Invention Grant
- Patent Title: Tester and semiconductor device test apparatus having the same
- Patent Title (中): 测试仪和具有该测试仪的半导体器件测试装置
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Application No.: US12842179Application Date: 2010-07-23
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Publication No.: US08779792B2Publication Date: 2014-07-15
- Inventor: Byoungjoo Kim , Inseok Hwang , Jung-Woo Kim
- Applicant: Byoungjoo Kim , Inseok Hwang , Jung-Woo Kim
- Applicant Address: KR Gyeonggi-Do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2009-0072909 20090807
- Main IPC: G01R31/00
- IPC: G01R31/00

Abstract:
Provided are a tester and a semiconductor device test apparatus having the tester. The tester includes a tested head configured to transfer electronic signals to a probe card. The tester also includes a leveling unit is provided on the tester head. The leveling unit is configured to apply a load to the probe card to maintain a level state of the probe card.
Public/Granted literature
- US20110031992A1 TESTER AND SEMICONDUCTOR DEVICE TEST APPARATUS HAVING THE SAME Public/Granted day:2011-02-10
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