公开(公告)号：US20110031992A1

公开(公告)日：2011-02-10

申请号：US12842179

申请日：2010-07-23

Applicant: Byoungjoo Kim ,  Inseok Hwang ,  Jung-Woo Kim

Inventor： Byoungjoo Kim ,  Inseok Hwang ,  Jung-Woo Kim

IPC: G01R31/00

CPC classification number: G01R31/2891

Abstract: Provided are a tester and a semiconductor device test apparatus having the tester. The tester includes a tested head configured to transfer electronic signals to a probe card. The tester also includes a leveling unit is provided on the tester head. The leveling unit is configured to apply a load to the probe card to maintain a level state of the probe card.

Abstract translation: 提供了具有测试器的测试器和半导体器件测试装置。 测试仪包括被测试的头部，其被配置为将电子信号传送到探针卡。 测试仪还包括在测试仪头上提供的调平单元。 调平单元配置为向探针卡施加负载以维持探针卡的电平状态。

公开(公告)号：US08779792B2

公开(公告)日：2014-07-15

申请号：US12842179

申请日：2010-07-23

Applicant: Byoungjoo Kim ,  Inseok Hwang ,  Jung-Woo Kim

Inventor： Byoungjoo Kim ,  Inseok Hwang ,  Jung-Woo Kim

IPC: G01R31/00

CPC classification number: G01R31/2891

Abstract: Provided are a tester and a semiconductor device test apparatus having the tester. The tester includes a tested head configured to transfer electronic signals to a probe card. The tester also includes a leveling unit is provided on the tester head. The leveling unit is configured to apply a load to the probe card to maintain a level state of the probe card.

Abstract translation: 提供了具有测试器的测试器和半导体器件测试装置。 测试仪包括被测试的头部，其被配置为将电子信号传送到探针卡。 测试仪还包括在测试仪头上提供的调平单元。 调平单元配置为向探针卡施加负载以维持探针卡的电平状态。