公开(公告)号：US5093557A

公开(公告)日：1992-03-03

申请号：US352510

申请日：1989-05-16

申请人： Charles K. C. Lok ,  August O. Westner

发明人： Charles K. C. Lok ,  August O. Westner

IPC分类号： C23C14/54 ,  C23C16/46 ,  C30B25/10 ,  C30B31/12 ,  H05B3/26

CPC分类号： C30B25/10 ,  C23C14/541 ,  C23C16/46 ,  C30B31/12 ,  H05B3/265

摘要： Heat is provided to substrates at a step of a process by providing identical movable heating devices, one for each substrate, placing each substrate onto one of the heating devices, sequentially moving each device into a position where the step of the process can be performed on the substrate, and causing each of the devices to provide heat to the substrate at each step of the process.

摘要翻译： 通过提供相同的可移动加热装置，在每个基板上设置相同的可移动加热装置，将每个基板放置在一个加热装置上，依次将每个装置移动到可以对该步骤进行的步骤 衬底，并且使得每个器件在该工艺的每个步骤处向衬底提供热量。