Apparatus for separating chip, a method for fabricating the apparatus, and a method for separating a chip
    1.
    发明申请
    Apparatus for separating chip, a method for fabricating the apparatus, and a method for separating a chip 审中-公开
    用于分离芯片的装置,该装置的制造方法以及分离芯片的方法

    公开(公告)号:US20090035105A1

    公开(公告)日:2009-02-05

    申请号:US12219666

    申请日:2008-07-25

    CPC classification number: H01L21/67092 H01L21/67132

    Abstract: Provided are an apparatus, method for separating a chip and a method for fabricating the apparatus. An apparatus for separating a chip, according to example embodiments, may include a suction holder. The suction holder may include an upper surface with at least one suction hole to suction and fix an adhesive tape to which a plurality of semiconductor chips may be attached. The apparatus for separating a chip may also include a rotatable plunger in the suction holder. The rotatable plunger may include an upper end configured to pass through the at least one suction hole and to project over the suction holder upon rotation of the rotatable plunger. The apparatus for separating a chip may also include a vertically movable plunger lifter. The vertically movable plunger lifter may be configured to rotate the rotatable plunger by contacting and raising a lower end of the rotatable plunger.

    Abstract translation: 提供了一种用于分离芯片的装置,方法和用于制造该装置的方法。 根据示例性实施例的用于分离芯片的设备可以包括抽吸保持器。 抽吸保持器可以包括具有至少一个吸入孔的上表面,以吸引和固定可以附着多个半导体芯片的胶带。 用于分离芯片的装置还可以包括在吸持架中的可旋转柱塞。 可旋转柱塞可以包括构造成穿过至少一个吸入孔的上端,并且在可旋转柱塞转动时突出在吸持保持器上。 用于分离芯片的装置还可以包括可垂直移动的柱塞升降器。 可垂直移动的柱塞升降器可构造成通过接触和升高可旋转柱塞的下端来旋转可旋转柱塞。

Patent Agency Ranking