETTERBECK , Bernd IRMER , Christian PENZKOFER
IPC: G01Q70/16
Abstract: A method of manufacturing an SPM probe having a support element, a cantilever, and a scanning tip on an underside of the cantilever, and having a mark located on the top side of the cantilever opposite the scanning tip. The mark on the top side of the cantilever is located exactly opposite the scanning tip on the underside of the cantilever. This makes it possible to identify the exact position of the scanning tip in the scanning probe microscope from the upward-pointing top side of the cantilever, which significantly simplifies the alignment of the SPM probe. The support element with the cantilever may be prefabricated conventionally and the scanning tip and the mark are then produced on the cantilever in a self-aligning way by means of a particle-beam-induced material deposition based on a gas-induced process.
Abstract translation: 一种制造具有在悬臂的下侧上的支撑元件，悬臂和扫描尖端的SPM探针的方法，并且具有位于与扫描尖端相对的悬臂的顶侧上的标记。 悬臂顶部的标记位于悬臂底面的扫描尖端正好相对的位置。 这使得可以从悬臂的向上的顶侧识别扫描探针显微镜中扫描尖端的确切位置，这显着简化了SPM探针的对准。 具有悬臂的支撑元件可以是常规预制的，然后通过基于气体诱导过程的粒子束诱导材料沉积以自对准方式在悬臂上产生扫描尖端和标记。
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公开(公告)号：US20100078557A1
公开(公告)日：2010-04-01
申请号：US12570112
申请日：2009-09-30
Applicant: Volker Drexel , Ulrich Mantz , Bernd Irmer , Christian Penzkofer
Inventor： Volker Drexel , Ulrich Mantz , Bernd Irmer , Christian Penzkofer
CPC classification number: H01J37/065 , H01J1/3044 , H01J37/06 , H01J2201/30415 , H01J2201/30446 , H01J2201/30476 , H01J2237/06316 , H01J2237/06375 , H01J2237/065 , Y10T29/49888
Abstract: A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.
Abstract translation: 电子束源的尖端包括承载涂层的芯。 该涂层由具有比形成芯的表面的材料更大的导电性的材料形成。
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公开(公告)号：US08723138B2
公开(公告)日：2014-05-13
申请号：US13369340
申请日：2012-02-09
Applicant: Volker Drexel , Ulrich Mantz , Bernd Irmer , Christian Penzkofer
Inventor： Volker Drexel , Ulrich Mantz , Bernd Irmer , Christian Penzkofer
IPC: H01J37/065
CPC classification number: H01J37/065 , H01J1/3044 , H01J37/06 , H01J2201/30415 , H01J2201/30446 , H01J2201/30476 , H01J2237/06316 , H01J2237/06375 , H01J2237/065 , Y10T29/49888
Abstract: A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.
Abstract translation: 电子束源的尖端包括承载涂层的芯。 该涂层由具有比形成芯的表面的材料更大的导电性的材料形成。
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公开(公告)号：US20120131785A1
公开(公告)日：2012-05-31
申请号：US13369340
申请日：2012-02-09
Applicant: Volker Drexel , Ulrich Mantz , Bernd Irmer , Christian Penzkofer
Inventor： Volker Drexel , Ulrich Mantz , Bernd Irmer , Christian Penzkofer
IPC: B23P19/04
CPC classification number: H01J37/065 , H01J1/3044 , H01J37/06 , H01J2201/30415 , H01J2201/30446 , H01J2201/30476 , H01J2237/06316 , H01J2237/06375 , H01J2237/065 , Y10T29/49888
Abstract: A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.
Abstract translation: 电子束源的尖端包括承载涂层的芯。 该涂层由具有比形成芯的表面的材料更大的导电性的材料形成。
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