Invention Grant
- Patent Title: Electron beam source and method of manufacturing the same
- Patent Title (中): 电子束源及其制造方法
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Application No.: US12570112Application Date: 2009-09-30
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Publication No.: US08164071B2Publication Date: 2012-04-24
- Inventor: Volker Drexel , Ulrich Mantz , Bernd Irmer , Christian Penzkofer
- Applicant: Volker Drexel , Ulrich Mantz , Bernd Irmer , Christian Penzkofer
- Applicant Address: DE Oberkochen DE Munich
- Assignee: Carl Zeiss NTS GmbH,nanotools GmbH
- Current Assignee: Carl Zeiss NTS GmbH,nanotools GmbH
- Current Assignee Address: DE Oberkochen DE Munich
- Agency: Fish & Richardson P.C.
- Priority: DE102008049654 20080930
- Main IPC: H01J27/00
- IPC: H01J27/00
Abstract:
A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.
Public/Granted literature
- US20100078557A1 ELECTRON BEAM SOURCE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2010-04-01
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