公开(公告)号：US09011591B2

公开(公告)日：2015-04-21

申请号：US13596191

申请日：2012-08-28

申请人： Yuanqiao Rao ,  Robert L. Auger ,  John D. Weaver ,  Paul J. Popa ,  Roxanne M. Jenkins ,  Christopher P. Sullivan ,  Jessica P. Evans ,  Cecilia W. Kiarie ,  Yasmin N. Srivastava ,  Jeffrey L. Fenton, Jr.

发明人： Yuanqiao Rao ,  Robert L. Auger ,  John D. Weaver ,  Paul J. Popa ,  Roxanne M. Jenkins ,  Christopher P. Sullivan ,  Jessica P. Evans ,  Cecilia W. Kiarie ,  Yasmin N. Srivastava ,  Jeffrey L. Fenton, Jr.

IPC分类号： C08G77/22 ,  G03F7/075 ,  G03F7/09

CPC分类号： G03F7/0752 ,  G03F7/091 ,  Y10T428/31663

摘要： Compositions for use in microelectronic applications: Ra comprises one or more multiple bonds, provided that, if Ra comprises more than one multiple bond, these multiple bonds are not in a conjugated configuration; and R1, R2, R3 are independently selected from alkoxyl, hydroxyl, halide, OC(O)R, OC(O)OR, wherein R is alkyl or a substituted alkyl; and Rb is selected from H or a saturated group comprising alkyl, alkylene, or alkylidene; and R4, R5, R6 are independently alkoxyl, hydroxyl, halide, OC(O)R, OC(O)OR, wherein R is alkyl or a substituted alkyl; and Rc comprises more than one multiple bond, and these multiple bonds are in a conjugated configuration; and R7, R8, R9 are independently alkoxyl, hydroxyl, halide, OC(O)R, OC(O)OR, wherein R is alkyl or a substituted alkyl; and R10, R11, R12, R13 are independently alkoxyl, hydroxyl, halide, OC(O)R, OC(O)OR, wherein R is alkyl or a substituted alkyl.

摘要翻译： 用于微电子应用的组合物：Ra包括一个或多个多重键，条件是如果Ra包含多于多个键，则这些多重键不是共轭构型; R 1，R 2，R 3独立地选自烷氧基，羟基，卤素，OC（O）R，OC（O）OR，其中R是烷基或取代的烷基; 并且R b选自H或包含烷基，亚烷基或亚烷基的饱和基团; 和R 4，R 5，R 6独立地是烷氧基，羟基，卤素，OC（O）R，OC（O）OR，其中R是烷基或取代的烷基; 并且R c包含多于一个多重键，并且这些多重键是共轭构型; 并且R 7，R 8，R 9分别是烷氧基，羟基，卤素，OC（O）R，OC（O）OR，其中R是烷基或取代的烷基; R 10，R 11，R 12，R 13分别是烷氧基，羟基，卤素，OC（O）R，OC（O）OR，其中R是烷基或取代的烷基。

公开(公告)号：US20130071561A1

公开(公告)日：2013-03-21

申请号：US13596324

申请日：2012-08-28

申请人： Yuanqiao Rao ,  Robert L. Auger ,  Cecilia W. Kiarie ,  Yasmin N. Srivastava ,  Christopher P. Sullivan

发明人： Yuanqiao Rao ,  Robert L. Auger ,  Cecilia W. Kiarie ,  Yasmin N. Srivastava ,  Christopher P. Sullivan

IPC分类号： C09D183/06 ,  B05D5/06 ,  C09D143/04

CPC分类号： G03F7/091 ,  C08G77/08 ,  C08G77/14 ,  C08G77/20 ,  C08G77/80 ,  C08L83/04 ,  G03F7/0751 ,  C08L83/00

摘要： A composition comprising: A) polymer that comprises: L is CX—CYZ, where X, Y, and Z are independently hydrogen, an alkyl, or a substituted alkyl; and, M is an alkylene, an arylene, a substituted alkylene, a substituted arylene, or C(O)O—W—, where W is an alkylene or a substituted alkylene; and R′, R″, and R′″ are independently selected from an aromatic hydrocarbon, an aliphatic hydrocarbon, or a substituted hydrocarbon that comprises one or more of O, N, S, or Si atoms, provided that at least one of R′, R″, and R′″ is selected from alkoxyl, aryloxyl, hydroxyl, halide, carboxyl, or carbonate; and, p is from 1 to 10,000; and the polymer does not comprise a polyhedral oligomeric silsesquioxane structure; and B) a polymer formed from a composition comprising at least one Si-containing compound as described herein. Compositions are suitable for microelectronic applications, and have improved adhesion to photoresists polymers.

摘要翻译： 一种组合物，其包含：A）包含：L为CX-CYZ的聚合物，其中X，Y和Z独立地为氢，烷基或取代的烷基; 和M是亚烷基，亚芳基，取代的亚烷基，取代的亚芳基或C（O）O-W-，其中W是亚烷基或取代的亚烷基; 和R'，R“和R”“独立地选自芳族烃，脂族烃或包含O，N，S或Si原子中的一个或多个的取代的烃，条件是R “R”和R“”选自烷氧基，芳氧基，羟基，卤素，羧基或碳酸酯; p为1〜10,000; 聚合物不包含多面体低聚倍半硅氧烷结构; 和B）由包含至少一种本文所述的含Si化合物的组合物形成的聚合物。 组合物适用于微电子应用，并且具有改善的对光致抗蚀剂聚合物的粘附性。

