Invention Grant
US08779792B2 Tester and semiconductor device test apparatus having the same 失效
测试仪和具有该测试仪的半导体器件测试装置

Tester and semiconductor device test apparatus having the same
Abstract:
Provided are a tester and a semiconductor device test apparatus having the tester. The tester includes a tested head configured to transfer electronic signals to a probe card. The tester also includes a leveling unit is provided on the tester head. The leveling unit is configured to apply a load to the probe card to maintain a level state of the probe card.
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