公开(公告)号：US09366964B2

公开(公告)日：2016-06-14

申请号：US13596324

申请日：2012-08-28

申请人： Yuanqiao Rao ,  Robert L. Auger ,  Cecilia W. Kiarie ,  Yasmin N. Srivastava ,  Christopher P. Sullivan

发明人： Yuanqiao Rao ,  Robert L. Auger ,  Cecilia W. Kiarie ,  Yasmin N. Srivastava ,  Christopher P. Sullivan

IPC分类号： C09D183/06 ,  G03F7/09 ,  C08G77/08 ,  G03F7/075 ,  C08L83/04 ,  C08G77/14 ,  C08G77/20 ,  C08G77/00

CPC分类号： G03F7/091 ,  C08G77/08 ,  C08G77/14 ,  C08G77/20 ,  C08G77/80 ,  C08L83/04 ,  G03F7/0751 ,  C08L83/00

摘要： A composition comprising: A) polymer that comprises: L is CX—CYZ, where X, Y, and Z are independently hydrogen, an alkyl, or a substituted alkyl; and, M is an alkylene, an arylene, a substituted alkylene, a substituted arylene, or C(O)O—W—, where W is an alkylene or a substituted alkylene; and R′, R″, and R′″ are independently selected from an aromatic hydrocarbon, an aliphatic hydrocarbon, or a substituted hydrocarbon that comprises one or more of O, N, S, or Si atoms, provided that at least one of R′, R″, and R′″ is selected from alkoxyl, aryloxyl, hydroxyl, halide, carboxyl, or carbonate; and, p is from 1 to 10,000; and the polymer does not comprise a polyhedral oligomeric silsesquioxane structure; and B) a polymer formed from a composition comprising at least one Si-containing compound as described herein. Compositions are suitable for microelectronic applications, and have improved adhesion to photoresists polymers.

摘要翻译： 一种组合物，其包含：A）包含：L为CX-CYZ的聚合物，其中X，Y和Z独立地为氢，烷基或取代的烷基; 和M是亚烷基，亚芳基，取代的亚烷基，取代的亚芳基或C（O）O-W-，其中W是亚烷基或取代的亚烷基; 和R'，R“和R”“独立地选自芳族烃，脂族烃或包含O，N，S或Si原子中的一个或多个的取代的烃，条件是R “R”和R“”选自烷氧基，芳氧基，羟基，卤素，羧基或碳酸酯; p为1〜10,000; 聚合物不包含多面体低聚倍半硅氧烷结构; 和B）由包含至少一种本文所述的含Si化合物的组合物形成的聚合物。 组合物适用于微电子应用，并且具有改善的对光致抗蚀剂聚合物的粘附性。

公开(公告)号：US20130071560A1

公开(公告)日：2013-03-21

申请号：US13596191

申请日：2012-08-28

申请人： Yuanqiao Rao ,  Robert L. Auger ,  John D. Weaver ,  Paul J. Popa ,  Roxanne M. Jenkins ,  Christopher P. Sullivan ,  Jessica P. Evans ,  Cecilia W. Kiarie ,  Yasmin N. Srivastava ,  Jeffrey L. Fenton, JR.

发明人： Yuanqiao Rao ,  Robert L. Auger ,  John D. Weaver ,  Paul J. Popa ,  Roxanne M. Jenkins ,  Christopher P. Sullivan ,  Jessica P. Evans ,  Cecilia W. Kiarie ,  Yasmin N. Srivastava ,  Jeffrey L. Fenton, JR.

IPC分类号： C09D4/00 ,  C08G77/24 ,  B32B27/08 ,  C08G77/16 ,  B05D1/36 ,  B05D5/06 ,  C08G77/04 ,  C08G77/18

CPC分类号： G03F7/0752 ,  G03F7/091 ,  Y10T428/31663

摘要： Compositions for use in microelectronic applications: Ra comprises one or more multiple bonds, provided that, if Ra comprises more than one multiple bond, these multiple bonds are not in a conjugated configuration; and R1, R2, R3 are independently selected from alkoxyl, hydroxyl, halide, OC(O)R, OC(O)OR, wherein R is alkyl or a substituted alkyl; and Rb is selected from H or a saturated group comprising alkyl, alkylene, or alkylidene; and R4, R5, R6 are independently alkoxyl, hydroxyl, halide, OC(O)R, OC(O)OR, wherein R is alkyl or a substituted alkyl; and Rc comprises more than one multiple bond, and these multiple bonds are in a conjugated configuration; and R7, R8, R9 are independently alkoxyl, hydroxyl, halide, OC(O)R, OC(O)OR, wherein R is alkyl or a substituted alkyl; and R10, R11, R12, R13 are independently alkoxyl, hydroxyl, halide, OC(O)R, OC(O)OR, wherein R is alkyl or a substituted alkyl.

摘要翻译： 用于微电子应用的组合物：Ra包括一个或多个多重键，条件是如果Ra包含多于多个键，则这些多重键不是共轭构型; R 1，R 2，R 3独立地选自烷氧基，羟基，卤素，OC（O）R，OC（O）OR，其中R是烷基或取代的烷基; 并且R b选自H或包含烷基，亚烷基或亚烷基的饱和基团; 和R 4，R 5，R 6独立地是烷氧基，羟基，卤素，OC（O）R，OC（O）OR，其中R是烷基或取代的烷基; 并且R c包含多于一个多重键，并且这些多重键是共轭构型; 并且R 7，R 8，R 9分别是烷氧基，羟基，卤素，OC（O）R，OC（O）OR，其中R是烷基或取代的烷基; R 10，R 11，R 12，R 13分别是烷氧基，羟基，卤素，OC（O）R，OC（O）OR，其中R是烷基或取代的烷基。